SYJ3000/5000/7000

(Example) SYJ3120-5M-M3 VJ3000-13-1 -+ Single Double Rated voltage 5 port DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available.

MNB

6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 90 10 25 110 115 120 95 2 (Different sides, same side) 120 125 130 15 105 25 100 (n 2) 2 25 + 55 (n 2) 2 100 + 55 (n 4) 2 120 + 55 (n 4) 2 (n 4) 2 125 + 55 (n 4) 2 130 + 55 (n 4) 2 D-F5NTL D-F59F 105 + 55 n = 4, 8, 12, 16 15 + 55 n (Same side) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n

MNB

(n 4) 2 (n 4) 2 (n 4) 2 100 + 40 (n 4) 2 15 + 40 n = 2, 4, 6, 8 80 + 40 85 + 40 90 + 40 n = 4, 8, 12, 16 95 + 40 n n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 75 85 2 (Different sides, same side), 1 10 60 65 70 D-Y69 D-Y7PV D-Y7WV 75 + 30 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 85 + 30 (n 4) 2 60 + 30 65 + 30 n = 4, 8, 12, 16 70 + 30 n 10 + 30 n = 2, 4, 6

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 LE-CP-3-B 360 LE-CP-5-B 590 LE-CP-8-B 1060 LE-CP-A-B 1320 LE-CP-B-B 1920 LE-CP-C-B 2620 Robotic cable Connector B terminal no.

Cylinder with Lock

8)1 65 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)1 95 + 100 (n 2) (n = 2, 4, 6, 8)1 100 + 100 (n 2) (n = 2, 4, 6, 8)1 105 + 100 (n 2) (n = 2, 4, 6, 8)1 110 + 100 (n 2) (n = 2, 4, 6, 8)1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same surface

44

16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44 27.5 31 32.9 T 16 13 79 12

MNB

size (mm) J T P MM N S V GF K Q H W ZZ GL GL1 GR GE VA 34 1/8 M10 x 1.25 27 154 6.5 32 18.3 6 37 47 6.5 211 8.5 12 4 88.5 13 M6 x 1.0 39.5 1/4 M14 x 1.5 27 161 8 40 19.5 6 41.5 51 9 222 10 12 4 96.5 16.5 M6 x 1.0 47 1/4 M18 x 1.5 31.5 183 9 50 22.4 7 47.5 58 10.5 253 12.5 15 5 111.2 20 M8 x 1.25 55.5 3/8 M18 x 1.5 31.5 197 8.5 63 20.7 7 55 58 12 267 17.5 12 9 123.5 23 M8 x 1.25 61.5 3/8

70astamb1

Example) Y59AZ Since there are other applicable auto switches than listed, refer to page 6-7-12 for details.

mb1

Example) Y59AZ Since there are other applicable auto switches than listed, refer to page 6-7-12 for details.

HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

MGG

7 8 9 10 11 12 13 40 and larger are the same as number 6.

51

2 Up to 200 14.5 17.5 17.5 23.5 29 29 38 45.5 54 63.5 79 96 13 17 17 19 27 27 14 16.5 20 26 32 38 8 10 12 14 16 18 8 10 12 14 18 18 12 14 18 25 30 32 12 12.5 11 10.5 15 15 6 7 7.5 7.5 12 12 5 6 6 8 11 11 26 31 38 47 58 72 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 Width across flats 6 length 3.5 14 16 20 22 25 30 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 JMB

T

(mm) 6 8 10 12 2.5 I.D.

KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-W0-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 125.2 Max. 10 75.4 50.1 [57.1] 64.1 34.7 54.6 49 M8 x 1 37.1 61.2 [68.2] Approx. 300 (Lead wire length) Pg7 6 6 6 6 107 [111.4] 87.4 [91.8] 65.2 58.7 18.7 45.5 45.5 45.5 45.5 105.2 17 17 17 17 17 17 17 17 42.7 127 2.7 6 6 6 6 25.2 32.6 8.5 8.5 8.5 8.5 42.6 43.5 21.5 21.5 21.5 21.5 23.7 [25.9] 33.5 [35.7] Refer to the

S Couplers Series KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

4 82 88 12 14 26 12 M6 x 1 depth 9 21 100 st or more 25 25 25 350 to 500 175 80 37 46 57 100 88 13 14 31 12 M6 x 1 depth 13 21 125 st or more 32 32 32 350 to 600 201 82 37 52 65 114 90 16 14 38 12 M6 x 1 depth 13 21 150 st or more 40 40 40 350 to 800 238 92 44 62 84 138 101 20 15 47 12 M8 x 1.25 depth 16 25 200 st or more 50 50 50 350 to 1000 285 104 55 75 94 164 116 25 16 58 14 M10 x 1.5

CG5-S

(mm) Stroke range A Bore size (mm) AL P B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA S ZZ 20 15.5 to 350 1/8 18 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 83 121 25 19.5 to 400 1/8 22 17 50 18.5 10 36 5.5 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 83 126.5 32 19.5 to 450 1/8 22 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 85 128.5 40 27

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Standard Stroke (in) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Max. stroke as standard Mounting Long stroke Standard stroke 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 2, 3, 4, 5, 6 7, 8, 10, 12 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 1 1/2, 2, 3, 4, 5, 6 Rod side nose (B) 12 40 Double