Nozzle Type Ionizer

0.3 High flow rate nozzle High flow rate nozzle 0.2 O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.1 0 0 120 40 60 20 80 100 Flow rate [L/min (ANR)] Ionizer 21 Made to Order IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01-X367 (107) 16 92.5 5 9.5 12 Variable nozzle direction 46 3.5 A 18.5 6 11 6 A 12.4 8 5 6 A-A 27.7 40 M3 x 0.5 thread depth 4 (Ground terminal)

51

28 28 28 30 36 46 43.4 48 59.4 71.4 86 105.4 CS1 Up to 300 Up to 300 Up to 300 CS2 Up to 300 Up to 300 Use a thin wrench when tightening the piston rod.

Series CE1

OUT OUT Proper Auto Switch Mounting Positions (Stroke End) Proper Auto Switch Mounting Positions(Series CE1) Auto switch (mm) Bore size (mm) Auto switch model Symbol 20 32 40 50 63 12 A B A B A B A B A B A B A B A B A B 40.5 47 55 79 82 85.5 D-A7, A8 4 13 17 39 44 41.5 41 47.5 55.5 79.5 82.5 86 D-A7lH, A80H, A73C, A80C, D-F7l, J79, F7lV, J79C 4.5 13.5 17.5 39.5 44.5 42 A B 38 44.5 52.5 76.5

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

GDM2C 1454 A

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54 24 40.5 16.5 80 83 58 85 37 64 5 27.5 125 129 89 135 56 105 44 1213 Series ZPT/ZPX How to Distinguish Different Pad Materials How

AC Servo Motor Driver (Pulse input type)

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or Caution moderate injury. Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death Warning or serious injury. Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or Danger serious injury. Warning 1.

70astamb1

When replacing mounting bracket, use a hexagon wrench. MB Mounting/Piping Caution MB1 1. Mounting a workpiece on rod end To screw a bracket or a nut onto the threaded portion at the tip of the piston rod, make sure to retract the piston rod entirely, and place a wrench over the flat portion of the rod that protrudes.

mb1

2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'

Applicable Auto Switch Model

(Tolerance 30%) 5.3-46 2 Color Indication Style Solid State Switch/Direct Mounting D-Y7NW(V)/D-Y7PW(V)/D-Y7BW(V) Applicable Actuator Series Grommet Series Bore size (mm) The suitable operating point can be indicated with a green light.

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 5046 149 42 50 50 141.5 156 199 25 41 84 131 152 172 199 20 16 37 57 84

Slit Valve

CAUTION 184 49 Valve seat side (XGT222, 223, and 224 common) Cassette type Full MESK/XGT224 305 50 85 36 (mm) A B C D Valve type Model XGT221-32 XGT221-46236 XGT222-32 XGT222-46236 XGT223-46236 XGT224-46236 222 32 235 45 Non-cassette type 236 46 249 59 222 32 Cassette type Standard 236 46 236 46 Cassette type Half MESK !

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

3/5 3/5 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

CE

D-F9 7 16 20 42 47 44.5 42.5 49 57 81 84 87.5 Switch Hysteresis D-F9W 6 15 19 41 46 43.5 Proper auto switch mounting positions (Series CEP1 ) (mm) Bore size (mm) 12 Auto switch model Symbol 20 A B A B A B A B A B A B A B 75.2 82 Switch operating position (ON) D-A90, A93, A96 7.9 12 75.2 82 D-A90V, A93V, A96V 7.9 12 Hysteresis Reed switch: 2mm or less Solid state switch: 1mm or less 79.2 86

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Auto Switch Guide

When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

HRX-OM-R016

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.