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pressure release valve cannot be combined with external pilot specifications. 4 Series VQC Base-Mounted Type Plug-in Unit Models Model Response time ms Note 2) Flow characteristics Series No. of solenoids Weight 4, 25, 3 (A, BR1, R2) 14, 2 (PA, B) g Standard: 1W Low wattage C[dm3/(sbar)] b Cv C[dm3/(sbar)] b Cv 15 or less 12 or less 0.70 Single VQC1100 Metal seal 0.72 0.15 0.16 0.25 0.18 64

A 65 82 98 B2 53 64 76 B3 78 88 108 C1 14 20 22 C2 39 44 54 F 96 111 131 E1 1 1 1 E2 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 63 73 93.5 61 72 88 30.5 36 44 40 46 55 73 84 104 14 14 19 6 6 8 Note) Floating brackets consist of a set of right and left bracket.

19 16.6 13.3 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FS-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FS-04-12 (S) 12 18.5 30.8 43.7 (43.6) 35.1 17 64

72 79 93 113 121 MM M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 W 20 25 40 40 50 60 60 70 Z 76 94 107 117 130 148 176 188 N 4.5 6 7 6.5 8.5 11 15 16 WP 13 16 19 21.5 27 32 41 47 WS 8 7 7 7 7 7 10 10 PW 26 32 38 43 54 64 82 94 Q 68 84 95 105 116 134 159 171 QW 14 18 17 20 26 34 48 60 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CY1H CY1F

I OUT 3.04 76 152 228 304 380 441 50 20 2.56 64 128 256 319 IN 192 371 : OUT 4.83 121 242 362 483 604 701 63 20 IN 4 .34 109 217 326 434 543 630 @When replacing mounting bracket, use socket wrench. Do not remove the cushion valve mechanism which prevenlS accidental removal of cushion valve.

MK2T/MK2/MK CKZ2N CKZT CLKZ1R CK/M(D)UKA 108 76 Arm position/Mounting hole A A 25 Arm position Mounting hole Symbol D1 6 6 6 8 8 8 D2 9 9 9 10.2 10.2 10.2 D3 14 14 14 17.5 17.5 17.5 L 3 3 3 5.5 5.5 5.5 Center type A B C D E F Center Right Left Center Right Left Left type 2 x D1H7 through 2 x D2 through (9) 300.2 300.02 1400.1 For Asia For North America For Europe For France Special 179 64

The number of sampling locations NL = (A) 0.5 Evaluation method using a simple sampling Number of sampling w Unidirectional airflow: at least two locations Smaller value between NL=A/2.32 and NL=A x 64/(10M) 0.5 locations At least one location 2 litters or a sufficient volume of air that a minimum of 20 particles could be counted if the particle concentration were at the class limit.

Single vane type/Double vane type CRBU2W40-S/D h 52 64 Keyway dimensions b l h (h9) l b (h9) Model CRBU2W400 0.030 4 20 0 0.030 4 85 38 2 x 5.5 through 2 x M5 x 0.8 through 25h9 0 0.052 10g6 0.005 0.014 11.5 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 2 20 30 2 x 5.5 through 2 x 5.5 through 38 20 3 5 5 16 14 (98) 53 B port A port 2 x

9.4 38.5 63 56.5 (63) 31.5 51.5 31 (60) (74) (43) 3/8, 1/2 1(P), 3(R) port (Distance between ports) 3R 1P NO 40 3 9 M5 x 0.8 (Breathing hole) 42 30.5 100.8 For vacuum/VPA742V-1(-F) 03 04 A B 3/8, 1/2 2(A) port 51.5 2 x 5.2 (For mounting) NC 33 4.5 2A 31 41 (2) (9) 115.1 2 x 5.2 (For mounting) 1/8 12(PA) port (Mounting groove for M6 thread) (6.4) 12 (63) 64 9.4 38.5 63 56.5 31.5 (60) 51.5

7.3 VQC4401 0.38 1.9 0.38 2.0 50 or less 52 or less Rubber seal 1 (P) 5 (R1) 3 (R2) 6.2 6.4 VQC4500 0.18 1.9 0.18 1.6 45 or less 47 or less Metal seal Pressure center 3 position exhaust center with pressure release valves 7.0 VQC4501 7.1 0.38 1.9 0.38 2.0 50 or less 52 or less Rubber seal (A) 4 (B) 2 2.7 VQC4600 3.7 55 or less 57 or less Metal seal Perfect 500 2.8 3.9 VQC4601 62 or less 64

