MQQ

2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

7 60 64 76 7 6H9 (+0.030 0 ) depth 66 6H9 (+0.030 0 ) depth 66 11 Motor mounting position: Right side parallel 153 G 70 60 64 *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) ey q t wr ey q t wr A A i i P R P R u u Component Parts Replacement Parts Description Body Piston plate End cover Piston Spool valve ass'y Spool spring Description Sub-plate Pilot valve Note Zinc die cast Part No.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Q Q Q 25 Q Q Series VQZ Base Mounted Type Construction VQZ100 Poppet type N.C.

MK

ML2B ML1C REA REC Installation and Adjustment/ Regarding Clamp Arm Removal and Reinstallation RHC MTS q During the removal or reinstallation of the clamp arm, make sure to use a wrench or a vise to secure the clamp arm before removing or tightening the bolt.

VQ5000

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

MXW Series Long Stroke Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 133 Q MXW Series 8, 12, 16, 20,25 Linear guide table provides long stroke Linear guide Long stroke (up to 300mm) Linear guide provides long stroke and smooth operation without vibration.

Rotary Cylinder Series MRQ Size: 32, 40 1

The standard angle adjustment range of 5 (one side) is changed to in this type. + 5 95 (mm) E Mounting screw Y Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)

MRQ

(mm) Stroke Size Y Q E Mounting screw 58.5 ( 5 stroke) /2 61 ( 10 stroke) /2 61 ( 15 stroke) /2 63.5 ( 20 stroke) /2 61 ( 25 stroke) /2 63.5 ( 30 stroke) /2 63.5 ( 40 stroke) /2 66 ( 50 stroke) /2 66 ( 65 stroke) /2 71 ( 75 stroke) /2 68.5 ( 90 stroke) /2 73.5 (100 stroke) /2 68 ( 5 stroke) /2 68 ( 10 stroke) /2 70.5 ( 15 stroke) /2 68 ( 20 stroke) /2 70.5 ( 25 stroke) /2 68 ( 30 stroke)

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No. Note Note Description Material Description Material 40 to 63 Wear ring Resin Aluminum alloy Cylinder body q !8 CE2 12 to 20 Carbon steel Brass Rod end nut !

CJ2X/CUX/CQSX/CQ2X/CM2X

CQSX/CQ2X/CM2X 10 to 16 10 to 32 12 to 25 32 to 100 20 to 40 RE A B Air Cylinder Series CJ2X Page Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) REC 10, 16 0.06 1 CX 10-3-6 CY MQQ M Free Mount Cylinder Series CUX Bore size (mm) Minimum operating pressure (MPa) Minimum operating piston speed (mm/s) RHC 10, 16 0.06 1 MK(2) 10-3-8 20, 25, 32 0.05 0.5 RS Q

CJ2X/CUX/CQSX/CQ2X/CM2X

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Free Mount Cylinder Series CUX Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) RHC 10, 16 0.06 1 MK(2) 10-3-8 20, 25, 32 0.05 0.5 RS Q G RS H A Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

82 98 K 9.5 16.0 15.0 L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 Bore size (mm) 25 32 40 9 11 14 PP2 SS 5.1 4.0 9.0 PA PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 TT 15.5 21.0 26.0 RR2 17.9 24.0 29.0 UU 16 16 21 VV 16 19 23 W 122 144 160

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Basic Type/Direct Mount Type

0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

CJ5-S

Lead wire length symbols: 3 mL (Example) G5BAL 5 mZ (Example) G5BAZ For details about auto switches with pre-wire connector, refer to page 10-20-66. Mounting Bracket Part No.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.