Cylinder with Lock Series CNS When using a single/double knuckle joint together with a rod end nut, the A and H dimensions should be extended.
Circuit Diagram : D-90Type Bore Dimension A j Dimension B Dimension C ;t)-k.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T VMG Seal Tube Can be used for a wide range of pressures from a low vacuum up to a pressure of 1.0 MPa The use of a special profile ensures sealing and reduces resistance when the tube is inserted.
Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer
Press the manifold. 1-3-19 20 Series SZ3000 Dimensions: SZ3000 Plug-in 1 2 SS5Z3-60FD Stations UWith external pilot 2n2One-touch fitting [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 13.3 24 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 A 4 2One-touch fitting [1(P), 3(R) port] Applicable tubing
D-M9 D-M9V D-F9W D-F9WV D-A9 D-A9V D-F9BAL Bore size (mm) A B A B A B A B A B A B A B 12 40.5 4 41 4.5 38 2 46 9.5 39.5 3 43.5 7 42.5 6 20 47 13 47.5 13.5 44.5 10.5 52.5 18.5 46 12 50 16 49 15 32 55 17 5.5 17.5 52.5 14.5 60.5 22.5 54 16 58 20 57 19 40 79 39 79.5 39.5 76.5 36.5 84.5 44.5 78 38 82 42 81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91
Bore size (mm) A B A B A B A B A B A B A B 12 40.5 4 41 4.5 38 2 46 9.5 39.5 3 43.5 7 42.5 6 20 47 13 47.5 13.5 44.5 10.5 52.5 18.5 46 12 50 16 49 15 32 55 17 5.5 17.5 52.5 14.5 60.5 22.5 54 16 58 20 57 19 40 79 39 79.5 39.5 76.5 36.5 84.5 44.5 78 38 82 42 81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5 88.5 44.5 87.5 43.5 Operating
] R P R 63.8 (DIN 65.1) 63 (DIN 64.3) R P R B B B B B 122 [126.4] 19 19 19 60 31.5 22 A A A A A 1/4 (P, R port) 13.8 (For DIN: 15.1) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/surge voltage suppressor) + + + 73 [80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector
(A contact) N.O. (A contact) Number of auto switches N.O. (A contact) N.O. (A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.
ENT 84 13 Series LC1 Options T-nuts and T-brackets for Mounting Be sure to use when mounting the controller. Note) The controller unit includes either T-nuts or T-brackets.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)
1 u u Note) Note) Valve element: SUS316 yNote) Piston seal: HNBR Body: Aluminum + Anodized B: 3 port valve VCC13-00 e y r t Note) q w Note) Component Parts Model Part no. Description Orifice body assembly Symbol Component Material Qty. Order qty. A-q A-w A-e A-r A-t A-y A-u A-!1 A-y A-u A-!2 A-!
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
Fixed end KG KFG2 MS KKA Maximum Operating Pressure How to Order KP Metric size TD0425 10 2.0 LQ 1.8 Max. operating pressure MPa TD0425 Length per roll 1.6 MQR Length 10 m roll 20 m roll Symbol 10 20 TD0604 1.4 T T 1.2 TD0806/TD1075/TD1209 1.0 IDK Tubing model 0.8 0.6 0.4 0.2 0.0 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 Operating temperature C 509 Soft Fluoropolymer Tubing
I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)
2 Zinc chromated Cushion ring A Release piston Carbon steel Brass -X 20 Oil-impregnated sintered alloy Release piston bushing Same as cushion ring A $9 !3 Cushion ring B Brass except 20, 25 standard stroke 25,32,40 Steel + Special resin 20%0 !4 Zinc chromated long strokes not available Seal retainer Unlocking cam Electroless nickel plated Rolled steel Chromium molybdenum steel %1 !
Adapter ZP3P-T (20 to 50) PTSF-(A5/AG1/A12/AG2/AG3) ZP3P-T (20 to 50) PTSF-(B5/B8) w T male thread adapter assembly (With gasket) p.3 p.3 Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-A5 V V ZP3PA-T1-AG1 V V ZP3PA-T2-A12 V V ZP3PA-T2-AG2 V V ZP3PA-T2-AG3 V V p. 11 w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions w T male thread adapter assembly w T
For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1