High Vacuum Angle Valve, XL Series

Specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Fluid Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Operating temperature C 5 to 150C (41 to 302F) Atmospheric pressure to 10 -6 {760 to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 14 45 80 Conductance l/s Note 1) 1.3 x 10 -10 {1 x 10 -9} at ordinary temperatures, excluding gas transmission Internal External Leakage Pa m 3/s {

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Cable length (L) A1 (17.7) (10.2) 1 2 5 6 (14) (18) 1 3 5 8 A B C 1.5 m 3 m 5 m 8 m A6 B1 B3 A1 A3 B6 (13.5) 1 2 5.7 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 10 m LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 8 A B C 15 m Actuator side Controller side 20 m 5.5 6.3 5.7 (14.2) Connector C (Terminal no.)

LG1H

of gravity (mm) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 L2 (mm) 400 Mer Rolling Yawing m 200 L2 Mer 0 10 20 30 Transfer load m (kg) m 4000 a = 1000 L3 (mm) L3 a = 3000 a = 2000 2000 m Mey a 0 10 20 30 Transfer load m (kg) Refer to page 183 for deflection data. 148 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Thermo-chiller

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C Cooling capacity = Considering a safety

IDG

Construction 0 P1 = 0.3 MPa Outlet air atmospheric pressure dew point (C) 10 Refer to pages 14-19-30 to 31.

Free Mount Cylinder

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

42

Note Conductor resistance W/km, 20C 65 or less 1.5 m AXT100-DS25-015 Cable 0.3 mm2 Approx. 10 x 25 cores 3 m AXT100-DS25-030 5 m AXT100-DS25-050 Voltage limit VAC, 1 min. 1000 L * For other commercial connectors, use a 25pin type female connector conforming to MIL-C-24308. * Cannot be used for transfer wiring.

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

0.4

Property Cable length (L) Conductor resistance /km, 20C 10 65 or less AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 1.5 m 3 m 5 m Cable 25 cores x 24AWG 16 44 L Voltage limit V, 1 min, AC 1000 For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C-24308. Cannot be used for transfer wiring.

7

Refer to page 118 for details. 141 VXD Series For Air/Water/Oil 4 B Dimensions/VXD2 Body Material: C37, Stainless Steel Grommet C E U 300 T f A B OUT IN OUT IN M 2 x P Port size F b a J I 2 x 8.5 2.6 d e L K (D) Grommet (with surge voltage suppressor) C E U 300 T A OUT IN OUT IN M B (D) L K 2 x P Port size I F J Cable 6 to 12 U V E C DIN terminal G1/2 (44) T 31.5 B A IN OUT M 2 x P Port

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

2 Phase Stepper Motor/Without Motor Brake Series LXP

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance

MGP

Load weight m (kg) Load weight m (kg) 30 CXW 30 40 50 32 20 CXS 10 20 CXT 5 4 10 MX 3 5 MXU 200 2 3 4 5 20 30 40 50 10 1 100 1 100 10 200 20 30 40 50 2 3 4 5 Eccentric distance l (mm) Eccentric distance l (mm) MXS 75 to 124 stroke 50 to 74 stroke MXQ 100 100 200 63 P=0.5MPa P=0.5MPa MXF 80 50 40 50 100 MXW 40 Load weight m (kg) Load weight m (kg) 30 40 50 32 MXP 20 30 MG 10 20 MGP 5 4 3

VQZ1000/2000/3000

B L plug connector (L) 5 (R1) M plug connector (M) 1 (P) 3 (R2) (Option) 100 VAC 200 VAC 110 VAC 220 VAC VQZ1000 M plug connector (M) B C A 0.90 1.3 (A) 4 Locking type (Tool required) 1 (P) 5 (R) DIN terminal (Y) DIN terminal (YZ) VQZ2000 N.C.

Vacuum System Peripherals:

L Grommet type Lead wire length 3 m 24 VDC 5 12 VDC 6 C Lead wire length 0.6 m 1 Symbol 2 3 4 5 6 7 8 Order of manifold (Station) Connector type 6 VDC V CL CN Lead wire length 3 m Without connector 5 VDC S 05 07 10 Ejector unit nozzle diameter 3 VDC R Note) When F is required, it is Nil.

I

(V) 5 1.5 0.7 3 2.5 1.3 AC125 0.1 AC250 0.8 1.5 2 0.5 1 3 DC30 4 2 3 3 0.1 DC125 0.05 0.4 0.05 0.4 Insulation Resistance 100 M@ 500V (DC) *High Inrush Circuits D I M E N S I O N S P N E U M AT I C P R E S S U R E S W I T C H: S E R I E S IS3000 H O W T O O R D E R P N E U M AT I C P R E S S U R E S W I T C H: S E R I E S IS3000 IS3 0 C O N N E C T I O N L A M P 0 Rc(PT) 1/ 4 1 Flange No

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

Vacuum Unit

6 p. 31 3 30 m ZK2 SC3 4 A Body gasket1 (10 pcs. per set) Construction !1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

VFR

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.