Possible to transfer a workpiece at low-speed.

D1 = C1 = C Y = L2 = C2 C1 L2 + (3 x P) Q2 = M C2 = C L2 = L1 = X = D2 = (mm) (mm) L1 max X 2 X 2 X 2.5 X 3 X 3 X 3 to 18 3 to 20 3.5 to 30 4 to 32 4 to 36 Size 10 15 20 30 40 D2 3.5 to 4.9 3.5 to 5.9 5 to 9.9 5 to 11.9 5 to 14.9 Y 1 to 18 1 to 20 1 to 30 1 to 32 1 to 36 D1 3.5 to 4.9 3.5 to 5.9 5 to 9.9 5 to 11.9 5 to 14.9 L2 max Y Y Y Y Y Size 10 15 20 30 40 (mm) Q2 M3, M4 M3, M4

JIS Standard Hydraulic Cylinder

2, 4, 6, 8) Note 3) 130 + 50 (n 2) (n = 2, 4, 6, 8) Note 3) 140 + 50 (n 2) (n = 2, 4, 6, 8) Note 3) same surface 115 15 130 140 150 1 Different surfaces same surface 80 35 100 95 2 105 115 100 35 + 30 (n 2) (n = 2, 3, 4) 80 + 30 (n 2) (n = 2, 3, 4) 115 + 30 (n 2) (n = 2, 3, 4) 115 + 100 (n 2) (n = 2, 3, 4) 100 + 100 (n 2) (n = 2, 3, 4) 95 + 30 (n 2) (n = 2, 3, 4) 105 + 30 (n 2)

CL

16.5 25 28 28 33 117 127 128 142 3 3 3 3 50 57 60 68 182 197.5 200.5 226 4 4 4 4 62 70 74 84 CL Refer to p.3.1-30 for long stroke dimensions.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Modular F.R.L. Units

Set pressure range [MPa] 0.1 to 1.7 Ambient and fluid temperature [C] 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 r BG AR B B X430 30 03 BG q 30 AR

CV/MVGQ

3, 4 Same side 10 35 55 100 100 110 90 100 110 90 100 110 1 Different sides 2 Same side 35 + 30 (n 2) n = 2, 3, 4 90 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8 Different sides D-A44 n Same side 10 20 100 90 100 110 100 100 110

CV/MVGQ

3, 4 Same side 100 100 110 90 100 110 90 100 110 10 35 55 1 Different sides 2 Same side 35 + 30 (n 2) n = 2, 3, 4 90 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8 Different sides D-A44 n Same side 10 20 100 90 100 110 100 100 110

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

C1 = C (mm) (mm) L2 max D2 D1 Size Y X L1 max Size D1 = 10 10 3 to 3.9 Y 1 2 to 14 X 1 2 to 14 3 to 3.9 Y = 15 15 3 to 4.9 Y 1.5 3 to 18 X 1.5 3 to 18 C1 3 to 4.9 L2 = C2 20 20 3 to 5.9 Y 1.5 3 to 20 X 1.5 3 to 20 3 to 5.9 D2 = X = 30 30 3 to 7.9 Y 2 3 to 22 X 2 6 to 22 3 to 7.9 C2 = C L1 = 40 40 3 to 9.9 Y 4.5 4 to 30 X 3 6 to 30 5 to 9.9 Symbol: A45 The long shaft can be further shortened

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

CXS

/s 1 Graph V = up to 300mm/s 2 0.5 0.4 CXSL6 0.05 CXSM6 Weight m (kg) Weight m (kg) 0.1 CXSL6 0.05 CXSM6 5 0.03 5 0.01 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L (mm) Overhang L (mm) 10 to 32 Graph V = up to 200mm/s 3 Graph V = up to 400mm/s 4 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30

