Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side), Operation Manual/Calibration Certificate: K (with Operation

Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core))

Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: L (Out 1: IO-Link or NPN/PNP)

Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N2 (NPT1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve)

Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: None, Operation Manual/Calibration Certificate: Y (None)

Size: 100, Motor Mounting Position: D (In-line), Motor Type: T9 (AC Servo Motor, Absolute Encoder), Lead: D (3.33mm), Stroke: 100mm, Motor Option: w/o Option, Rod End Thread: M (Rod End Male Thread), Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: N2 (LECSN2-T9/without Network Card, 200V to 240V), I/O Cable Length: 1 (

BP1000

SS Viton (Option: Teflon, Kalrez) Teflon Dimensions BP1000 2.12 (53.8) Max. 4.9 (124.5) Max. 5.6 (142.2) (Option: panel mount) 2.25 (57.2) 0.69 (17.5) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 2.00 (50.8) Flow Characteristics BP1000 30 0.21 28 0.19 Back pressure (MPa) Back pressure (psig) 26 0.18 24 0.17 22 0.15 20 0.14 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2

BP1000

Parts Body Diaphragm Nozzle Seat Seal Hastelloy C-22 Hastelloy C-22 316L SS 316L SS Viton (Option: Teflon, Kalrez) Teflon Flow Characteristics Dimensions inch (mm) BP1000 BP1000 30 0.21 28 0.19 Back pressure (MPa) Back pressure (psig) 26 0.18 5.6'' MAX. (142) P OPTION 24 0.17 5.0'' MAX. (127) 22 0.15 1.50'' (38.1) 20 0.14 2.25'' (57.2) 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2

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