Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

d1 = d3 for sizes 20 to 40. A parallel keyway is used on the long shaft for size 40. Minimum machining diameter for d1 is 0.1 mm.

VQC

Blanking plate VVQ1000-10A-1 Individual SUP spacer VVQ1000-P-1-C6 SUP shutoff position: Specify 2 positions. Individual EXH spacer VVQ1000-R-1-C6 EXH shutoff position: Specify 2 positions.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(M): VQZ115-lMl-C3, C4, C6, M5-PR (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 60.5 65.5 300 55.5 59 (Lead wire) Indicator light Indicator light 40.5 41.5 Cover dia 1.5 Cross section 0.23mm2 : AC : AC 2.10-8 VQZ100/200/300 Body Ported VQZ200 Valve single unit 2-C4, C6, M5 Grommet (G): VQZ2l2(R)-lGl-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 2-3.5 Mounting

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

light 37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

2 3 4 5 6 7 8 9 U side VQC 3 m SQ SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 VQ0 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 VQ4 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ Cylinder port fitting

Ejector Valve Unit Series ZYY/ZYX 1

40 40 40 40 40 Suction flow rate Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 0 0 10 20 30 40 50 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) How to Read Flow Characteristics Graph The flow rate characteristics indicate the relationship between the vacuum pressure

Serial Transmission System Series EX250 Series EX500

-05B-C6 1 set (manifold part no.)

VK300

(-Q) (S) 42 (-Q) VV5K3-40 (-Q) (S) 41 (-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

VK300

(S) 42 VV5K3-40 (S) 41 (S) 42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

Series: 5 (JSY5000), Type: 40 (Side Ported), Valve Stations: 4 Stations, P,E Port Entry: U (U Side), A,B Port Size: 02 (1/4), Thread Size: N (NPT)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 4 Stations, P,E Port Entry: U (U Side), A,B Port Size: KC4 (ø4 One-touch Fitting; Replaceable), Thread Size: N (NPT)

Series: 1 (JSY1000), Type: 40 (Side Ported), Valve Stations: 4 Stations, P,E Port Entry: U (U Side), A,B Port Size: M5 (M5 x 0.8), Thread Size: N (NPT)

Series: JSY5000, Type: Side Ported, Valve Stations: 4 Stations, P,E Port Entry: U Side, A,B Port Size: 1/4, Thread Size: NPT, Mounting: -, DIN Rail Option: -

Series: JSY1000, Type: Side Ported, Valve Stations: 4 Stations, P,E Port Entry: U Side, A,B Port Size: ø4 One-touch Fitting; Replaceable, Thread Size: NPT, Mounting: -, DIN Rail Option: -

Series: JSY1000, Type: Side Ported, Valve Stations: 4 Stations, P,E Port Entry: U Side, A,B Port Size: M5 x 0.8, Thread Size: NPT, Mounting: -, DIN Rail Option: -

Series: 5 (JSY5000), Type: 40 (Side Ported), Valve Stations: 4 Stations, P,E Port Entry: U (U Side), A,B Port Size: 01 (1/8), Thread Size: N (NPT)

Compact manifold regulator ARM5 Series

L dimension 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 One-touch Fittings for Centralized Supply Block One-touch Fittings for Regulator Block VVQ1000 50A C4 VVQ1000 51A C6 One-touch fittings for centralized supply block Fitting type One-touch fittings for regulator block Nil L1 Fitting type Straight Nil L1 Straight Elbow Elbow Fitting size Fitting size

Table of Contents

Single unit 3/4, 1, 1 1/2 0.03 to 1 20, 27, 40 17-2-79 VQ20/30 N.C. Single unit C6 to C12 Pilot operated (For dry air) 0.01 to 0.6 3.4, 4.8 C6 to C12, (3/8) (1) 17-2-89 VV2Q22/32 N.C. Manifold Note 1) All IN ports are 3/8. Note 2) 10 is N.C.

MY1

D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV ( ) MY1CW 25, 32, 40, 50, 63 B A Solid state switch D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) A B A B Reed switch D-Z73, D-Z76, D-Z80 D-Y7BAL 63 50 40 32 25 Mounting position 40 32 25 Mounting position 25 Mounting position 32 40 50 63 A 323.5 278.5 157.5 127.5 97.5 157.5 127.5 97.5 97.5 127.5 157.5 278.5 323.5 A A B 136.5 121.5