Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

MY1

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 16 20 20 16 20 Mounting position Mounting position 16 A 70 90 93 73 94 A A 74 B 90 110 107 87 106 B B 86 Operating range Note) 11 7.5 6.5 8.5 6.5 Operating range

VM

5 w !3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material PBT ADC Material Note No. q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

Series VQ Metal Seal/Rubber Seal Body Ported

P kit (20 pin).

Modular Type Lubricators Series AL

level gauge B B B B B B B Dimensions B Barb fitting Applicable tubing: T0604 Model Standard specifications Optional specifications Bracket mount P M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 A 25 40 53 70 75 90 95 B 77 115 142 176 176 250 268 C 26 36 38 40 38 41 45 D 12.5 20 26.5 35 35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6 Refer to page 646 for dimensions with connector cable. 631 Series 10-SYJ700 Manifold Specifications [Option] Directional Control Valves Air Grippers Modular F.

2–4

35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 14 8 80 41 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7 Compact Cylinder/Guide Rod Type Series CQM Auto Switches/Proper Mounting Positions and Height for Stroke End Detection Reed switch Solid state switch D-A9 A B W D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch

HRX-OM-X071

HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow

HRX-OM-X037

9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300-A-40-T3 CH2 .9-22 9.6 Types of Hazard Labels . 9-23 9.6.1 Positions of danger warning label .9-24 9.7 Standards . 9-25 9.8 Daily

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

40 Work load: W [kg] Work load: W [kg] 20 Lead 16: LEKFS32EA 30 Lead 16: LEKFS32EA 20 Lead 24: LEKFS32EH 10 Lead 24: LEKFS32EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40EB Lead 10: LEKFS40EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEKFS40EA 30 Lead 30: LEKFS40EH

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

SV

19.7 Block separation lever B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 148 137.5 109.5 22.5 3 160.5 150 125.5 20.5 4 173 162.5 141.5 19 5 198 187.5 157.5 23.5 6 210.5 200 173.5 21.5 7 223 212.5 189.5 20 8 235.5 225 205.5 18 9 260.5 250 221.5 22.5 10 273 262.5 237.5 21 11 285.5 275 253.5 19 12 310.5 300 269.5 23.5 13 323 312.5 285.5 22 14 335.5 325 301.5 20

CXT

However, if there is any problem, use a 3 wire DC style. 3.8-11 Series CXT Auto Switch Mounting Position and Mounting Height Reed switch Solid state switch A B W D-F9NW D-F9PW D-F9BW D-A90 D-A93 D-A96 D-F9N D-F9P D-F9B D-F9BAL 12 A B W 16, 20, 25 W A B 32, 40 (mm) D-A90 D-A93 D-A96 D-F9NW D-F9PW D-F9BW D-F9N D-F9P D-F9B Auto switch model D-F9BAL Symbol A B W A B W A B W Standard stroke 12

Modular F.R.L. Unit

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Bracket mounting size Accessory specification Standard specification With pressure gauge With auto drain Model Port size B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5

JIS Standard Hydraulic Cylinder

x 1.5 C B-series M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 31.5 30 20 24 M30 x 1.5 dH10 L L M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 M39 x 1.5 M8 x 1.25 M10 x 1.5 50 185 145 95 80 40 40 25 26 M48 x 1.5 H +0.4 +0.1 D M5 x 0.8 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M16 x 1.5 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 20 16 20 M20 x 1.5 B J M6 x 1.0 M8 x 1.25 40 145 115 75 60 31.5 30 20 24 C-series

MQQ

RR CL + Stroke RR 15 6.5 12 8 6 10 A + Stroke 18 8 16 10 9 16 20 10 20 10 10 20 20 18 36 12 10 25 22 18 36 12 10 28 8 Series MQQ Accessory Dimensions Rod end thread adapter Rod end nut d NN MM Rod D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 58.2 5.5 35 18 28.8 70.7 B COM A B COM A B COM A B COM A B COM A DIN rail holding screw Manual override DIN