ITV

m A DC Current type 0 to 20 m A DC Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC VEX Nil Without bracket Flat Bracket AMR PWR ERR Option Built-in One-touch fittings type B ITV For single unit SUP (VAC) EXH (ATM) OUTx z c IC Symbol L-bracket Metric size (Light gray) PWR ERR Nil 4 VBA C Inch size (Orange) U 5/32" VE For manifold VY1 SUP (VAC) EXH (ATM) Metric size (Light gray) OUTx z

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

20 20 23 Z 8 8 8 10 LD 4 4 4 4 LT LS 25 28 28 30 Bore size 40 47 47 54 13 17 17 22 26 32 32 41 26 26 26 31 41 45 45 50 5 6 6 8 8 8 8 10 21 25 25 27 149 153 155 191 The bracket is shipped together.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

x g x Y m3 x g x Z y z M2 z Y m3 x g x X m4 x g x Y M3 m4 x g g: Gravitational acceleration Dynamic Moment z Mounting orientation Horizontal Ceiling Wall Vertical M1 x a x mn x g 1.4 100 Dynamic load FE 1 3 a Dynamic moment M1E x FE x Z a M2E Dynamic moment M2E is not generated. 1 3 M3 M3E Note) Regardless of the mounting orientation, dynamic moment is calculated with the formulas above.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y m3 x g x X m4 x g x Y M3 m4 x g g: Gravitational acceleration Dynamic Moment z Mounting orientation Horizontal Ceiling Wall Vertical M1 x a x mn x g 1.4 100 Dynamic load FE 1 3 a Dynamic

2–4

2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

CHKD/CHKG

Rod end male threads (mm) (mm) Bore size (mm) Bore size (mm) a b c e f g h LW M P Q R X1 Y1 Z ZZ SS 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 44.5 43 1/8 16.5 6 10.5 15 7.5 58 73 12.5 15 M10 x 1.25 6 10 33 91 50.5 49 1/8 17 8 10.5 15 7.5 60 75 15.5 18 M12 x 1.25 6 12 36 96 64.5 63 1/4 19.5 10 11 16 8 67 83 22 25 M16 x 1.5 7 14 44 111 71 1/4 20.5 10 20 10 75 95 72.5 13 27 30 M20 x

HRX-OM-Q026

HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9 HRSH250-W-20/40. 8-17 8.5 Pump Capacity . 8-18 8.5.1 HRSH100-A-20/40-, HRSH100-W-20/40. 8-18 8.5.2 HRSH150/200-A-20/40-HRSH150/200/250-W-20/40. 8-18 8.5.3 HRSH250/300

CXT

15 10 2 pcs. 10 10 25 to 5 20 15 5 1 pc. 10 10 25 CXTl25 5 15 10 10 2 pcs. 10 15 20 CXTl 32 40 5 15 10 5 1 pc. 10 10 20 (mm) D-F7lW D-J79W D-F9BAL D-F7NT D-F79F Auto switch model D-A7l D-A8l D-A73C D-A80C D-A7lH D-A80H D-F7l D-J79 D-F7lV D-J79C Applicable model D-F7lWV D-A79W D-F7LF Number of mountings 2 pcs. 5 10 15 15 20 20 25 CXTl 32 40 1 pc. 5 5 10 15 15 20 25 3.8-10 Platform Cylinder

High Vacuum Angle Valve, XL Series

Note 2) The time required for 90% valve movement when an actuation pressure of 0.5MPa (72psi) is applied. There is a difference of about 20% in this value at the upper and lower pressure limits.

CU

) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

an M5 female thread is used.)

LFE-OMZ0012

2.5 depth 8.5 2 Approx. 45g LFE14(Z) 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE26(Z) 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 Approx. 70g LFE38(Z) 62 53 4.6 3.5 20 68 43 2.5 depth 8.5 2.6 Approx. 70g NOTE) If you are installing directly, choose the self tapping screw in depth is to 8mm.

Basic Type/Direct Mount Type

If an accurate stopping position is required at the stroke end or midstroke, use an external stopper to secure accurate positioning.

HRX-OM-Y098

This information is needed when contacting an SMC sales distributor. Model number Serial number Kind and amount of refrigerant * (An example of "HRL300-A-20" model.) "3~" stands for "3 inter phase".

VFR

3 position closed center: VFR531 -E, VFR531 -D(Z) 3 position exhaust center: VFR541 -E, VFR541 -D(Z) 3 position pressure center: VFR551 -E, VFR551 -D(Z) [For Rc 3/4] Rc 1/8 External pilot port 209 100 116 [134] 47.5 [43.5] Rc 1/8 (PE port) 9 [20] Rc 1/8 (PE port) 8 Manual override (Non-locking) 2 11 [13] A B 2 [0] 48 60 72 [79] 2 12 X PE PE A B EA EB P Applicable cable O.D. 8 56 [60] 31

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6 Refer to page 646 for dimensions with connector cable. 631 Series 10-SYJ700 Manifold Specifications [Option] Directional Control Valves Air Grippers Modular F.

3

Low temperature operation 1) The valve can be used in an ambient temperature of between 20 to 10C.

CRQ2

Shaft Type Variation, Four Chamfers (Size 20/30/40) Shaft Type: X, Z Specifications CRQ2B CDRQ2B Shaft type Rotating angle Size Air (Non-lube) Fluid Single w/ four chamfers (X), Double w/ four chamfers (Z) Applicable shaft type Refer to How to Order on page 11-8-2 for further information. 20, 30, 40 Applicable size Shaft type 1 MPa Max. operating pressure X Z Single shaft with four chamfers

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

CQS

, refer to page 7-6-20.