Modular F.R.L. Unit

AF40-06 AF50 AF60 Model Model AF30 AF30 AF40 AF40-06 AF50 AF60 AF20 1/4 3/8 1/2 1/4 3/8 1/2 3/4 1/4 1/4 3/4 1/8 Port size Port size 3/4 1 3/4 1 1 3/8 3/8 1 1/4 How to Order How to Order AF 30 B X430 03 AF 30 B X425 03 Body size Body size For high pressure 20 30 40 50 60 For high/low temperature 30 40 50 60 3/8 1/2 3/4 1 1/8 3/8 1/2 3/4 1 X430 X440 Low temperature High temperature Option

ISO Cylinder

DA DA C0.5 R sphere DA 30 C 30 DA C A H C A H A H T W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16 DA AL MM 30 MM 30 MM 30 MM 30 H A H A H A A C H Symbol: A23 Symbol: A22 Symbol: A21 Symbol: A20 DA 30 30 L RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol

MXQ

Find the load factor 2 of the static moment. 3-3 Load Factor of Dynamic Moment Pitching Examine Mep. (30 + 10.5) Mep = 1/3 x 16.8 x 9.8 x = 2.2 1000 We = 4/100 x 10 x 420 = 16.8 A2 = 10.5 Meap = 1 x 0.7 x 18 = 12.6 K = 1 = 0.7 Mpmax = 18 3 = 2.2/12.6 = 0.17 (Ln + An) Me = 1/3 We x 9.8 1000 Collision equivalent to impact We = W V : Bumper coefficient Rubber stopper without adjuster =

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

JSX021-12A-3 20 Stainless steel JSX022-12A-3 Size Port size Bracket assembly part no. (With screws) 30, 40 1/4, 3/8, 1/2 VXZ30S-14A-1 50, 60 3/4, 1 VXZ50S-14A-1 Brass, Stainless steel 1/8, 1/4, 3/8 JSX20-12A-4 30 1/4, 3/8 20 Aluminum 1/8, 1/4, 3/8 VX021N-12A 30 1/4, 3/8 VX022N-12A Stainless steel Piping 2.

LJ1H

(kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) 10 L1 0 1 2 3 4 5 Transfer load m (kg) 30 L2 20 L2 (mm) Mer m Rolling Yawing 10 L2 0 1 2 3 4 5 Mer Transfer load m (kg) m 30 a = 1000 a = 500 20 L3 (mm) a = 2000 L3 10 m Mey a 0 1 2 3 4 5 Transfer load m (kg) Refer to page 145 for deflection data. 88 89 Courtesy of Steven Engineering

smcmaintenancepartslist

3 3 er 2-3.

LX

3 0.5 3 3 3 N.O.

Environment

Lead 3: LEY25C 30 Regeneration Option Models Area where the regeneration option is required.

ZP

Width across flats 12 r Buffer stroke t Vacuum inlet y Connection thread D C B 10 86 52 23 20 124 62 51 30 134 72 40 170 82 77 50 180 92 Width across flats 7 10 41 25 2.5 6 M10 x 1 14 3 10 87 53 23 20 125 63 51 30 135 73 40 171 83 77 50 181 93 N4 N6 U4 U6 A10 N S U F GN GS 16 42 26 E2 J K ZP Y D 10 93 59 23 Construction p. 118 14 3 20 131 69 51 30 141 79 40 177 89 77 50 187 99 25 48 30 3.5

Integrated Controller

[kg]1 Horizontal 17 25 40 8 26 40 70 30 50 90 100 Vertical 3 6 10 2 8 16 30 3 13 26 46 Pushing force [N]2 3 4 19 to 38 36 to 74 69 to 141 36 to 76 63 to 122 126 to 238 232 to 452 50 to 118 80 to 189 156 to 370 296 to 707 Up to 300 15 to 700 8 to 350 4 to 175 30 to 900 18 to 700 9 to 450 5 to 225 30 to 900 24 to 800 12 to 400 6 to 200 Speed [mm/s] Stroke range 350 to 400 30 to 900 18 to 600