Table of Contents

50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(A) (B) (C) (B) Electrical entry, Light/Surge voltage suppressor (C) Manual override (A) Coil rated voltage Electrical entry 1 100 VAC, 50/60 Hz Nil Symbol G Non-locking push type Light/Surge voltage suppressor None Lead wire length 300 mm Lead wire length 600 mm 2 200 VAC, 50/60 Hz B Locking type B 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz GS With surge voltage suppressor None H Grommet

Battery-less

C 21 to 50 45 to 65% LEY25E A/B/C 21 to 35 40 to 50% 160 140 Lead 2.5: LEY16EC 120 Lead 5: LEY16EB LEY32E A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEY16EA 80 LEY40E A 24 to 30 50 to 65% B/C 21 to 30 60 40 Min. 20% 0 20 10 0 20 30 40 50 60 70 Pushing force set value [%] Max. 65% Model LEY16mE LEY25mE LEY32mE LEY40mE

Stability of suction position,

B A 8 8 50 Width across flats 14 Bushing Bushing B A 9 9 35 Width across flats 30 M22 x 1.5 Bushing Rc1/8 M18 x 1.5 Width across flats 27 D D M5 x 0.8/Effective thread depth 5 50 32 40 17 D D 67 36.11) 12.5 44.1 35 44 26.5 31.2 2.5 4 26.41) 10 30 (Rotating angle) 30 (Rotating angle) 68 63 45.8 54 50 37 D-D D-D 14 16 22 7 26 11 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL

Modular Design with Uniform Body Style

B B B B B B AW20-D 30 34 43.9 5.4 15.4 55 2.3 29.7 28.5 14 6 104.9 91.4 87.4 93.9 AW30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 157 123.9 122.2 117.8 122.3 137.8 142.3 AW40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 186.9 155.6 153.9 149.5 154 169.5 174 AW40-06-D 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 188.9 157.6 155.9 151.5 156 171.5 176 AW60-D 70 75 66 11 22 113 3.2 273.9 242.6 240.9 236.5

CA2

A A B A B A B A B A B A B Hs Hs Hs Hs Ht Hw Hw Hs Hs Ht Hs 40 13.5 0 11.5 12 15 23 8 0 0 0 18 3 15.5 0.5 40 31 38.5 31 38 50 14 0 12 12.5 15.5 23.5 8 0 0 0 18.5 3 16 0.5 43.5 35 42.5 35 43.5 63 18.5 0 16.5 17 20 28 9 0 0 1 23 4 20.5 1.5 85 85.5 93.5 49 42 91 91 93 48 42 50.5 80 22.5 1.5 20.5 21 24 32 11 0 0 3 27 6 24.5 3.5 93.5 94 102 55.5 50 107 107 101.5 54 50 59 100 25.5 2.5 23.5 24 27

CV/MVGQ

Action Double acting, Single rod 20, 25, 32, 40 Bore size (mm) Maximum operating pressure 0.7 MPa Minimum operating pressure 0.15 MPa RE A B Cushion Rubber bumper REC Piping Built-in One-touch fitting Piston speed 20 25 32 40 CX (mm/s) 50 to 700 50 to 650 50 to 590 50 to 420 Application/Tubing O.D.

CV/MVGQ

Action Double acting, Single rod 20, 25, 32, 40 Bore size (mm) Maximum operating pressure 0.7 MPa Minimum operating pressure 0.15 MPa RE A B Cushion Rubber bumper REC Piping Built-in One-touch fitting Piston speed 20 25 32 40 CX (mm/s) 50 to 700 50 to 650 50 to 590 50 to 420 Application/Tubing O.D.

