VXF VJ10-20-4A-6 2 pcs. 5A 10 ZS ZP (For DC) 4A 20 VJ10 6 Lead wire length ZCU Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 AMJ (For 110 VAC) Note) If ordering switch with 5 m lead wire, specify both switch and lead wire with connector part numbers. Ordering example) ZX100-K150Z-ECN1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. 3A 36 VJ10 6 Misc.
Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. Operating Environment Maintenance Warning Warning 1.
8 ) Note 1) 14 16 18 (n 2) 2 20 + 55 8 9 10 12 14.5 D-D-F5NT 25 (n = 2, 4, 6, 8 ) Note 1) D-A5/A6/A59W cannot be mounted to 40, 50.
Black Brown Red None None None None None None None White Black Black Red Red Red Black Black White None None Black White White Red Red White None 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 10 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 Seal (Length indication) Orange Yellow Pink Blue Purple Gray White White Yellow 015 L Molded cover 2-M2.6 x 0.45
20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 Color: White 3.2 4 6 8 10 D VP VG VP DIN rail AXT100-DRS070 L As for , enter the number from the DIN rail dimensions table.
VY1B0-6 VY120-6 A 1 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 2 2 2 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY1500/1501 VY1400/1401 VY1300/1301 1 1 1 0.9 0.9 0.9 Port 2 (A) pressure (MPa) Port 2 (A) pressure
SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT A One-touch fitting d Part No. A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail AXT100-DR-l 12.5 (Pitch) 5.25 7.5 VQ Enter suffix number into l from the table below.
Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9
Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY
AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11
VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2
10 8 5 4 ZZMA Stations 04 ZQ 10 10 8 6 ZZMA Stations 04B Effective area of external silencer is 160 mm2.
22 3.2 6 8 10 12 3.2 4 6 8 10 31.5 32 35 39 43 D VT Color: White VP VG L DIN rail VP 12.5 (Pitch) 5.25 7.5 AXT100-DRS070 As for , enter the number from the DIN rail dimensions table. 25 35 5.5 VQ 12.5 L Dimension L = 12.5n + 10.5 VKF Each manifold can be mounted on a DIN rail.
A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail 12.5 (Pitch) 5.25 7.5 AXT100-DR-l VQ Enter suffix the number from DIN rail dimensions table below.
ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer
(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20
10 ARJ MR unit 1 None With auto drain 0 Flow direction: Right to left Nil Flow direction: Left to right Applicable model 1/4 3/8 1/2 3/4 1 Nil E2 E3 E4 E6 E10 R 3 4 5 6 AMR3 00-02 to 03 AMR4 00-02 to 04 AMR5 00-04 to 06 AMR6 00-10 AR425 to 935 Adapter assembly port size (2 pcs.)
Caution VQ VKF Dimensions VQZ VP3145-DZA1-X81 MAX.10 134 35 VZ 87.4 VS 21 EXH.1 51 VFN EXH.2 71 80 (Non-locking) Manual override 6 to 8 Applicable cable O.D.
0.03 10 0.07 5 0.00 0 0.00 0 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.