Profile Design ISO/VDMA Air Cylinder Series CP95

32 46.5 27 5 15 6.5 40 12 12 9 8.5 64 60 32 63 74 40 56.5 32 5 20 6.5 45 16 16 9 8.5 75 70 40 80 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

51 62 HS 8.5 7.5 6.5 7 8 K 14 11 15 13 15 B 8 9.5 9.5 11 11 HT 17 24 23.5 29 36 C 4.2 5.2 5.2 6.5 6.5 HB 17 21 23.5 29 36 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 L 53 62 70 76 90 W 25 40 40 50 60 X 18 22 28 35 40 Y 54.5 64

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4 55 50 130 70 158 124 142 63 M10 x 1.5 9 M10 x 1.5

Compact End Lock Cylinder Series CBQ2

A + Stroke DL LL DM MO HR W 32 45 25 15 22 15 33.5 DM With front lock 40 52.5 29 21 26 19 38.5 50 59 29.5 21 24 19 45 63 64 28.5 21 25 19 50 63 cylinder tube configuration Q F A + Stroke B + Stroke Rod end male threads (mm) With rod end male threads H1 Bore size (mm) L1 C1 X H1 32 20.5 23.5 M14 x 1.5 28.5 40 20.5 23.5 M14 x 1.5 28.5 50 26 28.5 M18 x 1.5 33.5 C1 63 26 28.5 M18 x 1.5 33.5 X

Compact Cylinder with Air Cushion and Lock Series RLQ

Rod end nut 28.5 8 Series RLQ Dimensions/50 (Emergency Stop) Both ends tapped/RLQA50 3.2 3.2 16 16 2 x 4-M6 x 1 Standard (through)/RLQB50 LOCK Extension locking PC Rear cylinder port PC Front cylinder port M10 x 1.5 effective thread depth 15 69.5 28.5 13 86 Dust cover (Manual unlocking unit) 20 64 50 19 1.6 6.6 2-cushion needle 64 50 17 PL unlocking port Unlocks when pressurized Counterbore

Series LQ3 High Purity Fluororesin Fitting

C (E) M L H E C B L 14 20 25 29 37 49 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 10 17 22.5 24.5 27 30 4.8 6 9 10 14 18 3.5 4 5 6 7 8 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3E1A LQ3E2A LQ3E3A LQ3E4A LQ3E5A LQ3E6A M 1/4 L C H (E) Tee Union : LQ3T (mm) Inch Size 2-B Model Tubing O.D.

5 Port Solenoid Valve, Series VQC

release valve cannot be combined with external pilot specifications. 4 Series VQC Plug-in Unit Base-Mounted Type Models Model Response time ms Note 2) Flow characteristics Series No. of solenoids Weight 4, 25, 3 (A, BR1, R2) 14, 2 (PA, B) g (lbs) Standard: 1W Low wattage C[dm3/(sbar)] b Cv C[dm3/(sbar)] b Cv 15 or less 12 or less Single VQC1100 Metal seal 0.70 0.72 0.15 0.16 0.25 0.18 64

PSxx-OMV0008CN

IO-Link 1 IO-Link IO-Link IO-Link DC1830 V COM IO-Link IO-Link IO-Link IO-Link ( ) 2 COM IO-Link IO-Link 1 Operate IO-Link 3 COM (64 ) 4 1IO-Link V1.0 -84No.PS-OMV0008CN-E 7F.S. 1 1F.S.

17

A 65 82 98 B2 53 64 76 B3 78 88 108 C1 14 20 22 C2 39 44 54 F 96 111 131 E1 1 1 1 E2 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 63 73 93.5 61 72 88 30.5 36 44 40 46 55 73 84 104 14 14 19 6 6 8 Note) Floating brackets consist of a set of right and left bracket.

VXP21/22/23

64 160 170 180 135 140 155 67.5 70 77.5 169 (186.5) 51.5 54.5 59 100 105 120 36 42 52 23 25.5 25.5 35 40 40 12 14 14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 K P 88 97 108.5 113.5 72 80 95 100 95 95 97 97 62 62 64 64 17-3-67 8 The VX series will be revised shortly. Series VXZ22/23 Construction N.C. N.O.

Series VQ Metal Seal/Rubber Seal Body Ported

Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). 16 outputs, 2 stations occupied.

Series VQ Base Mounted Metal Seal/Rubber Seal

Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). 16 outputs, 2 stations occupied. T unit Can be connected with PLC I/O card for serial transmission. EX300-TMB1For models of Mitsubishi Electric Corp. EX300-TTA1For models of OMRON Corp. EX300-TFU1For models of Fuji Electric Company Ltd.

VQC

pressure release valve cannot be combined with external pilot specifications. 4 Series VQC Base-Mounted Type Plug-in Unit Models Model Response time ms Note 2) Flow characteristics Series No. of solenoids Weight 4, 25, 3 (A, BR1, R2) 14, 2 (PA, B) g Standard: 1W Low wattage C[dm3/(sbar)] b Cv C[dm3/(sbar)] b Cv 15 or less 12 or less 0.70 Single VQC1100 Metal seal 0.72 0.15 0.16 0.25 0.18 64

CG5-S

50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 22 22 32 32 I-G10SUS Y-G10SUS 100 100 M26 x 1.5 79 21 45 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 31 IY-G10SUS Not applicable for -X165US option Not applicable for -X165US option Knuckle joint pin Trunnion bracket Material: SUS440 (pin) SUS304 (bracket, snap ring) Material: SUS440 (pin) SUS304 (snap ring) LL CDd9 (CX) LY d Dd9 t m t LH l m L LT (LX

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22

ISO Standard Hydraulic Cylinder

x 1.5 19 52 M42 x 2 58 86 15 187 243 56 115 90 56 72 16 90 50 38 22 3/4 148 79 42 337 CHSD Series Dimensions Double clevis: CHSDCB SS + Stroke Width across flats G GB Y PJ + Stroke 2 x RcP GA J MM B CD D E V MA Air release Cushion valve NB NA K F A B C W W CX RR L S + Stroke ZZ + Stroke H CB Stroke range Bore size (mm) B CD F A D CB G C E GA J NB S CX GB L NA P PJ RR MM MA K H 40 52 14 64

CJ5-S

50 56 21 27 M22 x 1.5 IY-G08SUS + 0.5 + 0.3 + 0.084 0 I-G10SUS Y-G10SUS 100 100 45 22 22 32 32 79 21 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 31 M26 x 1.5 IY-G10SUS Knuckle Joint Pin Pivot Bracket Material: Stainless steel 440 (Pin) Stainless steel 304 (Bracket, Snap ring) Material: Stainless steel 440 (Pin) Stainless steel 304 (Snap ring) LL CDd9 (CX) LY Dd9 d t m t LH l m L LT (LX) LG LF

SMC Pneumatic Clean Series

The number of sampling locations NL = (A) 0.5 Evaluation method using a simple sampling Number of sampling w Unidirectional airflow: at least two locations Smaller value between NL=A/2.32 and NL=A x 64/(10M) 0.5 locations At least one location 2 litters or a sufficient volume of air that a minimum of 20 particles could be counted if the particle concentration were at the class limit.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

10-/1122Basic style / CXS20, CXSL20 10-/11221221Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment ZZ S 12 12 SS 25 Z 2-5.5 through 6 30 1 M8 x 1.25 x 6L (Hexagon socket head set screw) 29.5 counter bore depth 5.3 23 1 500.2 500.2 28 62 53 64