Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

2 6 6 6 6 19 45 2 45 63 Thread 2180 1560 935 OUT 6 3 12 26 27 53 53 120 1.5 175 Rod end male thread Nut 3170 2270 1360 IN 4 2 8 17 17 32 32 49 1 116 80 With boss in head side 3520 2510 1510 OUT 2 1.3 3 5 7 13 25 45 0.7 96 With rubber bumper 5000 3570 2140 IN 0 0 2 3 3 7 9 18 31 56 100 Built-in One-touch fittings 5500 3930 2360 OUT 12 12 21 21 67 55 164 186 143 155 243 324 696 1062 Foot

Vacuum Unit

3 q t i u w !5 With Pressure Switch for Vacuum with Energy Saving Function !7 !1 e o !0 r !2 With Pressure Sensor With Pressure Switch for Vacuum !6 Component Parts No.

MY1

6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !

New

Step 1 Item Selection item Symbol Page VX2 Air Page 2 2 Water VXN 3 2 q C A Select the fluid. q Medium vacuum Page 4 3 Page 6 Oil 4 Select Body material, Port size and Orifice diameter from Flow rate Pressure of each fluid.

High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

NCQ8

8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/4 3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 #10-24UNC2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-3/8 3-5/8 3-7/8 4-1/8 4-5/8 5-1/8 5-5/8 6-1/8 1/4-20UNC2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-3/8 3-5/8 3-7/8 4-1/8 4-3/8 4-7/8 5-3/8 5-7/8 6-3/8 #4-40UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5

15

(Recommended height 5 mm) Dimensions [mm] Stroke L A B n D E 150 389 156 328 4 150 200 439 206 378 6 2 300 250 489 256 428 6 2 300 300 539 306 478 6 2 300 350 589 356 528 8 3 450 400 639 406 578 8 3 450 450 689 456 628 8 3 450 500 739 506 678 10 4 600 550 789 556 728 10 4 600 600 839 606 778 10 4 600 650 889 656 828 12 5 750 700 939 706 878 12 5 750 750 989 756 928 12 5 750 800 1039 806

7

3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

Air Fittings & Tubing

Port A size Port B size Number of Port A Porting Port A Port B Model 4 8 10 12 Rc(PT) Rc(PT) 6 8 10 6, R(PT) 6, R(PT) 6, R(PT) 8 ,R(PT) 8, R(PT) 8, R(PT) 10, R(PT) 10, R(PT) 10, R(PT) 6 8 10 4 6 6 8 One-touch fitting One-touch fitting 6, 10 KM11 1 4 3 8 Rc(PT)female thread 6, 10 One-touch fitting KM12 One-touch fitting One-touch fitting 3 KM13 1 8 1 4 3 8 1 8 1 4 3 8 KM11 One-touch fitting

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant