MQQ 1 !6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !
1 !6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !
P. 17-5-101 6 VN 1 2 LVC 3 LVA Male 4 LVH 5 Elbow LQ1L P. 17-5-102 6 LVD 1 LVQ 2 LQ 3 Female 4 LVN 5 TI/ TIL P. 17-5-103 6 PA 1 2 PAX 3 PB Male 4 5 Run tee LQ1R P. 17-5-104 6 1 2 3 Female 4 5 P. 17-5-105 6 Note) Basic size With reducer 17-5-93 22 Series LQ 1 2, LVN, TL/TIL Port size Tubing O.D.
1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Resin/HNBR Spool valve assembly e r t !0 !1 i q q u y For N.O.
+ 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 95 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 105 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 110 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 1 60 65 75 80 85 2 (Different surfaces) 70 75 80
(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n i t a r t Body (B) End of rotation a o n R g e (mm) Size Rotation range (mm) 50 Size Q M N Body (A) 63 50 Rc 1/8 21 18 (90) 45 , 90 , 135 +8 0 +8 0 +6 0 Q N 80 63 Rc 1/8 27 25 A port B port 100 80 Rc 1/4 29 30 Key position (Start of rotation) 100 Rc 1/4 38 38 M Start
Cable core wire colors 7 1 8 3 2 8 7 1 8 1 7 3 2 8 2 3 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Connections Connections Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement
6 w !7 !1 !0 !6 w !7 !1 !0 !5 w !7 !0 o !2 !4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !
Lead wire: In-line entry Lead wire: Perpendicular entry L L L Unit: mm In-line Perpendicular Lead wire Auto switch Finger position Air gripper D-F9BV D-F9B D-F9NV D-F9N D-F9BA Open 2 7 MHK2-12 Closed 7 3 12 Open 2 6 MHK2-16 Closed 8 1 1 3 13 Open 1 MHK2-20 Closed 5 1 11 Open MHK2-25 Closed 6 2 12 Open 3 MHKL2-12 Closed 3 7 12 Open 1 MHKL2-16 Closed 1 1 3 8 13 Open MHKL2-20 Closed
Orifice dia. 4 8 10 16 22 Body class 2 3 4 5 6 1 6 With flow rate adjustment Valve type VX2 2 7 With by-pass 0 1 2 N.C.
1) 75 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 95 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 105 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 110 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 125
MPa 0.1 Nominal filtration rating*1 m 0.1 (99% filtered particle size) Oil mist concentration on the outlet side*2, *3 mg/m3 1 ( 0.8 ppm) or less Compressed air purity class*4 ISO 8573-1:2010 [ 2 : 7 : 3 ]*5 Max. flow capacity*6 L/min (ANR) 300 750 1500 2200 3700 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4, 1 1 Weight kg 0.19 0.39 0.79 1.23 1.46 Bowl material Polycarbonate Stainless
Construction (The cylinder cannot be disassembled) Component Parts No. q w e r t y u i o !0 No. !1 !2 !3 !4 !5 !6 !7 !8 !
Rc1 Flow direction Barrel nipple 25A Y-strainer (Accessory) Y-strainer (40 mesh) 25A Barrel nipple (25A) (Accessory) 141 HRSH090 Series Inverter Type Recommended External Piping Flow External piping circuit is recommended as shown below. 6 Thermo-chiller 1 Facility water outlet (Water-cooled refrigeration) 6 1 Facility water equipment Facility water inlet (Water-cooled refrigeration) 1 7
Description Body Material Body Zinc die-cast Zinc die-cast q q Spool valve Spool/Sleeve Aluminum/NBR Stainless steel w w Piston Piston Resin Resin e e rPilot Valve Assembly rPilot Valve Assembly (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) 2 2 Single Single Voltage 1 to 6 Voltage 1 to 6 L M L M VQ110L VQ110L 2 2 Double (latching) Double (latching) Voltage 1 to 6 Voltage 1 to 6 The
1 q !3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.
B-1 A-1 B-2 A-2 B-3 A-3 Nil Cable color Circuit 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue S Standard cable Cable color Connector D terminal no. Shield 12 13 7 6 9 8 3 Vcc GND A A B B Brown Black Red Black Orange Black B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.
(mm) Note) D1 D2 L I Q M Nylon Urethane KGUD04-01 1 8 17 25 43.5 47 50.5 53.5 21 39.5 41 13 10.4 4.2 4.2 9.7 16 10.4 12.8 4 1 4 KGUD04-02 14 1 8 1 4 KGUD06-01 KGUD06-02 26 46.5 47.5 11.7 17 13.4 10.6 12.8 12.8 15.2 6 29 17 Reference dimensions after R thread installation.
6 !0 PE PE e !5 w !3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material PBT ADC Material Note No. q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !
VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement