Thermo-chiller/Rack Mount Type

3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

valve S is removed from the valve S assembly and opens until the adjusted opening setting. 8 6 XMD/XYD-25 [3] Opening of the main exhaust valve (valve M) When pressure is applied to the pilot port M, the valve M is removed from the body seat surface and fully opens. 4 2 0 [4] Closing of the initial exhaust valve, the main exhaust valve By removing the pressure from the pilot ports S and

Support Guide/11-LEFG Series

11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300 11-LEFG16-S-350 444 357 430 11-LEFG16-S-400 494 407 480 10 4 400 11-LEFG16-S-450 544 457 530 11-LEFG16-S-500 594 507 580 12 5 500 40 11-LEFG25-S 45 64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10

Gun Type Ionizer

Blow setting Trigger setting 0 Trigger linked 1 1 Trigger lock 2 Continuous blow 3 s 3 5 s OFF timer 4 7 s 5 Trigger linked 5 6 Trigger lock 7 Pulse blow 3 s 8 5 s OFF timer 9 7 s Selection of blow setting M Continuous blow M Pulse blow Blows ionized air continuously. Pulse blow saves air.

LG1H

MFMCA0050AEB (for motor) MFECA0050EAB (for encoder) LG1-1-G05 1 (for motor) 2 LG1-1-R05 MR-JCCBL5M (for encoder) DP9320081-2 (for motor) DP9320089-2 (for encoder) LG1-1-Y05 3 1 When the Matsushita Electric Industrial Co., Ltd. motor driver is selected, in addition to the cable, a power connector (MOLEX 556910R) and an interface connector (Sumitomo/3-M Limited 10126-3000VE) are also required

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

3 !4 !5 !6 !7 !8 !

Micro Mechanical Valve Series VM1000

T.T. 40 M5 x 0.8 OFF 39 (Pilot exhaust port) Max. 6 38 24.5 1.5 1.5 28 Symbol (C1) 2 (C2) 4 18.5 3 14 12 3 (E1) 1 (S) 5 (E2) (140.2) PE EXH.1 SUP.

C76

3 !4 !5 !6 !7 !

C76

3 !4 !5 !6 !7 !

Compact Type

to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up to 800 mm/s Graph up to 30 mm stroke 6 Graph up to 10 mm stroke 5 0.2 0.2 0.1 0.1 Weight m (kg) Weight

Plug-in Unit

Description Function SV24V R +24 V solenoid valve 1 0 0 3 5 2 0 0 0V solenoid valve SV0V 2 BUS 3 1 1 12 +24 V SI and input blocks SW24V 3 1 1 X 4 1 2 2 P 0 V SI and input blocks SW0V 4 PWR 3 3 Ground connection E 5 1 PROFIBUS-DP: M12...5 pins (Plug) Example of the cable set with socket: SMC: EX500-AP...S (See page 2-2-25.)

15

V = 1.4 x Va V = 1.4 x 250 V = 350 mm/s Va M1E = 1/3 x FE x Z = 1/3 x 188.7 x 100/1000 = 6.3 [Nm] (A) M1E (z) m x g Z 3A = M1E/M1max = 6.3/17.1 = 0.37 Find the value M1Emax when Va = 350 mm/s from Graph (11) v. Va Examine M3E.

Series KDM Rectangular Multi-connector

D K 8 8 0 P 0 1 M D K 9 0 S 0 1 M D K KDM20 8 / 1 1 0 P 0 2 M D K 1 0 S 0 2 M D K 2 . 3 3 2 P 0 2 M D K 1 0 S 0 2 M D K e u l B 2 3 / 5 3 0 P 0 2 M D K 3 0 S 0 2 M D K 4 4 0 P 0 2 M D K 3 0 S 0 2 M D K 0 2 d e R 4 / 1 7 0 P 0 2 M D K 7 0 S 0 2 M D K 6 6 0 P 0 2 M D K 7 0 S 0 2 M D K 6 1 / 5 9 0 P 0 2 M D K 9 0 S 0 2 M D K 8 8 0 P 0 2 M D K 9 0 S 0 2 M D K Applicable Tube Material

Series AP3500

S FV4 FV4 M 571 2PW 050 Size Code Cv 0.29 0.5 Metered flow 3 4 Metered adjusted flow in slpm Code Metered adjusted flow in slpm at 80 psig (0.55 MPa) N2.

Cylinder with Lock Series CNG

100 0.5 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP

e-Rodless Actuator

1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load weight / E-MY2C E-MY2C/m1 E-MY2C/m2 E-MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load weight (kg) Load weight (kg) Load weight (kg) E-MY2C25 E-MY2C25 10 10 10 E-MY2C25 E-MY2C16 5 5 5 E-MY2C16 E-MY2C16 4 4 4 3 3 3 2 2 2 1 1 1 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Speed (mm/s) Speed (mm/s) Speed

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

CEx-OMG0106

m/s Piston Speed m/s 19 4-3 Selection Example .

HEC_W-E

Baud Rate B a u d R a t e M O D E < 1 2 0 0 b / s Setting range : 600, 1200, 2400, 4800, 9600, 19200b/s Indicated content : Baud rate (Ex. : 1200b/s) Function : Sets baud rate for communication. 3.

VFS

8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100 VFS5110 600 0.88 45 or less 2 position 3 position VFR 3 8 VP4 Double 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 VFS5200 VFS5210 600 1.06 25 or less Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200