High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

HRX-OM-W002

Model number: HRR012/018/24/030-AN/WN-10/20 The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRR012/018/024/030-AF/WF-10/20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

ISO Standard Hydraulic Cylinder

There may be the case it will vary substantially depending on an ambient environment. (n 2) 2 20 + 55 D-A59W 30 (n = 2, 4, 6, 8 ) Note 1) (n 2) 2 20 + 40 D-Z7/Z80 20 (n = 2, 4, 6, 8 ) Note 1) D-A5/A6/A59W cannot be mounted to 40, 50. Note 1) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

CNG

seal A Urethane 56 20 Same as cushion seal A except for 20, 25 standard strokes Steel ball B Carbon steel 21 Cushion seal B Urethane 57 Tooth ring Stainless steel 22 Damper Urethane Cushion ring gasket A NBR 58 23 Same as cushion ring gasket A except for 20, 25 standard strokes C type snap ring for taper ring Carbon steel 24 Cushion ring gasket B NBR 59 C type snap ring for unlocking cam

HRX-OM-S004

This information is needed when contacting an SMC sales distributor. An example of HRS150-A-20 "3~" stands for "3 interphase".

Fieldbus System

Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations Symbol A, B port P , E port A, B port size (Metric) Symbol A, B port P , E port A, B port size (Inch) Applicable series Applicable series C3 C4 C6 C4 C6 C8 C6 C8 C10 M N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting

CA2

A B A 40 50 63 80 100 0.5 2.5 3.5 19.5 23.5 26.5 0 0 1 3 4 15 15.5 20 24 27 Ht B It cannot be mounted on models with bore sizes 40 and 50 mm.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

15 17 20 25 118 139 167 202 14 16 19 24 15 17 20 25 Single Shaft Type The dimensions below show pressurization to B port

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

+ + B B 20 15 A 5 A B B 20 1 5 15 (Pitch) P = 10.5 M5 x 0.8 (A, B port) A A One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 17.5 18 1 .5 (Pitch) P = 10.5 10-SS5YJ3-32, S32Stations -M5 Station 2 41.5 33.5 Station 20 230.5 222.5 3 52 44 4 62.5 54.5 5 73 65 6 83.5 75.5 7 94 86 8 104.5 96.5 9 115 107 10 125.5 117.5 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170

HRX-OM-Q026

HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9 HRSH250-W-20/40. 8-17 8.5 Pump Capacity . 8-18 8.5.1 HRSH100-A-20/40-, HRSH100-W-20/40. 8-18 8.5.2 HRSH150/200-A-20/40-HRSH150/200/250-W-20/40. 8-18 8.5.3 HRSH250/300

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

Series VQ Metal Seal/Rubber Seal Body Ported

SI unit output No. 0 1 2 3 4 5 6 7 8 9 SI unit output No. 0 1 2 3 4 5 6 7 A B A B B A Void A Void A A B A B B A A A SY Double Double Double Double Double SI unit SI unit Single Single Single Single Single SYJ Stations 1 2 3 4 5 Stations 1 2 3 4 5 Single/Double mixed wiring (Option) Double wiring (Standard) SX SC applicable to SYSBUS Wire System (OMRON) SD applicable to Satellite I/O Link

Air Cylinder

CS1 CS2 Direct Mount Type (CG1R, CG1KR) (mm) D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-H7lW D-H7NF D-H7BA D-H7l D-H7C Auto switch model D-C7l D-C80 D-C73C D-C80C D-G59F D-G5NT D-B5l D-B64 D-B59W D-A9l D-A9lV Bore size A B A B A B A B A B A B A B 20 12 24 8 20 7.5 19.5 8.5 20.5 4 16 2.5 14.5 5.5 17.5 25 11.5 24.5 7.5 20.5 7 20 8 21 3.5 16.5 2 15 5 18 32 13 25 9 21 8.5 20.5 9.5 21.5 5 17

CG5-S

Green (G) Green (G) Green (G) T0645 Color symbol -20 Black (B) Clear (C) Clear (C) 4.5 White (W) Orange (YR) Orange (YR) Black (B) Black (B) Black (B) White (W) White (W) White (W) T0806 Red (R) Red (R) Red (R) 6 8 TU0805 TU0805 Color symbol -20 Blue (BU) Blue (BU) Blue (BU) 8 8 5 5 Color symbol -100 Color symbol -20 Yellow (Y) Yellow (Y) Yellow (Y) Green (G) Green (G) Green (G) Black (B)

Rotary Actuator

CRQ2X MSQX MRQ Auto Switch Working Principle [Pressure is applied from the B port.] The auto switch B is turned ON by the magnet B in the state that the pressure is applied from the B port and the piston B moves to the left side. At this time, the auto switch A turns OFF . Magnet B Piston B A port B port Auto switch B Auto switch A [Pressure is applied from the A port.]

2–4

Variations Standard stroke (mm) Series Bore size (mm) Cushion 5 10 15 20 25 30 35 40 45 50 75 100 12, 16 20, 25 Rubber cushion CQM 32, 40 50 Compact Cylinder/Guide Rod Type 12, 16, 20, 25, 32, 40, 50 Series CQM How to Order Without auto switch B 20 10 CQM B 20 10 M9B S CDQM With auto switch With auto switch Number of auto switches Mounting Bore size 12 16 20 25 32 40 50 Nil S n 2 pcs. 1 pc

energy saving effect

Applicable model Rated current [A] Sensitivity of leak current [mA] Short circuit display method HRSH100--20-B 30 Earth leakage breaker HRSH150--20-B HRSH200--20-B 40 HRSH250--20-B 50 HRSH300--20-B 30 Mechanical button * 400 V type is equipped as standard.

SMC

Z ZZ (NN1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA