CXS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.057 CXSJ6 42 + Stroke 32 13.4 CX Basic type 6 Additional dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42 CXS basic type

CXWM/CXWL

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com for fixing adjusting bolt (M6) 2-Rc 1/8 Cylinder port 8H7 +0.015 0 2-M6 x 1.0 thread depth 7 2 x 2-MB x 1.25 thread depth 15 2 x 2-8H7 depth 12 +0.015 0 4-6.9 through 4-11 counterbore depth 7 (mm) ZZ Z G SS S Q P L F Model CXWM32-25 CXWM32-50 163 123 27.5 96 27 143 22 41 37

MGQ

50 63 80 100 40 42 52 62 80 90 100 110 140 170 18 22 26 32 38 38 44 44 56 62 36 38 46 56 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2 C dimension for a bore size of 32 to 100 is identical to the A dimension. 8-20-4 5 Compact Guide Cylinder Series MGQ Operating Conditions Allowable Lateral Load (Ordinary load) F (N) Stroke (mm) 40 13 21 22 37

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Height (H) (mm) Auto Switch Series 63 16 25 40 MY3A MY3B Can be mounted on both sides from the front direction. 84 27 37 54 MY1B (with air cushion) MY1B 116 37 54 84 Centralized Piping Integrated piping in the head cover is possible. (Refer to page 8-14-26.)

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

a 4-row circular arc on each side for high rigidity and high precision (zero clearance) MImproved moment resistance Improved Dynamic Allowable Moment 4-row circular arc Steel ball rotation center Work load [kg] (Overhang: 300 mm) Size Moment direction High rigidity guide LEKFS LEFS Rail guide (Rolling contact surface) 7.5 (10% increase) 6.8 25 Pitching (Mep) 32 18 (35% increase) 13.3 40 37

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

However, it corrects values on the display based on a pressure value of , which is set as the reference value when auto-shift function is selected. 37 ZSE20(F)/ISE20 Series Made to Order Please contact SMC for detailed dimensions, specifications, and delivery times.

48

B 0.2 A 0.2 Bore size A [mm] B [mm] Hexagon socket head cap screw 12 (10 x 2) 52 11 M3 x 0.5 16 (12 x 2) 57 11 M4 x 0.7 20 (16 x 2) 75 14 M4 x 0.7 25 (20 x 2) 84 17 M5 x 0.8 32 (25 x 2) 98 21 M6 x 1.0 40 (32 x 2) 107 27 M8 x 1.25 50 (40 x 2) 135 37 M8 x 1.25 63 (45 x 2) 146 40 M10 x 1.5 80 (56 x 2) 184 50 M12 x 1.75 100 (71 x 2) 219 62 M14 x 2 8.

Compact Guide Cylinder

B 0.2 A 0.2 Bore size [mm] A [mm] B [mm] Hexagon socket head cap screw 12 (10 x 2) 52 11 M3 x 0.5 16 (12 x 2) 57 11 M4 x 0.7 20 (16 x 2) 75 14 M4 x 0.7 25 (20 x 2) 84 17 M5 x 0.8 32 (25 x 2) 98 21 M6 x 1.0 40 (32 x 2) 107 27 M8 x 1.25 50 (40 x 2) 135 37 M8 x 1.25 63 (45 x 2) 146 40 M10 x 1.5 80 (56 x 2) 184 50 M12 x 1.75 100 (71 x 2) 219 62 M14 x 2 7.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Size 1/8, 1/4, 3/8 Body Material Brass p. 19 JSX20, 30 Port Size 1/8, 1/4, 3/8 Body Material Aluminum p. 21 Bracket Options p. 23 Zero Differential Pressure Type Pilot Operated 2-Port Solenoid Valve JSXZ Series p. 35 How to Order, Flow Rate Characteristics, Applicable Fluid Checklist p. 35 Construction, Common Specifications p. 36 High Flow/ Power Saving Type Working Principle p. 37

Thermo-chiller/Rack Mount Type

HRR050 How to Order yPiping Conversion Fitting (For Water-cooled Refrigeration) p. 37 uPower Supply Cable p. 37 Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 17 iCaster Adjuster-foot Kit p. 38 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 17 Specifications VCooling Capacity Calculation Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 18 Required

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fujitsu Limited 30 31 32 33 34 35 36 37 38 39 No. 473 485.5 498 510.5 523 535.5 548 560.5 573 585.5 L dimension 85.1 87.4 89.6 91.9 94.1 96.4 98.6 100.9 103.1 Weight (g) 105.4 40 41 42 43 44 45 46 47 48 49 No. 598 610.5 623 635.5 648 660.5 673 685.5 698 710.5 L dimension 107.6 109.9 112.1 114.4 116.6 118.9 121.1 123.4 125.6 Weight (g) 127.9 50 51 52 53 54 55 56 57 58 59 No. 723 735.5 748

Slider Type Ball Screw Drive/11-LEFS Series

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEFS32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEFS25 (L = 25 mm) 11LEFS 0.04 LEFS40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Environment

Table Displacement (Reference Value) 0.06 W L Displacement [mm] 0.04 LEFB32 (L = 30 mm) 0.02 LEFB25 (L = 25 mm) LEFB40 (L = 37 mm) 00 100 200 300 Load W [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. Note 2) Check the clearance and play of the guide separately.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

Compact Manifold Regulator

Dimensions 28 58 (Max. 60) 37 IN OUT 20 15 5 22 34 14 31 SMC IN OUT 62 4 x 1.5 W O-ring size Holding screw M3 x 0.5 x 20 SMC P K U C S O H L 9 746 ARM10/11 Series Blocks/Specific Product Precautions 1 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 387 to 391 for Precautions on every series.

HRX-OM-S004

Setting of the contact input signal 1 OFF detection timer Setting range: 0 to 10 seconds to Setting/Checking: Contact input signal 2 37. Press the [SEL] key once. Setting screen of contact input signal 2 is displayed on the digital display. PV SV HRS Series 5.21Communication function 5-79 HRX-OM-S004 Chapter 5 Display and setting of various functions 38.

HRX-OM-Y098

HRL Series 3.4 Piping 3-37 HRX-OM-Y098 Chapter 3 Transport and Setting Up 3.5 Circulating Fluid Supply 1. Ensure that the power source and the power supply of the product is turned off. 2. Check the drain port is valve to prevent the supplied circulating fluid from draining out. 3.

A_HEC-OM-J017

Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

HEC-OM-S008

Temperature setting (with writing FRAM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing FRAM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HECR 4-8 MODBUS communication function 5 MODBUS communication function MODBUS protocol is a communication protocol developed by Modicon.