Table of Contents

VCW 20 1 G Clip Series Lead wire length 20 30 40 300 mm 600 mm 1000 mm 1500 mm 3000 mm Nil L1 L2 L3 L4 Class 2 Class 3 Class 4 Flat head screwdriver Voltage Solenoid coil 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Electrical entry Insert a flat head screwdriver into the hook section of the clip groove.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

PDisconnectionPress the lever against the connector housing and pull it outward from the solenoid : 300 600 1000 1500 2000 2500 3000 5000 For DC SYJ312-5LO-M3 SY100-30-4A-20 6 10 15 20 25 30 50 How to Order To order a valve with lead wire length of other than 300mm, indicate part numbers. of the valve without connector and the required connector assembly separately.

-fl Seies

Recommended terminals NVFR 2000, 3000: 1.25-3, 1.25-35, '1.25Y-3N, 1.25Y-3S (1.25mm centers) (spade type, size 4, 22-16 AWG). . NVFR4000: 1.25-3.5M. 1.25Y-31. 1.25Y-3M. .

E/P Pressure Regulator

E/P Pressure Regulator Manufacturing Pneumatics Worldwide Electro-Pneumatic Regulator Compliant Electronic Vacuum Regulator How to Order ITV 2030 SEN DUQ00833 2 X26 Port Size 1 2 3 4 1/8 (1000) 1/4 (1000, 2000) * 3/8 (2000, 3000) * 1/2 (3000) Body Size 1010 1030 1050 2010 2030 2050 2090 3010 3030 3050 Made to Order * Note: 2090 available with 1/4 port only.

For post-stoppage positioning and locking

Clamping Force Specifications W-R1-S2Type Type 1 Type 3 Mass of transferred object 1000 kg or less 3000 kg or less 5000 Possible amount of positional correction 50 mm or less 4000 Clamping force 4430 N 4070 N Clamping force [N] Operating time 1.0 s or more 0.8 s or more 3000 Cylinder operation stroke 83.5 mm 140 mm Bore size 100 mm 2000 Cylinder proof pressure 1 MPa Max. operating pressure

High Vacuum Angle Valve

(5000) Heat-resistant heavy-duty cord 3.4 40 Most sensitive position 7 3.4 3000 20 XL Series Specific Product Precautions 1 Be sure to read this before handling the products.

Aluminum High Vacuum Angle Valve

L type: Lead wire length 3000 mm 3 Flange: Seal material changed part Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Table of Contents

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

High Power Cylinder:

RHC 6 1/4, 3/8 2.5 500 8 1/4, 3/8 MTS 5 1000 0 1,000 2,000 3,000 25 (1/4) 10 1/4, 3/8 Max. speed Vmax (mm/s) 7.5 1500 CC Graph 3:32 10 1/4 10 2000 12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500 2000 2500 3000 1,000 2,000 3,000 Max. speed Vmax (mm/s) Graph 3:40 40 8 10 1/4, 3/8 h=0.7 6 500 30 0.5

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

4000 0 1000 2000 3000 (mm) (mm) 4000 Support spacing (l) Support spacing (l) 8-12-22 Proper Auto Switch Mounting Position (Detection at stroke end) Note) The operating range is a guide including hysteresis, but is not guaranteed.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 16 100, 200, 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1400, 1600, 1800, 2000 3000 25, 40 5000 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. When exceeding a 2000 mm stroke, specify -XB11 at the end of the model number.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 100 100 90 90 (1800) (1900) 80 80 m 70 70 MY3A63 Weight w (kg) 60 60 MY3B63 Weight w (kg) l 50 50 (1300) (1400) 40 40 MY3B40 MY3A40 30 30 m 20 20 (1000) (1100) l MY3B25 MY3A25 10 m 10 (900) (1000) MY3A16 MY3B16 0 0 4000 3000 2000 1000 0 4000 3000 2000 1000 0 Support spacing l1 (mm) Support spacing l1 (mm) Note) A side support

Thermo-chiller

In locations at an altitude of 3000 m or higher (Except during storage and transportation) * For altitudes of 1000 m or higher Because of lower air density, the heat radiation efficiencies of the devices in the product will be lower in the location at an altitude of 1000 m or higher.

HRS100/150

Operating time 20 s 30 s HRZ 10 s Voltage HRZD 5 s Min. 2 s HRW 1 s 0.5 s dV dt HECR = Voltage increase ratio 0.2 s 0.1 s dV HEC 0.05 s 0.02 s Time HEB 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 dt HED Current (% for chiller main breaker volume) < For option B [With earth leakage breaker]> 3.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

If equipped with a light, be careful not to damage the light with the cords lead wires. 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For DC 10-SY3120-5LO-M5 SY100-30-4A-20 For AC 10-SY3120-1LO-M5 SY100-30-1A-20 Precautions Plug in and pull out the connector vertically without tilting to one side.

Intrinsically Safe Valve

/N.C.) 1500 mm 4(A) 2(B) 2000 mm A Note 2) 3000 mm 10 mm Semi-standard 5(EA) 3(EB) 1(P) Electrical entry 4-position dual 3 port valves (N.O./N.O.) 2(B) 4(A) Symbol Electrical entry B Note 2) L-type plug connector Pilot type Nil R L Internal pilot 5(EA) 3(EB) 1(P) 4-position dual 3 port valves (N.C./N.O.)

Compressed Air Preparation Filter

] Air flow rate [L/min (ANR)] AFF50 AFF60 6 20 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 5 15 Inlet pressure 0.5 MPa Inlet pressure 0.5MPa 4 Pressure drop [kPa] Pressure drop [kPa] Max. flow capacity line 3 10 Max. flow capacity line Accessories Sold Separately/ International Standard 2 5 1 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 500 0 500 2000 1500 1000 2000 2500 1500 1000 3000

Series AP3500

Vespel is a registered trademark of DuPont. 103 Air operated type (For high pressure) Diaphragm Valve for Ultra High Purity Series AP3000 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed High pressure type: Max. 3000 psig (20.7 MPa) LOTO option available as an option Indicator switch available as an option How to Order (Inlet)

Quick Exhaust Valve Series AQ

Description AQ2000/3000/5000 AQ1500 AQ1510 Aluminum die-casted Zinc die-casted Zinc die-casted Body q Brass Brass Guide w Cover Aluminum die-casted e Replacement Parts Part no. Material No.

PF3A7xxH.eng

(Press the and buttons simultaneously for 1 second or longer) [ P] Select input switch operation [3000] 3000 L/min (PF3A706H) Accumulated flow error Sub display In measurement mode, the display of the sub display can be temporarily changed by pressing the or buttons. [6000] 6000 L/min (PF3A712H) [F 1] Installation Direct mounting Install the product with 4 screws suitable for the product