VFS

pilot operator for VFS3220 3110 to 120 VAC (50/60 Hz) 4220 VAC, 50/60 Hz 5 24 VDC B side pilot operator for VFS3 20 3 4 5 16 1 2 3 4 5 6 12 VDC 17 A side pilot operator for VFS3 30 Common pilot exhaust DIN terminal with light/surge voltage suppressor 7240 VAC, 50/60 Hz 9 Other 18 B side pilot operator for VFS3230 DIN terminal DIN terminal with light/surge voltage suppressor DIN terminal

ISO Cylinder

100 Accessory Floating joint JAl-l-l 10 20 50 70 151 + 8.1 x 50/10 + 45 237 g Auto Switch Made to Order 54 C85R Series Dimensions Bottom side mounting: Cl85RAF/Y B 8 to 16 Stroke (WH) (XB) G1 G2 Width across flats SW KK 2 x LD EE EE NA NA LH B C Width across flats K AM H N2 LX L N1 NA NA S + Stroke ZZ + Stroke Head cover axial port Boss-cut/Basic [mm] Dimensions Bore size AM B C EE G1 G2

MY1

D A B Side support B MY-S B 2-J E A B C D Model A 35 43 53 61 70 87 113 136 170 206 B 43.6 53.6 65.6 75 84 105 131 158 200 236 C 12 15 25 D 21 26 38 E 3.6 4.9 6.4 F 1.8 3 4 G 6.5 6.5 8 H 3.4 3.4 4.5 J M4 x 0.7 M4 x 0.7 M5 x 0.8 Applicable cylinder MY1B 10 MY1B 16 MY1B 20 MY1B 25 MY1B 32 MY1B 40 MY1B 50 MY1B 63 MY1B 80 MY1B100 A B A B A B MY-S10 MY-S16 MY-S20 A B MY-S25 35 50 8 5 9.5 5.5

ZP

C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U

MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

Table of Contents

Metal bowl AL Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specifications Bracket mounting size Accessory specifications (mm) With pressure gauge With auto-drain Model Port size D C A B H 27 33 N 26 63 66 76 76 P F 25 30 41 50 50 G 20 24 35 40 40 K 4.5 5.5 7 9 9

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Air Cylinder

CM3 Auto Switch Proper Mounting Position (Centralized piping type, With end lock) CG1 (mm) Auto switch model D-H7l D-H7C D-H7lW D-H7BA D-H7NF CG3 D-C7l D-C80 D-C73C D-C80C D-G39A D-K39A D-A3lA D-A44A D-M9l(V) D-M9lW(V) D-M9lA(V) D-A9l(V) D-G5NT D-B5l D-B64 D-B59W JMB MB A B A B A B A B A B A B A B A B Bore size MB1 20 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5

Proposals for Energy Saving

G E T D 7 9 Optional How to Order Pilot Valve Assemblies Pilot valve assemblies/Electrical entry Symbol Electrical entry Symbol Electrical entry 50 SF4 Z B E 1 G GS Manual override Rated voltage Nil Push type 1 100VAC, 50/60Hz B Slotted locking type 2 200VAC, 50/60Hz C Locking type 3110 to 120VAC, 50/60Hz 4220VAC, 50/60Hz 5 24VDC Optional E EZ Indicator light/Surge voltage suppressor 6

VFR

T (EA)(P)(EB) 5 1 3 Option 2 position double (B) (A) 4 2 Electrical entry 2 Coil rated voltage E: Grommet terminal D: DIN terminal (EA) (P)(EB) 5 1 3 3 2 1 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 position closed center 110 to 120 VAC, 50/60 Hz (B) (A) 4 2 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC 3 (EA) (P)(EB) 5 1 3 7 240 VAC, 50/60 Hz 9 Other 3 position exhaust center Option (B) (A) 4

2 Phase Stepper Motor/Without Motor Brake Series LXP

(B contact) N.C. (B contact) Lead screw lead N.C. (B contact) N.C. (B contact) 6mm 12mm A B N.O. (A contact) N.O. (A contact) Stroke N.O. (A contact) 50mm 75mm 100mm 125mm 150mm 170mm 200mm 50 75 100 125 150 170 200 N.O. (A contact) Use a driver with CE marking.

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S