SMC Corporation of America
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Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: -, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A,

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: -, Lead Wire: -, Bracket: -, Operation Manual: -

Designation Description Colour SF System fault Red BF Bus fault Red A combination of Link LED and Act LED Connection via PROFINET on BUS IN, and Data exchange on BUS IN Green Orange L/A1 A combination of Link LED and Act LED Connection via PROFINET on BUS OUT, and Data exchange on BUS OUT Green Orange L/A2 PWR Supply for the logic Green Red PWR(V) Supply for the valves Green Yellow Red Fig

Magnet: D (Built-in Magnet), Series: A2 (Standard), Mounting: L (Axial Foot), Tube Material: Aluminum Tube, Bore Size: 50mm, Port Thread: Rc, Stroke A: 350mm, Rod Boot A: None, Cushion A: Air Cushion, Stroke Adjustment: A (0 to 25mm), +: None, Stroke B: None, Rod Boot B: None, Cushion B: Air Cushion, Pivot Bracket: w/o Bracket, Rod End Bracket: w/o Bracket, Auto Switch: A93--Reed, DC Volt

Magnet: D (Built-in Magnet), Series: A2 (Standard), Mounting: L (Axial Foot), Tube Material: Aluminum Tube, Bore Size: 40mm, Port Thread: Rc, Stroke A: 150mm, Rod Boot A: None, Cushion A: Air Cushion, Stroke Adjustment: B (0 to 50mm), +: None, Stroke B: None, Rod Boot B: None, Cushion B: Air Cushion, Pivot Bracket: w/o Bracket, Rod End Bracket: w/o Bracket, Auto Switch: A93--Reed, DC Volt

Accuracy: Basic, Motor Mounting Position: L (Left Side Parallel), Motor Type: S4 [AC Servo Motor, (Incremental Encoder), 400W], Lead: L (2.86mm), Stroke: 200mm, Dust/Drip Proof: P (IP65, Dust/Drip Proof Specification w/vent hole tap), Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped (Standard), Cable Type: S (Standard Cable), Cable Length

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and

A1 D1 L5 D1 A2 T T Inch size L4 L5 A1 A2 M1 Max.

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

L ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 L 73.0 8 4.5 1.25 7.5 135.5 173.0 210.5 248.0 5.5 35 35 285.5 323.0 852 Pressure Sensor Controller Series PSE200/300 Function Details A Auto-shift function B Auto-preset function When there are large fluctuations in the supply pressure, the switch may fail to operate correctly.

A2 Bracket B (Horizontal mounting) Part no. Option Note ZS-28-CA-4 Sensor connector For PF3A7H ZS-46-A1 Bracket A Tapping screw: Nominal size 3 x 8 L (2 pcs.) ZS-46-A2 Bracket B Tapping screw: Nominal size 3 x 8 L (2 pcs.)

AS1001F AS2001F AS2051F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS-F TMH ASD AS Number of needle rotations Number of needle rotations Number of needle rotations AS3001F AS4001F AS-FE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) KE AS-FG

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle rotations AS4201FG, AS4211FG AS3201FG, AS3211FG Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle

Construction Standard type Double acting type N.C. type N.O. type w e q q e w q e w y t r A B A B With flow rate adjustment u Component Parts No.

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40 How to Order LEFS 100 A 25 q e y NZ w r t H R q Accuracy r Motor type e Motor mounting position y Stroke [mm] t Lead [mm] Nil Basic type H High precision type 50 50 to to 1200 1200 Nil In-line R Right side parallel L Left side parallel Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Symbol

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: E (Panel Mount Adapter), Operation