AR20-B to AR60-B e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.
t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.
(Including band and screw) MVGQ Bore size (mm) 20 25 32 40 50 63 80 100 CC Applicable auto switch RB D-C7, D-C80 D-C73C, D-C80C Reed J BMA2-020 BMA2-032 BMA2-040 BMA2-050 BMA2-063 BMA2-025 D-H7/H7C D-H7W D-H7NF/H7BAL Solid state DD-B5, D-B64, D-B59W Reed -X D-G5/K59/G5W/K59W BA-04 BA-32 BA-05 BA-06 BA-01 BA-08 BA-10 BA-02 Solid state 20D-G5NTL, D-G5BAL D-A3, D-A44 Reed BD1-04M BD1-02 BD1
Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with
t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.
t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.
1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.
Accessories oxTl 55-'t 71 TA HowTo Order Manifold Base NVVsF3 Sris '{VF3O@ manitold 8ymbol 02 2 stations 20 2O stations Series NVFSOOO Construction/Parts List I SUP EXH,2 P,E, Douue Solnoid Symbol "'qlb P.E. EXH.T SUP 3 Fotiition qosd Center Maln Pa.ts No.
)) P A Inlet pressure P1 (MPa) 14-9-14 5 Electro-pneumatic Proportional Valve Series VEF/VEP Construction Flow type: VEF2121 (2 port) VEF3121 (3 port) Pressure type: VEP3121 (3 port) P(1) port R(3) port F.R.L.
Function Port size Rc Valve model VHS VZA4121-01 VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49
4 (P , A, B port) Manual override (44) (36) VFA 21 28 25 14 VFRA 54 (3.6) 65.6 (26) (34) 40 1/8 (P , R1, R2 port) 1.8 (Bleed port) 25.5 VPA4 20 12 1.6 P R2 R1 18 22 22 11.5 SYJA 18 1/4 (R1, R2 port) 31.5 1.8 (Bleed port) 27.2 63 VZA 01 02 2 position double: SYJA7220-01 2 position double: SYJA7240VTA 2 x 4.3 (For mounting) 34 8.5 63.6 2 x M5 x 0.8 (Pilot port) 2 x M5 x 0.8 (Pilot port) VGA
Accessories oxTl 55-'t 71 TA HowTo Order Manifold Base NVVsF3 Sris '{VF3O@ manitold 8ymbol 02 2 stations 20 2O stations Series NVFSOOO Construction/Parts List I SUP EXH,2 P,E, Douue Solnoid Symbol "'qlb P.E. EXH.T SUP 3 Fotiition qosd Center Maln Pa.ts No.
JIS Symbol Body ported 3 position closed center 1/4 With sub-plate 02 3 position exhaust center 2 position single 2 position double 5 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 How to Order Manifold Base 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Same manifolds as series
rate measurement range l/min Integrated type Display unit Display unit (4ch) Sensor unit PF2W504(T) PF2W520(T) PF2W540(T) PF2W511 PF2W704(T) PF2W720(T) PF2W740(T) PF2W711 0.5 to 4 2 to 16 5 to 40 10 to 100 PF2W30 PF2W20 PF2W33 For Deionized Water and Chemicals For Deionized Water and Chemicals P. 44 Remote type Flow rate measurement range l/min Display unit Display unit (4ch) Sensor unit
P.5-12 (16) CH2 Independent pump operation CH2 pump operates independently while the button is pressed. P.5-12 To select a operation mode from the touch panel ( mode), contact input ( mode) (17) Operation mode P.5-12 Common or serial communication ( mode). (18) Operating condition display It indicates the run and stop status of the product. P.5-12 (19) Run/Stop To run/stop the product.
Allowable voltage range 10% Electric system Circuit protector17 A 10 (For option -T-MT : 15 Applicable earth leakage breaker capacity9 A 10 (For option -T-MT : 15 (50/60Hz) A 5.2/6.0 Rated operating current4 For option -T-MT : 6.2/7.6 consumption4 (50/60Hz) kVA 1.0/1.2 Rated power For option -T-MT : 1.2/1.5 Noise level10 (50/60Hz) dB 62/65 Dimensions11 mm W377xD500xH660 (W14.8XD19.7xH26.0
How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported
The used of turbine oil at temperatures lower than 0C leads to increased viscosity and may cause the valve to malfunction. d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases. 2 thread to be left exposed Clamping Torque Switching
Option Body material Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A) 3/8 (10A) Diaphragm material 02 03 1 PTFE (fluororesin) Symbol Type of operation Thread type FLUID OUT AIR SUP Nil T F N Rc NPTF G NPT Automatically operated type with built-in pulsation attenuator 2 AIR EXH FLUID IN Built-in pulsation attenuator
Option Body material Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A) 3/8 (10A) Diaphragm material 02 03 1 PTFE (fluororesin) Symbol Type of operation Thread type FLUID OUT AIR SUP Nil T F N Rc NPTF G NPT Automatically operated type with built-in pulsation attenuator 2 AIR EXH FLUID IN Built-in pulsation attenuator