PFxx-OMS0001CN

-2No.PF-OMS0001CN-A / 1 1.5 *3) 1 1 [] -3No.PF-OMS0001CN-A () () () N2 () -4No.PF-OMS0001CN-A () * * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMS0001CN-A * FG (49 N 9022545 ,IN () () -6No.PF-OMS0001CN-A * () 6 33 () 10 m DC(-)() -7No.PF-OMS0001CN-A * () () CE 050 -8No.PF-OMS0001CN-A * 1015 10 /23% 3 LCD * OUT -9No.PF-OMS0001CN-A

Precision Clean Regulator Series SRP

Consistent clean room production Cleaned, assembled, inspected, and sealed in double packaging in a Class 10,000 environment Manufacturing process Applications Pressure feed of chemicals Parts assembly Precision clean regulator SRP Degrease cleaning Clean air Super mist separator Odor removal filter Clean gas filter Assembly Inspection N2 blow Precision clean regulator SRP Interior purge

AP500

(53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

PFM7.eng

Metal piping attachment Indicator LED (OUT1) Indicator LED (OUT2) Lock ring Function selection mode PFM7 button (SET) Nominal thread size Required torque S Connector Piping port (OUT side) Rc (NPT)1/8 7 to 9 Nm Rc (NPT)1/4 12 to 14 Nm Thank you for purchasing an SMC PFM7 Series Digital Flow Switch.

KP/KPQ/KPG

DENMARK SMC Pneumatik A/S FINLAND SMC Pneumatiikka OY FRANCE SMC Pneumatique SA GERMANY SMC Pneumatik GmbH HUNGARY SMC Hungary Kft. IRELAND SMC Pneumatics (Ireland) Ltd. ITALY SMC Italia S.p.A. NETHERLANDS SMC Pnuematics BV. NORWAY SMC Pneumatics Norway A/S ROMANIA SMC Romania s.r.l. RUSSIA SMC Pneumatik LLC. SLOVAKIA SMC Slovakia s.r.o. SLOVENIA SMC Slovenia d.o.o.

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: L3 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: B (Out 1: PNP; Out 2: PNP)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: L2 (Out 1: IO-Link or NPN/PNP, Out 2: NPN, PNP, or Input)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: L2 (Out 1: IO-Link or NPN/PNP, Out 2: NPN, PNP, or Input), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: N (w/o Lead Wire w/Connector)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V)

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V, Lead Wire: w/M12 Conversion Lead Wire and Connector, 0.1m, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: Analog 4 to 20 mA, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: Analog 4 to 20 mA, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -