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Cylinder Bore Sizes (in inches) Valve Type Cv Type* 34 1 118 112 2 214 212 3 314 4 6 Micro-Line 0.11 SA F S S LTV 0.18 SA,DA F F F F M M M M S S Nova 1.00 SA,DA F F F F F F F M M Duramatic 0.18 SA,DA F F F F M M M M S S Duramatic 0.63 SA,DA F F F F F M M M M Capsula 0.75 SA,DA F F F F F F M M M Capsula 3.17 SA,DA F F F FT-1, FC-1 0.13 SA F F M S 4B-1, 4W-1 0.48 SA,DA F F F F M M M S FC51,

CEx-OMI0064

8 18 [MODE], 13 OFF 6 , 8 , 13 17 8 12 11 22 5 18 +/, 16 , 40 - 11 , 18 , , 8 11 [RESET] 10ms 11 [HOLD] [BANK] [MODE] 13 RS-232C 12 RS-232C ,3 18 26 NO.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

AS-F q !

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Profile Design ISO/VDMA Air Cylinder Series CP95

G Rear flange F Front flange L Foot C Male rear clevis D Female rear clevis 1.8-29

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

EXH Diagrams (a) to (d) show the combination with peripherals. 13-5-9

Secondary Batteries

B L F G D *Mounting brackets are shipped together, (but not assembled).

CQS

Long stroke Standard stroke Without auto switch With auto switch A Long stroke (mm) Standard stroke (mm) Bore (mm) C D E OA OB Q RA RB T H I K M N With/Without auto switch A L F 7.5 7.5 9 11 B 32 32 41 44 A L 3.5 3.5 4.5 5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 F 5 5 5.5 5.5 12 16 20 25 45.5 13.5 25.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 100 35 to 100 75 to 200 75 to 300 6 8 7 12

VQ5000

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A A A A 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 6 7 8 9 10 11 12 13 14 15 0 0 1 2 3 4 5 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System ADDRESS NO. STATION NO.

IDG

Note 2) They are not applicable in case the thread type is N or F.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

2-1.8 (For monifold mounting) (Light/surge voltage suppressor) Bracket 2-3.2 equivalent (For mounting) (18.5) 28 [35] + (18.5) 22.1 13.5 12.6 15 (11.5) 0.5 10 R P R 1.2 (PE port) 14 M5 x 0.8 (P, R port) L plug connector (L): SYJ3220-L-M3 (-F) M plug connector (M): SYJ3220-M-M3 (-F) M8 connector (W0): SYJ3220-W0-M3 (-F) Approx. 300 (Lead wire length) 28 [35] 12.6 M8 x 1 32.5 15 39.1 [46.1]

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

override 34.7 [41.7] M5 x 0.8 (A, B port) 2-1.8 (For manifold mounting) (Light/Surge voltage suppressor) 28 [35] + 22.1 54.4 [56.6] 2 13.5 12.6 15 R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) M8 connector (WO): SYJ3120-WO-M3 (-F) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock. 576 Programless Controller LECP1 Series Controller Details e r No.

100

z on page 13 for replacement parts. 16 Vacuum pressure switch Refer to x on page 13 for replacement parts. 17 Adapter assembly for bottom mounting Brass (Electroless nickel plating) Refer to 0 on page 14 for replacement parts.

HRX-OM-W069

(C or F). Read the circulating fluid discharge temperature which is displayed on the touch panel.

Booster Regulator/Air Tank

Pressure gauge Pressure gauge Port size Applicable series Symbol Port size VBA10A-02 02 03 04 VBA1A VBA2A VBA4A 1/4 3/8 1/2 VBA11A-02 Elbow silencer Silencer Combination of Thread Type and Options VBA20A-03 Body size Option Semi-standard Thread type Nil G N S GN GS LN LS GLN Nil GLS -Z Nil F N T Nil F N T Nil F N T 10A 11A VBA22A-03 20A 22A 40A 42A 43A VBA40A-04 Air Tank Compatibility Chart

CQS

For Safety Instructions and Actuator Precautions refer to pages 7-13-3 to 7-13-6.

MLU

Please contact SMC for more information. 9-13-6 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9-13-7 7 Plate Cylinder with Lock Series MLU 25, 32, 40, 50 How to Order B 25 30 D F MLU Without auto switch With auto switch B 25 30 D F J79W S MDLU Number of auto switches

C95Series

Single clevis 1.58 2.35 3.87 5.52 9.44 13. 13 Refer to table below lor IN side.

IDX-OM-W035

(182m (273m (384m (510m (ANR) (1) 120SCFM 173SCFM 258SCFM 353SCFM 45 F (7.2) 3/h) 3/h) 3/h) 3/h) (205m (294m (438m (600m 130SCFM 181SCFM 297SCFM 406SCFM 50 F (10) 3/h) 3/h) 3/h) 3/h) (221m (308m (504m (690m 100psi (0.7MPa) 100 F (37.8) 100 F (37.8) 41122 F (550) 22 150psi (0.15 ~ 1.0MPa) 36-104F (2~40) 85% (4) AC115V10% AC230V10% (60Hz) AC460V10% (60Hz) (60Hz) (2) 9A 4.5A 5.6A