VCA

173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295 2 103 114 139 150 117 128 161 172 3 138 149 174 185 158 169 202 213 L1 Side ported L2 VV2CA3 L1 Front ported L2 L1 Side ported L2 VV2CA4 L1 Front ported L2 (mm) Dimensions Electrical entry B C E F G H J1 J2 J3 K L M N A Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57

Vacuum Unit

Power consumption cost per year Annual air consumption Exhaust time Air consumption ZK2/With energy saving function 957 JPY/year 638 m3/year 0.6 s 58 L/min (ANR) Existing product 14,025 JPY/year 9,350 m3/year 6 s 85 L/min (ANR) Air unit 1.5 JPY/m3 (ANR), Annual operating cycles: 110 (Operating hours: 10 hours/day, Operating days: 250 days/year, 450 cycles/h, when 1 unit is used) Cost conditions

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(Initial value) Note 3) Value for high pressure type (1.5W) specification Note 4) Value for the low power consumption (0.5W) specification 56 Series VQ1000 VQ1000/Flat Cable Kit Stations VV5Q13J 0(D) U S Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) L2 23.5 P = 11 13.2 L1 6.2 41 35 Indicator light 1.5 1.5 (11) 19.5 (Mounting hole dimension) Manual override 2-

High Purity Fluoropolymer

M H L2 L1 A E M LQ1L12-M LQ1L11-M 3 4 11.5 1/8 11.5 10 15.5 18 1/8" R (NPT) Port size Class 1 LQ1L43-M LQ1L42-M LQ1L41-M LQ1L36-M LQ1L35-M LQ1L34-M LQ1L33-M LQ1L32-M LQ1L31-M LQ1L24-M LQ1L23-M LQ1L22-M LQ1L21-M 4 6 4 6 1/8" L1 16.5 14 14.5 15 20.5 27 1/4" 10 L2 M 1/4" 6 8 (A) 23 17 20 20 26.5 35 1/4 10 H 6 8 3/8" (E) Class 2 to 5 12 10 12 3/8" 28 21 25 24 33 45 1/2" LQ1L44-M 10 M LQ1L54-

Rubber seal 5 Port Solenoid Valve Series SYJ7000

With light/surge voltage suppressor (Non-polar type) For AC voltage valves there is no S option.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

For AC voltage valves there is no S option. It is already built-in to the rectifier circuit. With light/surge voltage suppressor (Non-polar type) For AC voltage valves there is no S option. It is already builtin to the rectifier circuit. For type R and U, DC voltage is only available. Power saving circuit is only available in the "Z" type.

Integrated Controller

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

2/3 Port Valve

The right side of the common port provides plug. 4.1-15 VVX21/22/23 Dimensions Common SUP Individual SUP n Mark L1 L2 L1 L2 Model 2 100 86 126 108 3 136 122 172 154 4 172 158 218 200 5 208 194 264 246 6 244 230 310 292 7 280 266 356 338 8 316 302 402 384 9 352 338 448 430 10 388 374 494 476 VVX22m VVX23m VVX21m Grommet Electrical entry Model A B D E F H J K M N Conduit S 39 41.5 44 Conduit

One-touch Fittings

M L1 M L1 L2 D Plug-in Elbow: KQ2L Applicable tubing Effective area [mm2] Min. port size Release button dimensions D2 L1 L2 A M Applicable tubing O.D.

Compact

L3: Overhang Allowable range: 30 mm L3: Overhang Allowable range: 30 mm Allowable overhang L1, L2 [mm] Allowable overhang L1, L2 [mm] MXZ20 MXZ25 3.5 6.0 V = mm/s V = mm/s 3.0 5.0 Load weight m [kg] Load weight m [kg] 2.5 4.0 2.0 3.0 1.5 V = 50 2.0 V = 50 1.0 V = 100 V = 100 V = 200 V = 200 V = 500 V = 500 1.0 0.5 0.0 0.0 45 40 35 30 25 20 10 15 0 5 0 20 10 30 40 50 60 L3: Overhang Allowable

0.01

Dimensions: Centralized Wiring Type With bracket L1 60 3 38 L2 38 5 LED level meter Terminal block box EXH port End plate R End plate L 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 Rc, NPT, G 1/8 SUP port L3 6.5 36 24 OUT 3 36 OUT 2 OUT 4 n Stations

7

S CAC408 50 50A Flange R 230 VAC G N.O.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.

MXW

Mey: Find the equivalent weight for impact, We Bumper coefficient = 4/100 (With urethane bumper) Mey We W L2 + B Meymax value is from Graph (2) at V = 1.4 Va = 420 mm/s. Mep Mep = 1/3 We x 9.8 (L3 + C) Examine Mep.

MXW Series Long Stroke Slide Table

} L3=50 {mm} L2=50 {mm} L2 {B L3 Item Load factors n Note (1) Max. movable load W B L2 Examine W.

Short Stroke Electric Actuator Series LX

Speed (mm/s) 40 40 2.6 1.3 0.3 0.1 2.6 1.3 0.3 0.1 80 80 1.3 0.7 0.2 0.1 1.3 0.7 0.2 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 10 1 50 10 1 10 10 10 10.1 5.1 1.1 0.2 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 0.3 0.1 1.3 0.3 0.1 1.3 80 80 1.3 0.7 0.2 0.1 0.7

Transfer

Pitch moment Yaw moment : Collision speed (mm/s) L1 : Distance to the center of load gravity (m) ME : Dynamic moment (Nm) g : Gravitational acceleration (9.8 m/s2) m : Load mass (kg) F : Load (N) FE : Load equivalent to impact (at impact with stopper) (N) a : Average speed (mm/s) M : Static moment (Nm) M1e = We x L3 x 1 3 M3e = We x L2 x 1 3 M1e M3e We We L3 At collision: = 1.4a a L2

3 Port Air Operated Valve Series SYJA300 1

Symbol L1 L2 Calculation formula: L1 = 26n + 24, L2 = 26n + 12 Calculation formula: L1 = 26n + 36, L2 = 26n + 10 5-5-7 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5-5-8 5 3 Port Air Operated Valve Series VTA315 How to Order SA VTA315 VA SA Port size Indicate

VCW

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

ISA2

L1 L2 3 38 5 38 LED level meter Lead wire connector End plate L End plate R 3 0 3 0 3 0 92 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 12 12 21 Bracket Plug SUP port Pressure gauge 5.5 L3 6.5 24 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650