Modular Type Filter Regulator Series AW

IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

VQ7-6/7-8

o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve

Prevents Micro-Bubbles

Caution e Insert bushing VXA When the tubing r is curved, straighten it out before using it. VN The tubing r may slip if there is oil or dust, etc. on the holder assembly y. Remove the contamination using alcohol or another suitable cleaner. LVC Press the insert bushing e into the tubing r by turning the lever q.

CLA

lH 61 I Type Single Knuckle Joint Y Type Double Knuckle Joint r\'Id 1'-< t~ m L ~ ~1 -r0 ~ '-' P. _(mm) e ,.

Multistage Ejector Series ZL112/212 1

0 ZM ZH o ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY e u r y ZQ ZF ZP Description Part no. Part no. Note Component Parts Replacement Parts ZCU Description Material Sound absorbing material A No. No.

AC Servo Motor Driver (Pulse input type/Positioning type)

Symbol Name Initial value Unit PC01 STA Acceleration time constant 0 ms PC02 STB Deceleration time constant 0 ms PC05 SC0 Internal speed command 0 0 r/min PC06 SC1 Internal speed command 1 100 r/min PC07 SC2 Internal speed command 2 500 r/min PC08 SC3 Internal speed command 3 1000 r/min PC31 SC4 Internal speed command 4 [Applied] 200 r/min PC32 SC5 Internal speed command 5 [Applied] 300 r

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Sine Rodless Cylinder Series REBR Direct Mount Type

0 #0 r t u @9 !6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Parts list Parts list No. Description Material Note No.

High Vacuum Angle Valve, XL Series

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

XL

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Thermo-chiller/Rack Mount Type

Operation Display Panel The basic operation of this unit is controlled through the operation panel on the front of the product. q e o t r !0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

PF-OMN0009_C

21 10~100 L/min 30~250 L/min U PVC 2 11 21 R (PVC) 11 21 40 11 21 25 25A 30 30A 250L/min G : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] L/min L/min(gal/min) JIS K6742 1 2 1~5 V 4~20 mA (PF3W3) 1~5(1) 1 N M8(3m) -12No.PF-OMN0009CN-F N M8 M8 R / ZS-40-K PF3W504/520 4 3X8 ZS-40-L PF3W540 4 3X8 ZS-40-M PF3W511 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25

2/3 Port Valve

e, r are for selection of valve composition.

KJ

r t y No. q w e r t y u i o !

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

MK

r t No. !

VM

No. w q Description Brass Material Note q Description Aluminum alloy Material Note Body Body Indicator window Acrylic Piston Piston A e POM Plug w e r POM Spring r PE Spring t Stainless steel NBR Packing t Stainless steel NBR O-ring Dimensions Dimensions Panel mounting Stroke 2 mm M22 x 1 Panel 5-7-12

CHKD/CHKG

Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through

RB/RBL/RBQ

R 2 mgh F1S m Nm C m/s kg S T t m MK(2) E1 + E2 mgS F1S mgS mgS F1S + mgS RS Q G 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E Corresponding weight of impact object 2 2 E 2 2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.

XM, XY

Part numbers indicating changed seal material and leakage Changed part Note 2) Leakage (Pam3/s or less) Note 1) Symbol Nil N1 Symbol 1349-80 2101-80 Internal External FKM EPDM Barrel Perfluoro w, e, r, t w, r, t e 1.3 x 10-10 (FKM) 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310