AC Servo Motor Driver (CC-Link Type)

/deceleration time constant (ms).

Vacuum Unit

Port exhaust 2 Supply valve maintains vacuum by energization (20 ms or more). Stopping the vacuum turns on the release valve.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Symbol: C5 Applicable to single vane style only Symbol: C6 Applicable to single vane style only Start of rotation is 45 up from the bottom of the vertical line to the left side. Rotation tolerance for CRBU2W10 is . A parallel key is used instead of chamfer for size 40. Start of rotation is 45 up from the bottom of the vertical line to the left side.

PSE550/300

(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.

Table of Contents

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

KJ

MS Use to branch line in the same direction.

CG5-S

MS-5ATHU-4 For piping soft nylon and polyurethane tubing Unrestricted 360 positioning and fastening around the stud axis 6/4 x M5 6/4 x M5 MS-5HLH-6 MS-5ATHU-6 Used only with: MS-5ALHU-6 MS-5HLH-4 MS-5HLH-6 MS-5ATHU-6 Gasket (H) Gasket Material: Nylon 66 GF30% Seal for M5 threads M-5G1 M-5GH Material: PVC 25 Related Equipment Tubing Nylon Tubing Series T Polyurethane Tubing Series TU T1209

Air Fittings & Tubing

L B D E F 6.5 8.5 2.1 4.0 2.5 3.7 MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 Hose elbow: MS-5HLH-4, -6 lB Effective area (mm2) Weight (g) Part No.

C95Series

Output r8lponse Grommet Grommet Grommet Lead wire entry 1 mS or less 1 mS or less 1 mS or less " ~ ResponseUme ... ...

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

VFS

01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor 163.5 (3 position: 171) With light/surge voltage suppressor 1 8 (

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J r + ' + t i t t t t t l t | l , b o r j | | | , ' l l l " ' r e , l l l t t l Sealtype . | | E ' r l Valve s-port Body Ported liT T.T""n l l l l E f f i . I r F I l f f i r ] Pilot valve specifications I I il*d*drffir -.

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;200 million cycles VQC21fi): 20 ms 2 ms;2fi) million cycles For r,lf, srunh vQc4loo: 17 ms 3 ms; 100 million cycles P!

Model Selection 1

Single unit C6 to C12 Pilot operated (For dry air) 0.01 to 0.6 3.4, 4.8 C6 to C12, (3/8) (1) 17-2-89 VV2Q22/32 N.C. Manifold Note 1) All IN ports are 3/8. Note 2) 10 is N.C. (normally closed) only. 17-1-2 17-1-3 2 Model Selection 2 Equipment for Controlling Fluids Model Selection 2 According to the model selection guide below, refer to number of port, valve style (N.C./N.O.

Series: VQ2000, IN Port Size: C6 (One-touch Fitting for ø6), OUT Port Size: C6 (One-touch Fitting for ø6), Option: FN (F + N)

Series: VQ1000, IN Port Size: C6 (One-touch Fitting for ø6), OUT Port Size: C6 (One-touch Fitting for ø6), Option: F (Bracket)

Series: VQ2000, IN Port Size: C6 (One-touch Fitting for ø6), OUT Port Size: C6 (One-touch Fitting for ø6), Option: F (Bracket)

Series: VQ1000, IN Port Size: C6 (One-touch Fitting for ø6), OUT Port Size: C6 (One-touch Fitting for ø6), Option: FN (F + N)

ZSE30A(F)/ISE30A

Available response time settings 20 ms, 100 ms, 500 ms, 1000 ms, 2000 ms This function averages pressure values measured during the response time set by the user and then compares the average pressure value with the pressure set point value to output the result on the switch.

AC Servo Motor Driver (SSCNET /H Type)

For LECSS2-T, set [ms/div] and [Number of collection Div] to the horizontal axis (time axis). [ms/div] [Number of collection Div] will be [Measurement time]. Click of [ms/div] and set the DiV number. The unit ms of [Number of collection Div] is 1000ms1s. Click of [Number of collection Div] and set the time.