Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Air Cylinder

, 175, 200, 250, 300, 350, 400 400 67 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 85 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 Precautions Theoretical Output Be sure to read this before handling the products

5 Port Solenoid Valve Series SV

MB 32 10% 30% 50% 300 70% Stroke mm AS2201F -01-08 AS2200-01 200 100 70% 50% 30% 10% 0 400 MB 40 300 Stroke mm AS2201F -02-08 AS2200-02 200 100 0 ANA1 -C10 T0806 400 MB 50 300 Stroke mm AS3201F -02-08 AS3000-02 200 100 0 400 MB 63 300 Stroke mm AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable

Air Cylinder

Contents 20 CBG1N20-PS Set of the nos. @5, @6, @7, @8 and grease pack 20 CBG1N20-PS-W Set of the nos. @5, @6, @7, @8 and grease pack CBG1lN Rubber bumper type CBG1lN Rubber bumper type 25 CBG1N25-PS 32 CBG1N32-PS 40 CBG1N40-PS 25 CBG1N25-PS-W 32 CBG1N32-PS-W 40 CBG1N40-PS-W Order seal kit in accordance with the bore size. * The seal kit includes a grease pack (10 g).

Smooth Cylinder/Low Speed Cylinder

0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 REA Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 REB W W W 0.7 193 172 212 REC 0.3 144 126 156 CY CY G 0.5 109 94 118 0.7 90 78 97 CX Foot: L Rod flange: Head flange: 0.3 433 386 476 F G MQ L, F 0.5 334 297 367 W W W RHC 0.7 281 250 309 0.3 210 185 229 RZQ G 0.5 160 141 175 0.7 134 117 129 D-X 1231 Series CS2Y Construction

CY1F

W L In case the product is installed on the ceiling, regard the mounting bolt pitch as L. W L W Mounting hole Intermediate support mounting hole L L Distance between load and supports Mounting hole 140 130 25 120 110 100 90 4. When a 25 mm adjustment bolt is selected, the mounting holes will be hidden behind it. Adjust the adjustment bolt after the cylinder is installed.

10

1 u w e t y i o !2 No.

ARJ1020F

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

HRX-OM-S004

Max. 2s 2s 1s 1s Min. 0.5s 0.5s 0.2s 0.2s 0.1s 0.1s 0.05s 0.05s 0.02s 0.02s 0.01s 0.01s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 100 125 200 300 400 500 600700 1000 1500 2000 3000 4000 600 5000 7000 Current (% for breaker capacity) Current (% for breaker capacity) For HRS100-A/W-20-B For HRS150-A/W-20-B HRS100-A/W-40, HRS150-A/W-40 4h 2h 1h 30min 20min 14min 10min 6min

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

MXW Series Long Stroke Slide Table

W : W max. value is from at Va=300mm/s 1 = W/W max. =10/70 =0.143 L3 C (2) Static moment Examine Mr. (Mp,My values do not apply to this example.)

Table of Contents

0 IS1000 No. q w e r t y u i o !

LEC-OM02904

U U V V M W W (UVW) M U V W U V W PE M P1-P2(11k~12KWP1-P) P1 P2 4 3 4 (C) 200V3.5kW CNP2P-D PC (11.2) (2) (a) DO CN1ON/OFF (b) CN3DC24V (c) CN3SDDOCOM CN3 DOCOM SD 4.1.3 (1) (a) (b) (10.4) (c) (2) 4 4 4 4.2 (1) b01(1) (25) ON 3000r/min (2) 5 No.

MHZ

End boss type One-touch fitting for coaxial tubing End boss type One-touch fitting for coaxial tubing W W Only the basic type is applicable for 32 and 40.

MHZ

2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

MXW

Load factor an Va Item Note CX W Examine W.