Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: N01 (NPT1/8), Connector Type: S (M12 Connector Type), Bracket: A5 [Bracket E for M12 Connector Type (ZS-46-A5)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: N01 (NPT1/8), Connector Type: S (M12 Connector Type), Bracket: A4 [Bracket D for M12 Connector Type (ZS-46-A4)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: N01 (NPT1/8), Connector Type: S (M12 Connector Type)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration

Rated Vacuum Range: -100.0 to 100.0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: NPT1/8, Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B (ZS-46-A2)], Operation Manual: -

PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

100

Max. suction flow rate 3 types available: 100, 300 *1 , and 600 *1 L/min (ANR) *1 Branch + Port exhaust Silencer Air consumption Max. suction flow rate: 600 L/min (ANR) 91% reduction (Under SMCs measurement conditions) ZL6 Series Suction: 300 L ZL3 Suction: 600 L Reduced by the pressure switch for vacuum with energy saving function and efficient ejectors ZL6 10% reduction Suction: 100 L ZL1

IR1000/2000/3000

min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 1.2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 0.9 l/min (ANR) or less (at maximum set pressure) Bleed hole: 9.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or

Pneumatic Positioner IP300/IP3100

'1l8 NPT G43-P10-N01 or KSl OB-AD1 1 (St.

Vacuum Pad: Ball Joint Type

Vacuum Pad: Ball Joint Type ZPT/ZPR Series Pad Diameter: 10, 13, 16, 20, 25, 32, 40, 50 on n io on n a io a pt pt s s or la or la ds nt ds nt ed ed a a or or w w l f l f or or ea ea k k id su id su pe rfa pe rfa ty ty ce ce nt nt s s oi oi ac ac l j l j ac ac al al e e B B s s ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR ZPT ZPR XT661 ZPT Series: Vertical Vacuum Entry Type ZPR Series: Lateral Vacuum Entry

Regulator for 2 MPa ARX 20

min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure characteristics Conditions: Upstream pressure 2.0MPa Downstream pressure 0.8MPa Flow rate

2

Auto Drain The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulation type Circulating water Caution Unit [S/cm] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] [mg/L] Item pH (at 25C ) Electrical conductivity (25C ) Chloride ion (Cl) Sulfuric acid ion (SO42) Standard value

Modular F.R.L. Units

KS KT KV KST A1 A2 A3 A1 A2 A1 A2 A1 A2 A3 A1 A2 A3 A1 A2 A3 A1 A2 A3 A4 A1 A2 A3 AC10-A 28 48.2 AC20-B 41.6 43.2 43.2 41.6 43.2 41.6 61 41.6 43.2 43.2 41.6 43.2 57 41.6 61 43.2 41.6 43.2 43.2 43.2 41.6 61 57 AC25-B 55.1 57.2 57.2 55.1 57.2 55.1 76 55.1 57.2 57.2 55.1 57.2 74 55.1 76 57.2 55.1 57.2 57.2 57.2 55.1 76 74 AC30-B 55.1 57.2 57.2 55.1 57.2 55.1 76 55.1 57.2 57.2 55.1 57.2 74 55.1

Battery-less

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

15

L Speed: V [mm/s] Calculation example) T1 to T4 can be calculated as follows. a1 a2 Time [s] T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] T1 T2 T3 T4 L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration T2 = L : Stroke [mm] time can be obtained by the following equation. 200 0.5 300 (0.1 + 0.1) 300 (Operating condition) V : Speed

Electric Actuator/Slider Type

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Environment

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

LEC-OM02904

MR-PWS1CBLM-A2-L MR-PWS1CBLM-A1-H MR-PWS1CBLM-A2-H CNP3 AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) AWG 19(/) (b) 10m 10m 2m 11.5 2m 2m MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H LE-CSM50m 50m MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L CNP3 AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) AWG 19(/)