Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

F

E A D: M-5E B U L K H E A D R E D U C E R: M-5ER R E D U C I N G B U S H I N G: M-5B M5 female to 18 female taper M5 female to 18 male taper P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R T E C H N I C A L SPECIFICATIONS S T R A I G H T B A R B C O N N E C T O R: M-01AU-4 M-01AU-6 S T R A I G H T A D A P T O R: M-01H-4 M-01H-6 Applicable Tube Material Nylon Soft Nylon Polyurethane

Speed Controller: Standard Type Series AS In-line Type

Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 Construction AS2200-01

Precision Regulator Series IR1000/2000/3000

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge2 G33-4-01 G43-4-01 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached two

E-P HYREG ® Series VY1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEXA-18-2A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G36-10-01 G46-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

(S)-01 02 G H G H G H G H 149.5 (3 position: 157) VK VZ 2-4.5 mounting hole Manual override (Non-locking) VF 300 (Lead wire length) VFR Pilot EXH port VP4 (External pilot port) VZS Not machined VFS VS4 3-Rc 1/8, 1/4 VQ7 ( ): Rc 1/8 EVS L plug connector 2 position double: VZS3250-L(Z)-01 02 3 position closed center: VZS3350-L(Z)-01 02 3 position exhaust center: VZS3450-L(Z)-01 02 3 position

Magnetically Coupled Rodless Cylinder

Mounting orientation and static moment Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting Bore size (mm) A [mm] 6 m 19 21 25 27 33 40 49 Static load 10 15 20 25 32 40 m x g x (z + A) m x g x x m x g x y m x g x x m x g x y M1 M2 M3 moment Static m x g x (z + A) m x g x x m x g x y A: Distance between the center of the guide shaft and the upper surface

Series SV

NP1L-JP1 (Fuji Electric Co., Ltd.) 16 outputs 16 outputs 16 outputs a) 2 wire type DG Power supply 24V 0V 24V 0V D G D G 24V 0V Slave unit (SI unit) Slave unit (SI unit) Slave unit SG B A Master unit (SI unit) FG SG B A FG SG B A FG SG B A 24V 0V Power supply FG Transmission lines Twisted pair wire with shield Master unit SI unit SI unit FG DG DB DA Terminal resistor Terminal resistor



the External Pilot VEX1 3 3 B A M5 G 1.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

VK300

Solenoid direction Port size Opposite side of A port Nil 1 8 Rc G NPT NPTF 01 Rc Nil C4 4 cassette F N T Same side of A port S C6 6 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station CE-compliant VV061 20 20 stations Q CE-compliant Nil P port: Rc 1/8 R port: Rc 1/8 VV100 Note) Applicable only for DIN terminal

Intrinsically Safe Valve

Thread type Nil F N T Rc A, B port size Thread piping G Symbol 01 Port size Applicable series NPT 1/8 53-SY5000 NPTF EB P EA One-touch fitting (Metric size) Symbol C6 C8 Port size Applicable series A B 6 One-touch fitting 53-SY5000 A, B port size 53-SS5Y5-41-05-01 Manifold base (5 stations) 01: 1/8 8 One-touch fitting One-touch fitting (Inch size) Symbol N7 N9 Port size Applicable series

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Dimensions L6 D4 Universal type H D1 Applicable tubing O.D. d (Hexagon width across flats) M1 L3 A L5 L4 D3 L1 L2 D2 T Metric Size Inch Size A Model A Weight (g) Weight (g) d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 Model M1 AS131F-M5-23T AS131F-U10/32-01T 1/8" 8.4 3.2 8.4 19.8 19.8 17.5 12.7 17.5 12.7 28.7 10 28.7 AS131F-M5-04T AS131F-U10/32-03T 5/32" 9.3

2-Color Display Digital Flow Switch Series PFM

A B 4 (5/32") C4 10.1 8.1 6 C6 10.3 8.3 8 (5/16") C8 12 10 1/4 N7 10.3 8.3 PFM -01/02--X693 PFM -01/02--X694 7 5 7 5 10.2 10.2 43 1 1 IN OUT A 43 (34.2) (34.2) 13 3 13 3 A 18 C 18 B C OUT B 48 20 IN 20 48 2 x 3.4 2 x 3.4 C (Width across flats) A B Port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 13 11 17 17 15 G 1/4 21 940 Series PFM7/PFM5 Made to Order 2 Please contact SMC for detailed specifications

A

E I R L E N G T H A N D W E I G H T S H O U L D B E W I T H I N T H E F O L L O W I N G R A N G E.

5 Port Solenoid Valve SY Series

, (H): SY5220(-F2) G H C4, N3 C6, N7 C8, N9 SY5220-01(-F2) G H 1/8 (A, B port) 16.2 (For mounting bracket) 2-M3 x 0.5 depth 3.5 22.6 28.1 [35.1] 16.7 32.5 20.5 One-touch fitting (A, B port) Applicable tubing O.D. : 4, 5/32" : 6, 1/4" : 8, 5/16" G: Approx. 300 H: Approx. 600 107.2 [111.6] (Lead wire length) 62.8 11.6 B A Manual override (For manifold mounting) 23.2 14.5 36 (Light/surge voltage

JXCx-OMX0009

Brown 2 A B-1 A A-1 Red 1 Cable lehgth (L) Orange 6 B B-2 8 8m B A-2 Yellow 5 Green 3 COM-A/COM B-3 A 10m COM-B/ A-3 Blue 4 B 15m Shield (3) Cable color Terminal No. C 20m Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 produced upon recipt of A A-5 Black 6 order B B-6 Orange 9 B A-6 Black 8 Only Robotic type cable 3 can be selected.

0.4

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 one-touch fitting R R G 1/2 61.5 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Table of Contents

x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide