Vacuum Pad

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Vacuum Pad

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Vacuum Pad

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

CRB2/CRBU2/CRB1

Applicable shaft type: K The long shaft can be further shortened by machining a middle-cut chamfer into it. (The position of the chamfer is same as the standard one.) (If shortening the shaft is not required, indicate "" for dimension X.) Applicable shaft types: J, K, T (mm) W1 X L1 max. L3 max. (mm) Shaft type J K T J K T J K T J K T Size Size Y W2 L2 max. L4 max.

Modular F.R.L. Unit

Nil Rc N Note 1) NPT Optional specifications F Note 2) G Applicable model AW20(K) to 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) AW20(K) AW30(K), 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) Description 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge With bowl guard Drain guide 1/4 Non-relieving type Flow direction: Right to left Drain cock with

Air Cylinder Series CM2

Grease pack part no.: GR-S-010 (10 g) Nickel plated Nickel plated Technical data 151 Series CM2W Basic Style (B) CM2WB Bore size Stroke Effective thread length 2 x FL H1 H2 Width across flats B2 Width across flats B1 2 x P (Rc, NPT, G) 2 x NN G G MM I Width across flats KA Width across flats KA 2 x Eh8 NA D D AL A K AL A K F N H F N MM NA S + Stroke ZZ + 2 x Stroke H + Stroke l 8 8 Width

Hydraulic

d (H8) M A B C D G L F E K J H N Applicable cylinder type Bore size (mm) Spring pin P Order no.

NCQ2/CQ2

UA C d1 d2 H K L UT Weight (g) Part no.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

CLKQ K G P G P Table 2.

Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q Q B Pressure gauge (accessory) K H OUT Pressure gauge port size Square embedded type pressure gauge (accessory) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D AC30A, 40A A N F E P K C G G OUT IN B Pressure gauge (accessory) K OUT Pressure gauge port size J L Square embedded type pressure

XL

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46. 24 High Vacuum Angle Valve Series XLD, XLDV Dimensions (mm) 1in=25.4mm XLDV-25/With solenoid valve 11 C Fn (KF flange) Fb (K flange) C Port R (exhaust port) K K 2.5 41.5 Initial exhaust solenoid valve Main exhaust solenoid valve G A B 8 10.5 Port P (pressure port) A Max 10.5 (except connector

EX120/121/122

19.2 k/ 45.45 k/93.75 k/ 187.5 k/500 k/ 1.5 M/3 M/6 M/ 12 Mbps 10 k/20 k/50 k/ 125 k/250 k/ 500 k/800 k/ 1 Mbps 156 k/625 k/ 2.5 M/5 M/ 10 Mbps Communication speed 5 Mbps 10 M/100 Mbps 125 k/250 k/500 kbps 167 kbps Specified file Note 3) EDS file EDS file GSD file EDS file EDS file EDS file 48/32 SAS7: 8/8 (2 slave units) SAS9: 4/4 64/64 SAS3: 8/8 (2 slave units) SAS5: 4/4 Occupied area

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic style (Through-hole): CQ2WB U 2-H thread effective depth C (Opposite side, too) Q Q 2-Rc 3/8 (Port size) I Width across flats K CUJ 11 D D 32 22 M E CU Minimum lead wire bending radius 10 2.5 Auto switch CQS Note 1) Flat washer 4 pcs. 4-N through-hole CQM 2 x 4-OA thread depth RA B + Stroke A + 2 (Stroke) K J M E 2 x 4-OB counterbore depth RB L L + Stroke CQ2 S (Opposite side, too)

5 Port Solenoid Valve Series SV1000/2000/3000/4000

250 k/500 kbps 156 k/625 k/ 2.5 M/5 M/10 Mbps 9.6 k/19.2 k/45.45 k/93.75 k/ 187.5 k/500 k/1.5 M/3 M/6 M/12 Mbps 21.6 to 26.4 VDC 100 mA or less Communication speed 21.6 to 26.4 VDC 100 mA or less Power supply for control Power supply voltage Internal current consumption 22.8 to 26.4 VDC 11 to 25 VDC 100 mA or less Power supply for output Power supply voltage Power supply for Power supply

MXS

Load rate Ea= K E max Ea=1 0.11=0.11 Work mounting coeficient K: Fig.3 Max. allowable kinetic energy Emax: Table 1 Kinetic energy (E)Allowable kinetic energy (Ea) Possible to use by E=0.0 3 3-1 Load rate of work Calculate static work Wa (N) Wa=1 X 1 X 4=4 K=1 b=1 Wmax=4 a1=1/4=0.25 Wa=K b Wmax Work mounting coeficient K: Fig.3 Allowable load coeficient b: Graph 1 Max.

0.4

Combination of [B] and [K] is not possible.

NCQ8

Brown Brown Load Load Switch 1 Switch 1 Blue Blue Brown Brown Switch 2 Switch 2 Blue Blue Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Load impedance is 3 k.

10

, T1 = 297 5 K, 0.07 bar P 0.14 bar.

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'35 I ,K AA I ,8 ,L 1M IB L (mm) (mm) *Adaptor plate-Provided as standard " > ~;M3 xO.5 E:MsxO.6 ;K ,L y , Model 'PI>; ; B ~t D.

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Foot: CS2L With rod boot H s + Stroke _ K,.