JXCx-OMU0004

CN1P.17 4.2 CN2CN3: LE-CP-LE-CP---S CN3 CN2 4.3 CN4I/O PLC I/O CN4 PLC *6.4 I/O P.23 *6.3 P.21 16 No.JXC-OMU0004-A 5.

Aluminum High Vacuum Angle Valve

Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.

SYJ3000/5000/7000

+ + + + + + + 20 20 stations S P P A, B port size P Nil Rc A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A B B B A, B port M5 x 0.8, C4 A M5 M5 x 0.8 F G C4 One-touch fitting for 4 N NPT N3 One-touch fitting for 5/32" T NPTF 1-5-16 17 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Flat Ribbon Cable Manifold Common SUP/Common EXH Note) For more than 10 stations, supply air to

Electric Actuator/Slider Type

Model L A B n D E LEFS40 S -200453.4 6 2 LEFS40 S -300553.4 6 2 LEFS40 S -400653.4 8 3 LEFS40 S -500753.4 10 4 LEFS40 S -600853.4 10 4 LEFS40 S -700953.4 12 5 LEFS40 S -8001053.4 14 6 LEFS40 S -9001153.4 14 6 LEFS40 S -10001253.4 16 7 378 478 578 678 778 878 978 1078 1178 206 306 406 506 606 706 806 906 1006 300 300 450 600 600 750 900 900 1050 SMC Corporation of America 10100 SMC Blvd.,

Air Cylinder

Technical Data 305 CG1 Series Clevis: CG1DN (20 to 63) S + Stroke MM AL A H GA GB L RR F K C CZ TT 2 x P (Rc, NPT, G) CDH10 (Hole dia.) d9 (Shaft dia.)

OMR0032

Set the speed to be 1 mm/s or more for the pushing operation. 9.6 Step Data setup (P.50) 11.3 Pushing operation (P.55) Check that the parameter values are set correctly for a pushing operation in the Step Data. Confirm that TL signal is turned ON.

SYJ300/500/700

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

P P P S F G A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A A, B port size B B B A, B port M5 x 0.8, C4 A N NPT Applicable blanking plate assembly M5 M5 x 0.8 T NPTF C4 4 One-touch fitting Refer to page 302. N3 5/32" One-touch fitting 299 4/5 Port Solenoid Valve 10-SYJ3000 Note) CE-compliant: For DC only.

VQC

C10 (for 10) Side P: Rc 1/2 C12 (for 12) VQC400-5 T Kit: Terminal block box S Kit: Serial transmission VQC4000 VV5QC41R: Rc 3/4 Rc 1/4 ( ) S Kit 1 to 16 stations VQC401-5 Rc 3/8 Bottom Rc 1/4 Note 1) One-touch fittings in inch sizes are also available.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

V Ps + 0.1 293 S = 12.1 log10 () (6) t P + 0.1 T S : Effective area [mm2] V : Air tank capacity [L] t : Discharging time [s] Ps : Pressure inside air tank before discharging [MPa] P : Residual pressure inside air tank after discharging [MPa] T : Temperature inside air tank before discharging [K] Power supply Pressure switch Thermometer Pressure control equipment Control circuit Solenoid

CY1

P-44 (JT)

NCA1

T I O N S A U T O S W I T C H E S R E E D T Y P E O P T I O N S M O U N T I N G B R A C K E T S F O R S W I T C H E S O P T I O N S A U T O S W I T C H E S S O L I D S T A T E T Y P E MODEL OPERATING MAX CURRENT OR INDICATOR MODEL OPERATING MAX CURRENT OR INDICATOR NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE NUMBER VOLTAGE OPERATING CURRENT LIGHT / WIRE MODEL BORE SIZE RANGE (MA) OUTPUT

Table of Contents

R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.

CL

MNB CNA Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range. (The lock-up cylinder can operate at 50 to 200 mm/s.)

LX

(mm/s) Ultimate speed (mm/s) Transfer load 6kg Transfer load 6kg 3kg 50 50 50 3kg 1.5kg 4kg 0kg 0kg 2kg 0kg 0 0.05 0 0.1 0.2 0 0.05 Time (s) Time (s) Time (s) LXPB5SB/LXSH5SB LXFH5SB LXPB2SB/LXSH2SB 200 200 200 Transfer load 4.5kg Ultimate speed (mm/s) Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load 4kg 3kg Transfer load 2kg 2kg 100 100 100 1.5kg 0kg 0kg 0kg 0 0.05 0.1 0 0.05 0.1

Modular F.R.L. Unit

Y W Z C Q P Plate thickness AWD20: Max. 3.5 V IN OUT K B Pressure gauge (accessory) OUT Pressure gauge port size Square embedded type pressure gauge (accessory) Port size O S E Min. clearance for maintenance Drain A G L H AWD30, 40 S M D U Panel fitting dimension J Y Bracket (accessory) W Q Z B C P Plate thickness AWD30: Max. 3.5 AWD40: Max. 5 P V IN OUT K Pressure gauge (accessory) OUT Pressure

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note 4) Interface regulator is only capable of regulating the P port pressure. 0.06 1.9 2.1 4.5 4.5 P A P B A EA B EB Effective area at supply side (mm2) (3) S at P1 = 0.7 MPa, P2 = 0.5 MPa Effective area at exhaust side (mm2) (3) S at P2 = 0.5 MPa How to Order Solenoid Assembly Non plug-in type C DXT170 5 L Flow Characteristics {1(P) 4(A)} Conditions: Inlet pressure setting 0.7 MPa

VQ5000

S. T. Manufacturing Co., Ltd.

CM2

8 45 25 26 34.5 37.5 M10 X 1.25 19.5 17 6 15 10 5.5 M26 X 1.5 9 9 22 19 30 14 30 12 25 13 8 45 32 26 21 41.2 M14 X 1.5 21.5 42.5 46.5 22 8 15 7 M32 X 2 11 10 24 30 39 18 38 14 16 11 50 40 32 Dimensions by stroke Built-in One-touch fitting (mm) Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore Symbol P Q S Z ZZ S Z ZZ S Z ZZ S Z ZZ S Z ZZ Bore 87 158 167 112 183 192 137 208 217