3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

Modular Type Lubricators Series AL

26 35 47 N 8.4 8 10.5 Q 2.3 2.3 2.3 L 22 23 26 P 40 53 70 W 34.5 41 A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 36 38 40 G 57 73 H 28 30 35 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AL20 AL30 AL40 5 4 6 S F 3 7 8 2 9 1 W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A E H L IN OUT Bracket (Optional) D Sight glass assy not applicable to AL20 9 Accessories 2-10

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

ZQ

) S R U N L H L H k P a MOD E SET HYS Air supply port (P port) Note 4) (M3 x 0.5, piping not required) 71.9 66.9 (63.1) (M5 x 0.8) 57.3 Vacuum port (V port) Note 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PE SMC (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

MY1

(Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) P (Port) W CH LH RR1 SS NE RR2 SS H PP2 QQ PP1 QQ NH NC P (Port) P (Hexagon socket head taper plug) Back port (Refer to page 39.)

Large Size Vacuum Module: Series ZR

940 to 967 P. 968 to 983 Component equipment Characteristics Ejector unit ZR1-W Nozzle dia.

AC Servo Motor Driver (CC-Link Type ）

For 3-phase or 1-phase 200 to 230VAC 40 For 1-phase 100 to 120VAC PE terminal 6 L1 L1 L2 L2 L3 CNP1 CNP1 2-M5 screw Screw size: M4 Tightening torque: 1.2 [N m] (10.6 [lb in]) N N P1 P1 P2 P2 P P C C CNP2 CNP2 D D L11 L11 L21 L21 U U Mounting hole process drawing CNP3 CNP3 V V W W Mounting screw Screw size: M5 Tightening torque: 3.24[N m] (28.7[lb in]) 11 2 11.

Compressed Air Cleaning Filter Series

P Q S R Drain cock Gray: N.C.

ITV

Working Principle Diagram Power supply and error LED indication Power supply Output signal r Control circuit Input signal P e Pressure sensor w Exhaust solenoid valve q Air supply solenoid valve SUP EXH OUT Block Diagram Supply pressure q Air supply solenoid valve Output pressure Input signal + r Control circuit w Exhaust solenoid valve Discharged to atmosphere e Pressure sensor 808 Compact

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and L2 terminals, with nothing connected

3 Port Solenoid Valve Metal Seal Series VZ200 1

BG-VZ202 BG-VZ203 VQ VKF VV3Z2-50-061-C6 BG-VZ205 VQZ How to Order Manifold Base VZ 1 08 30 VV3Z2 VS 2(A) port size on base side Series VZ200 Manifold VFN Model Symbol VV3Z2-50 VV3Z2-S50 Symbol Stations Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) Symbol M5 01 M5 x 0.8 Rc 1/8 Built-in One-touch

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High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

RSQ

4 r !6 e !0 !3 !2 !1 w o @0 !7 i !9 !

XL

(10-32 nominal) Rc(PT) 1/8 XLF Actuation port size M5 (10-32 nominal) Ports P, R Rc(PT) 1/8(Port P): M5(10-32 nominal) (Port) XLFV 0.06 0.09 0.11 0.15 0.4 0.5 Actuating solenoid valve recommended Cv factor (XLF) Service life (Million cycles) 3 2 0.25 (0.55) 0.45 (0.99) 1.1 (2.43) 1.6 (3.52) 3.0 (6.61) 4.8 (10.58) XLF Weight kg (lb) XLFV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.66 (3.65) 3.06

Air Slide Table Series MXS

MXP With end lock (12) MXS12-R With buffer (12) MXS12-F MXY 2 x M5 x 0.8 thread depth 8 MTS Operating port 2 x M5 x 0.8 10.5 J 9.5 38 14.5 16 37 3 29 30 0.5 Other dimensions are the same as the basic style.

Modular Type Regulators Series AR

IN OUT w r w AR30(K), AR40(K) q t e AR50(K), AR60(K) IN OUT r w q t e IN OUT r w AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A AC Component Parts AF No.