Air Slide Table

20.7 MXQ16 28 17 5 20 27.2 28.9 M10 x 1 3 MXQ16A 25.2 26.9 MXQ20 31 20 6 27 34.5 37.1 M12 x 1 4 MXQ20A 31.5 34.1 MXQ25 33 21 6 27 41.3 43.8 M14 x 1.5 5 MXQ25A 38.3 40.8 MXQ6B 25 13 3 13 13.6 15.2 M6 x 0.75 2.5 MXQ8B 27 16 4 16.2 14.9 16.7 M8 x 1 2.5 MXQ12B 28 17 5 20 20.2 21.9 M10 x 1 3 MXQ16B 31 20 6 27 25.5 28.1 M12 x 1 4 MXQ20B 33 21 6 27 32.3 34.8 M14 x 1.5 5 Model C F H K L1 L2 M N

Table of Contents

3 0.5 3 3 3 Proximity switch types Home position switch 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire N.O.

Table of Contents

-03 AMH350-04 AMH350-04 AMH450-06 AMH550-10 AMH550-10 AMH650-14 AMH850-20 AM850-20 AMH850-20 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF37C1-3 IDF55C-3 IDF75D-3 IDF120D-3 IDF150D-3 IDF240D-3 IDF55C-3 AM850-20 AMD850-20 75 AMF1000-40 AMF900-30 AMF850-20 AMD850-20 AMD910-30 AMD910-40 AMD1010-40 IDF120D-3 110 150 220 IDF120D-3 IDF150D

Table of Contents

Symbol Thread dia. 1 A8 Buffer connection thread Symbol Pad dia. 2 A10 2 10 to 16 B5 3 20 to 32 3 A14 4 40, 50 B8 T 2 ZP B5 [q Adaptor] Not used for 02 to 08 diameter.

Table of Contents

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Smooth Cylinder/Low Speed Cylinder

=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 35 + 35(n-2) 20 + 35 D-M9V 35 20 5 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 25 + 35(n-2) 15 + 35 D-A9V 25 15 5 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 D-M9WV D-M9AV 35 + 35(n-2) 20 + 35 35 20 10 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 50 + 45(n-2) D-C7 D-C80 15 + 45 50 15 10 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) D-H7 D-H7W D-H7NF (n-2) 2 60 +

Electric Actuator/Slider Type

Lock cable Lock cable (3.5) 15 20 Motor cable (2 x 5) 20 20 Cable length 400 65 65 Cable length 250 132.5 Cable length 250 Motor cable (2 x 5) 5H9 ( ) depth 8 (Depth of counterbore 3) + 0.030 0 65 (2.4) 137 94 (2.4) 73.5 116.5 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) 7.5 44 7.5 Body mounting reference plane Note 1) 60 5.5 5H9 ( ) depth 8 (Depth of counterbore 3) + 0.030 0

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

10 2 pcs. 5 10 15 15 20 20 10 CQS Bore size (mm) Additional Weight (g) 12 16 20 25 32 40 50 CQM Weight Both ends tapped style (g) 1 1 3 3 6 6 6 CQ2 1.5 3 6 12 26 27 53 Male thread Action Bore size (mm) Cylinder stroke (mm) Nut Rod end Male thread 10 15 20 5 1 2 4 8 17 17 32 RQ 12 16 20 25 32 40 50 12 16 20 25 32 40 50 With boss in head side 0.7 1.3 2 3 5 7 13 48 54 Built-in One-touch fittings

ZP

6 1.48 to 1.84 (2.0 to 2.5) 0.045 (0.2) 0.11 (0.5) 3, 6, 10 15, 20 3, 6, 10, 15, 20 M8 x 0.75 4 to 16 Replacement Part No.

Hydraulic

24V BHK1 -020 D-A9 D-A9V Yes 20 & 25 3-wire (NPN equiv.)

CQ2

2 5 10 15 15 20 20 10 Bore size (mm) Option Weights Weight Unit: g Unit: g 12 16 20 25 32 40 50 Action Bore size (mm) Cylinder stroke (mm) 10 15 20 5 Both ends tapped 1 1 3 3 6 6 6 12 16 20 25 32 40 50 12 16 20 25 32 40 50 1.5 3 6 12 26 27 53 Male thread 48 54 Nut Rod end male thread 1 2 4 8 17 17 32 74 83 Spring return Spring extend Rear boss mount 0.7 1.3 2 3 5 7 13 109 123 One-touch

Table of Contents

/N.O. 1/8 to 3/4 0 to 3 (1) 17-2-57 VV2CW2/3/4 N.C./N.O. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-64 VDW10/20/30 Single unit N.C. M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.

ZP

6 1.48 to 1.84 (2.0 to 2.5) 0.045 (0.2) 0.11 (0.5) 3, 6, 10 15, 20 3, 6, 10, 15, 20 M8 x 0.75 4 to 16 Replacement Part No.

Air Cylinder

15 30 Note 1) 15 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM2 D-M9lV 5 15 Note 1) 35 20 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CM3 D-A9lV 5 15 25 15 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9lWV D-M9lAV 10 15 Note 1) 35 20 + 35 (n 2) 2 (n = 2, 4, 6)Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 D-C7l D-C80

Made to Order

MGP series Common Dimensions: MGPM-Z, MGPL-Z, MGPA-Z (mm) MB Width across flats MC Bore size (mm) 12 16 20 25 32 40 50 63 80 100 DA MP MA MT MB MC MH MG ML MK MD MD 6 8 10 12 16 16 20 20 25 30 3 3 3 3 4 4 4 4 4 4 27 28 33 41 51 60 71 84 114 140 3 3 4 5 6 6 8 8 9 12 13 16 22 25 32 32 38 50 50 65 8 10 12 12 17 19 24 24 32 32 20 20 26 27 35 35 46 46 55 58 14 14 20 20 25 25 35 35 45 45 10 10

Fluoropolymer Piping Equipment

29 20 29 14 28 26 17 26 54 44 54 39 23 39 5.8 LQ1T5A-R5 1/2" 3/4" 3/4" 29 26 54 39 9 LQ1T5A-R6 3/8" 3/4" 3/4" 20 17 44 23 5.8 LQ1T5A-R7 1/2" 1/2" 3/4" 24 24 39.5 21 21 36 42 52.5 57.5 28 28 49 9 LQ1T5A-R8 3/8" 3/8" 3/4" 7 20 20 29 14 28 17 17 26 44 44 54 23 23 39 5.8 Note) Products marked are produced upon receipt of order.

Table of Contents

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

MY1

20 50 100 1 2 3 4 5 10 20 30 30 100 200 0.5 m, m, m max. m, m, m max.

Air Cylinder

16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 32 50 18 28 56 25 40 3 71 13 89 M10 x 1.5 10 22 35 M22 x 1.5 86 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 41 60 22 32 64 30 50 3 71 16 110 M12 x 1.75 10 26 43 M26 x 1.5 106 (mm) (mm) With Air Cushion With Rod Boot (mm) Bore size Rc, NPT port WA WB Wq WH GA GB P 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M B For 2 to 10 stations: Both sides Special combination 20 20 stations 20 For 20 stations Note) 25 type is able to use with individual SUP spacer and individual EXH spacer assembly. Refer to page 3-3-14.