Rotary Table/

1 @1 !2 q @0 u !

2/3 Port Valve

P2 : Secondary pressure(MPa) S : Effective area(mm2) S 18/Cv Cv : Cv factor G : Specific gravity Water=1 4.2-32 VNH Construction !

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Operating time s 0.05 0.1 0.21 0.24 0.26 0.28 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF

MB

50 to 1000 mm/s Operating piston speed +1.0 0 +1.4 0 +1.8 0 up to 250: , 251 to 1000: ,1001 to 1500: Allowable stroke tolerance CJ2 Cushion Note 1) Both ends (Air cushion) JIS Class 2 CM2 Thread tolerance 1/8 1/4 1/4 3/8 3/8 1/2 1/2 Port size (Rc, NPT, G) JIS Symbol Double acting CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

53

time 1 min 30 s 20 s Max.

VQ4000

check spacer with residual pressure exhaust VVQ4000-25A-1 (1) Direct exhaust with silencer box [-S ] (1) D U D U PUSH LOCK Note 1) Release valve spacer, built-in silencer (direct exhaust), exhaust cleaner mounting and double check spacer for residual pressure exhaust cannot be combined with external pilot.

Fieldbus System

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

High Power Cylinder Series RHC

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm

Thermo-chiller/Rack Mount Type

Applicable model HRR010/012/018/024/030/050-mm-m-DM Measurement range of electric conductivity 0.1 to 48.0 S/cm Set range of target electric conductivity 0.5 to 45.0 S/cm1 Set range of electric conductivity hysteresis 0.1 to 10.0 S/cm 1 Default setting is set to Electric conductivity set value: 25.0 S/cm and Hysteresis: 5.0 S/cm.

17

(mm/s) FE = 1.4amg Note 5) 1 3 ME = FEL1 = 4.57amL1 (Nm) DNote 4) 1.4a is a dimensionless coefficient for calculating impact force.

CNS

Be sure to contact SMC regarding disassembly or repair, etc. 9-8-5 6 Series CNS Model Selection Step (1) Precautions on Model Selection Find the maximum load speed V. Caution Find the maximum load speed: V (mm/s) from the load movement time: t (s) and the movement distance: st (mm). 1.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

1) 02 2 stations W Note 1) Combination of [C ] and [S ] is not possible.

Compact Manifold Regulator

VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) 55 mA or less (at no load) NPN or PNP open collector output: 1 output 80 mA 30 V (With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3 selections) Yes 1% F.S.

Series AP500

) Connections 1/2, 3/4 inch face seal, 1/2, 3/4 inch tube weld 3.

Cylinder with Lock Series CNG

Graph 1 10 500st 600st 700st 400st 4 5 300st 3 200st 2 Load movement time: t(s) 100st [Example] 1 Example) 0.4 0.5 0.3 0.2 300 0.1 V' 100 200 1000 400 500 Maximum speed: V(mm/s) V W Step 2 Find the cylinder bore size.

MVGQ

ML2B C J G5-S Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Title not found

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Circuit Cable color Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 S Standard cable Cable color Connector D terminal no.

XM, XY

x 10-6 up to atmospheric pressure Operating pressure (Pa)(abs) Conductance (L/s) Note 1) 14 45 80 160 200 5 1.3 x 10-10 {1 x 10-10} at ambient temperature, excluding gas permeation (Standard material: FKM) Internal Leakage (Pam 3/s) 1.3 x 10-11 {1 x 10-11} at ambient temperature, excluding gas permeation (Standard material: FKM) External Operating time (s) 0.1 0.21 0.24 0.26 0.28 0.05 KF

MK

Data 10-7-13 14 Rotary Clamp Cylinder: Heavy Duty Type Series MK2 20, 25, 32, 40, 50, 63 How to Order MK2 B S F9BW 20 10 R F Number of auto switches Nil S 2 pcs. 1 pc.

air-filter-e

NBR FKM C S A Note 2) T N V Symbol Number of arranged elements Note 1) Not used with fiber elements.