Rotary Actuator

Without air cushion With air cushion Air-hydro 50 P694020-20 P694020-21 P694020-23 63 P694030-20 P694030-21 P694030-23 80 P694040-20 P694040-21 P694040-23 100 P694050-20 P694050-21 P694050-23 Corresponding parts u, o, !0, !3 are included as a set. u, o, !0, !3, @3 are included as a set. u, o, !0, !3 are included as a set.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Head side flange style: CQ2G/CDQ2G Without auto switch With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st A B L L1 32 40 50 28.5 53 58 43 48 7 28.5 59.5 64.5 49.5 54.5 7 33.5 77.5 67.5 67.5 57.5 8 Flange bracket material: Carbon steel Double Clevis Style 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st A B CL Without auto

REA/REB

25 REAH15, 20, 25 REAH15, 20, 25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 High Precision Guide Type REAH 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REAH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 Max.

CXS

44.5 A 19.5 29.5 35.5 43 44 53 D 7.5 5 2 5 7 7.5 MY 6 10 15 20 25 32 CY MG CX Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

CXS

10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM

CJ2X/CUX/CQSX/CQ2X/CM2X

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air

CJ2X/CUX/CQSX/CQ2X/CM2X

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

20 ZZ + 2 Stroke S + Stroke (mm) A AL Bore size Stroke range Standard Long B1 C D E F GA H H1 I J K KA MM NA P RA S 1 2 ZZ 20 20 20 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19 27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16 6 8 10

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

10

20 D-A5l D-A6l n (Different surfaces) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 20 25 25 n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) D-A59W 1 15 25 25 2 (Different surfaces

CRQ2

auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without Without

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

Possible to transfer a workpiece at low-speed.

Description 10 20 30 50 DSeal kit P523010-20 P523020-20 P523030-20 P523040-20 No. Description Qty. No. Description Qty. No. Description Qty. No.

CY1

0.01 0.01 0.02 5 10 15 20 0 Moment ( Nm) 5 10 15 20 0 Moment ( Nm) 25 25 25 5 10 15 20 0 Moment ( Nm) CY1HT25, 32 CY1HT25, 32 CY1HT25, 32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 Deflection (mm) Deflection (mm) 0.03 0.04 0.02 0.03 CY1HT32 0.02 0.02 0.01 0.01 0.01 20 40 0 60 80 20 40 0 60 20 40 0 60 Moment ( Nm) Moment ( Nm) Moment ( Nm) Intermediate Stops Vertical operation 1) Intermediate

REA/REB

/25 REAH15/20/25 REAH15/20/25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 0.08 0.03 REAH25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) Moment (Nm) REAHT25/32 REAHT25/32 REAHT25/32 0.05 REAHT25 REAHT25 REAHT32 REAHT32 REAHT25 0.03 Deflection (mm) Deflection (mm)

REA/REB

0.08 0.03 REAH25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 25 25 25 5 10 15 20 0 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) Moment (Nm) REAHT25/32 REAHT25/32 REAHT25/32 0.05 REAHT25 REAHT25 REAHT32 REAHT32 REAHT25 0.03 Deflection (mm) Deflection (mm) 0.04 0.02 0.03 REAHT32 0.02 0.02 0.01 0.01 0.01 20 40 0 60 20 40 0 60 20 40

Cylinder with Lock

no. a (Max.) b c (Min.) d e f H9 (Hole) f h11 (Shaft) l1 32 GKM10-20 20 10+0.5 +0.15 20 40 M10 x 1.25 10 10 52 40 GKM12-24 24 12+0.5 +0.15 24 48 M12 x 1.25 12 12 62 50, 63 GKM16-32 32 16+0.5 +0.15 32 64 M16 x 1.5 16 16 83 80, 100 GKM20-40 40 20+0.5 +0.15 40 80 M20 x 1.5 20 20 105 * Supplied with clevis pin and clevis pin bracket Rod end: KJ (ISO 8139) l l3 [mm] Bore size Part no. b1 h12

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

30 40 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N

MXH

40 50 20 20 94 6 50 25 104 70 25 6 60 114 70 30 6 30 8-2-18 17 Compact Slide Series MXH Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height A 22(24.5) D-A9 D-M9 D-F9W MX MTS W ( ): Denotes the values of D-A93.