Base Mounted Metal Seal/Rubber Seal Series VQ

With lead wire ZS-20-A ZS-20-5A-50 0.6 m 3 m 5 m Nil 30 50 (The flow characteristics are for the supply pressure of 0.5 MPa.)

0.

M-type plug connector (M) P.2 (A) 2 M-type plug connector (M) Rubber Metal VQZ100 + 1 (P) 3 (R) N.O.

Table of Contents

Provided with a protective cover to prevent hazards. T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

SMC Electronic Switch Series Variations

Do not use a screwdriver with a large grip or with a tip that does not fit into the trimmer groove.

HRX-OM-X071

signal 1 alarm AL.01 AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal

JXCx-OMY0004

I IP address This is a physical address, which is uniquely assigned to any hardware device on a network. This address is permanently written to the device before shipment. MAC address M Media Redundancy Protocol Performs fast switching to a redundant communication route, when a problem occurs within a Ring network.

VZ5000

M plug connector (M) VZ5220-M-01 (Lead wire length) 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ5220-D-01 Built-in One-touch fittings VZ5220--C6 C8 C6: MAX. 6 C8: MAX. 6.5 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-58 5 Port Solenoid Valve Body Ported Series VZ5000 3 Position

60

m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

•

A12 Symbol, A13 Symbol A14 ::l C. ~ ,DA c Rball 1 \ B ~l , I ~ I H l i Symbot, A16 Symbol,A15 Symbol' A17 Symbol A1S Symbol A 19 .. ~ ~i >If? I ~ A H / ~ M 30' ! " A I H 30' MM .. Symbol A23 -j -j Symbok A21 Symbok A20 Symbol' A22 Symbol, A24 30' I Q " m "~ M , I 30' ~i m " o 0 " '-/! T T A A L : AL : A H , H H H Symbot, A26 Symbok A25 Symbol' A27 ~!'~~~ _ '_ 7) M A =~O=D=A=3 ~!

Table of Contents

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)

KJ

K Reducer Elbow: KQ2L M Applicable fitting size d (inch) Model L2 A M Min. port size Applicable tubing O.D.

IIIIIII

B c l D E a : H K M N P R 4.65 (1 18 2) 4 5 6 (114.7\ 1.27 | 0.80 32 2\t(20 4' 1 . 1 0 t2a\ 1.67 4 2 2 0.79 12rl\ 1 E 9 t4a) 0 1 6 AI 2 . 1 7 (551 1 5 7 (40) 0.91 t23l 3.89 98.7 087 (22\ 0.08 (21 Millimeters in Parentheses NVFU250-N02-01 v t 4 m m 'Actuators may be rotated to operate without changing port location: Remove screws and reverse actualor NVFM250-N02-02 B A ^^l\-Tli-7L. s--1r\lll

Mechanical Valves Series NVM, NVFM, NVZNI

B c l D E a : H K M N P R 4.65 (1 18 2) 4 5 6 (114.7\ 1.27 | 0.80 32 2\t(20 4' 1 . 1 0 t2a\ 1.67 4 2 2 0.79 12rl\ 1 E 9 t4a) 0 1 6 AI 2 . 1 7 (551 1 5 7 (40) 0.91 t23l 3.89 98.7 087 (22\ 0.08 (21 Millimeters in Parentheses NVFU250-N02-01 v t 4 m m 'Actuators may be rotated to operate without changing port location: Remove screws and reverse actualor NVFM250-N02-02 B A ^^l\-Tli-7L. s--1r\lll

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

JXCx-OMY0008

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 8 8m COM-A/COM B-3 Green 3 COM-B/ A-3 A 10m Blue 4 (3) Shield B 15m Cable color Terminal No. Vcc B-4 Brown 12 C 20m GND A-4 Black 13 Produced upon receipt of order A B-5 Red 7 A A-5 Black 6 Only "Robotic type cable" can be selected. B B-6 Orange 9 B A-6 Black 8 (4) 3 Signal name Terminal No.

JXCx-OMY0006

Terminal number Cable color Terminal number A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 8 8m COM-A/COM B-3 Green 3 A 10m COM-B/ A-3 Blue 4 (3) Shield B 15m Cable color Terminal number Vcc B-4 Brown 12 C 20m GND A-4 Black 13 Produced upon receipt of order A B-5 Red 7 A A-5 Black 6 Only "Robotic type cable" can be selected.

High performance type Step Motor Controller (Servo/24 VDC)

10 No.JXC-OMY0002-A 4 Actuator cable for actuator with lock (for sensor and lock) [8 to 20 m] (1) (2) A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 B-3 A-3 Yellow 5 *1) Produced upon receipt of order Only "Robotic type cable" can be selected. 8m*1) 8 Green 3 Blue 4 A 10m*1) Shield (3) B 15m*1) Vcc B-4 Brown 12 GND A-4 Black 13 C 20m*1) A B-5 Red 7 A A-5 Black 6 B

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L plug connector (L) (Made to order) 100V AC 200V AC 110V AC 220V AC 0.6 0.7 M plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

OMS0020

1 0 to Note1) 11 AREA A Position 1 [m] Note1) 1 0 to Note1) 12 AREA A Position 2 [m] Note1) 1 0 to Note1) 13 AREA B Position 1 [m] Note1) 1 0 to Note1) 14 AREA B Position 2 [m] Note1) 1 0 to Note1) 15 Unused 4 Step Data No. 2 (Step Data No. 1Note6) 0-15 Same as above.