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R + Clamp stroke RHC MK(2) (mm) (mm) Ah9 B Model MK20-F MK25-F D E C Model MKG20 MKG25 RS Q G 0 0.043 0 0.043 0.1 0.15 13 39 60 0.1 25.5 0.15 48 15 42 64 28 52 RS H A RZQ Arm for width across flats Rod end width across flats: MK -M 20 25 MI W S With arm

32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon socket head cap screw (accessory) CL CD hole H9 CZ M CX M CU CZ CW RR (mm) Hexagon socket head cap screw Bore size (mm) -0.2 -0.6 CDH9 CL CU CW

50 19 1.6 6.6 2-cushion needle 64 50 17 PL unlocking port Unlocks when pressurized Counterbore depth 8 4-13 4-11 4-6.6 Spring washer 4 pcs.

s] Speed [mm/s] 2000 2000 2000 2000 1000 1000 1000 1000 Selectable controllability Selectable controllability End to end operation similar to an air cylinder (12 intermediate stop positions) Easy position setting using numerical inputs (Controller) Step Motor (Servo/24 VDC) Programless type (With stroke study) LECP2 Series Programless type Step data input type LECP6 Series LECP1 Series 64

Electric Actuators LEPY/LEPS Series Miniature Rod Type/Miniature Slide Table Type RoHS Step Motor (Servo/24 VDC) Compact and lightweight Maximum pushing force: 50 N Positioning repeatability: 0.05 mm Possible to set position, speed and force. (64 points) LEF LEJ LEL LEM Rod Type LEPY Series Page 374 Size: 6, 10 LEPY6-25 240 g Weight LEY LES LEPY LEPS LEPY LEPS LER LEH LEY -X5 30 mm 11LEFS

ZSE30 ISE30 ISA2-G ISA2-H ZSE40 ISE40 Detection side piping: 64 tubing 5m Detection nozzle: 2.0 Supply pressure: 100 kPa Detection side piping: 64 tubing 5 m Detection nozzle: 1.5 Supply pressure: 100 kPa ZSE10 ISE10 1.5 1.5 ISE70 Set value ZSE80 ISE80 Response time (sec) Response time (sec) 0.05 mm 1 1 ZSE ISE Set value 0.05 mm ZSP 0.1 mm 0.1 mm 0.5 0.5 0.15 mm PS 0.15 mm 0.25 mm 0.3 mm

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, SI UNIT, VALVE, EX500 SERIAL INTERFACE UNIT, 22, EX500 NO SIZE RATING

Available protocols include DeviceNet, CC-Link, Profibus-DP and Allen-Bradley Remote I/O.GW system, 4 branches, Valve and input unit manifolds can be connected around the GW unit, Compatible with 64-digital-outputs and 64-digital-inputs, GW unit, input unit manifold: IP65, Valve manifold including SI unit: IP67, INPUT BLOCK *LQA, VALVE, EX300 SERIAL INTERFACE UNIT, 22, EX300, 0.14153

SI SI SMC PROFINET IO EX245 IO-Link SI IP65 2 2 PROFINET IO EX245-SPN1A(24 V)2(SCRJ)2 EX245-SPN2A(24 V)2(RJ45)2 EX245-SPN3A7/8 (5 )2M12(4 ,,D code)2 32 128 64 IO-Link 32 8 (FSU) C (IRT ) MRP(Media Redundancy Protocol)MRPD(Media Redundancy for Planned Duplication) System redundancy S2 Shared device (PROFIenergy) 1 (EX245-SPN1A) 16A(EX245-SPN1A/EX245-SPN2A)6A(EX245-

5.4.10 Communication setting screen .5-53 Setting for communication error (AL34)/contact input signal detection (AL30 and AL31) .5-54 Serial communication setting .5-55 Setting of analog output signal .5-57 Setting of contact input signal form.5-57 Setting of contact output signal 1 to 3 .5-59 Setting of contact output signal 4 to 6 .5-59 Ethernet Modbus / TCP communication settings .5-64