VFS

pilot operator for VFS3220 3110 to 120 VAC (50/60 Hz) 4220 VAC, 50/60 Hz 5 24 VDC B side pilot operator for VFS3 20 3 4 5 16 1 2 3 4 5 6 12 VDC 17 A side pilot operator for VFS3 30 Common pilot exhaust DIN terminal with light/surge voltage suppressor 7240 VAC, 50/60 Hz 9 Other 18 B side pilot operator for VFS3230 DIN terminal DIN terminal with light/surge voltage suppressor DIN terminal

ISO Cylinder

100 Accessory Floating joint JAl-l-l 10 20 50 70 151 + 8.1 x 50/10 + 45 237 g Auto Switch Made to Order 54 C85R Series Dimensions Bottom side mounting: Cl85RAF/Y B 8 to 16 Stroke (WH) (XB) G1 G2 Width across flats SW KK 2 x LD EE EE NA NA LH B C Width across flats K AM H N2 LX L N1 NA NA S + Stroke ZZ + Stroke Head cover axial port Boss-cut/Basic [mm] Dimensions Bore size AM B C EE G1 G2

MY1

D A B Side support B MY-S B 2-J E A B C D Model A 35 43 53 61 70 87 113 136 170 206 B 43.6 53.6 65.6 75 84 105 131 158 200 236 C 12 15 25 D 21 26 38 E 3.6 4.9 6.4 F 1.8 3 4 G 6.5 6.5 8 H 3.4 3.4 4.5 J M4 x 0.7 M4 x 0.7 M5 x 0.8 Applicable cylinder MY1B 10 MY1B 16 MY1B 20 MY1B 25 MY1B 32 MY1B 40 MY1B 50 MY1B 63 MY1B 80 MY1B100 A B A B A B MY-S10 MY-S16 MY-S20 A B MY-S25 35 50 8 5 9.5 5.5

ZP

C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U

MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

Table of Contents

Metal bowl AL Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specifications Bracket mounting size Accessory specifications (mm) With pressure gauge With auto-drain Model Port size D C A B H 27 33 N 26 63 66 76 76 P F 25 30 41 50 50 G 20 24 35 40 40 K 4.5 5.5 7 9 9

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Air Cylinder

CM3 Auto Switch Proper Mounting Position (Centralized piping type, With end lock) CG1 (mm) Auto switch model D-H7l D-H7C D-H7lW D-H7BA D-H7NF CG3 D-C7l D-C80 D-C73C D-C80C D-G39A D-K39A D-A3lA D-A44A D-M9l(V) D-M9lW(V) D-M9lA(V) D-A9l(V) D-G5NT D-B5l D-B64 D-B59W JMB MB A B A B A B A B A B A B A B A B Bore size MB1 20 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5

Proposals for Energy Saving

G E T D 7 9 Optional How to Order Pilot Valve Assemblies Pilot valve assemblies/Electrical entry Symbol Electrical entry Symbol Electrical entry 50 SF4 Z B E 1 G GS Manual override Rated voltage Nil Push type 1 100VAC, 50/60Hz B Slotted locking type 2 200VAC, 50/60Hz C Locking type 3110 to 120VAC, 50/60Hz 4220VAC, 50/60Hz 5 24VDC Optional E EZ Indicator light/Surge voltage suppressor 6

VFR

T (EA)(P)(EB) 5 1 3 Option 2 position double (B) (A) 4 2 Electrical entry 2 Coil rated voltage E: Grommet terminal D: DIN terminal (EA) (P)(EB) 5 1 3 3 2 1 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 position closed center 110 to 120 VAC, 50/60 Hz (B) (A) 4 2 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC 3 (EA) (P)(EB) 5 1 3 7 240 VAC, 50/60 Hz 9 Other 3 position exhaust center Option (B) (A) 4

2 Phase Stepper Motor/Without Motor Brake Series LXP

(B contact) N.C. (B contact) Lead screw lead N.C. (B contact) N.C. (B contact) 6mm 12mm A B N.O. (A contact) N.O. (A contact) Stroke N.O. (A contact) 50mm 75mm 100mm 125mm 150mm 170mm 200mm 50 75 100 125 150 170 200 N.O. (A contact) Use a driver with CE marking.

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

Electric Actuator with Integrated Guide

(B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.

2/3 Port Valve

Electrical entry G Grommet Voltage C Conduit 2 200V AC 50/60Hz 1 100V AC 50/60Hz D DIN terminal T Conduit terminal 3 110V AC 50/60Hz Refer to table q for configuration. 4 220V AC 50/60Hz 7 240V AC 50/60Hz 8 48V AC 50/60Hz 9 Other (only AC) Table q Voltage-Electrical Entry-Options Caution Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) Class B G C

SY

D side Type 41P Type 42P SY9000-50-2A-C8 SY9000-50-2A-C10 SY9000-50-2A-C12 SY9000-50-2A-02 SY9000-50-2A-03 SY9000-18-2 SY9000-11-2 C8: A/B port 8 One-touch fitting C10: A/B port 10 One-touch fitting !2 Manifold block assembly 1 C12: A/B port 12 One-touch fitting How to install lead wire cover 02: A/B port Rc 1/4 Lead wire cover is only used for double solenoid valves.

Table of Contents

-(N)PF2W5--2 B 120 1.6 23 48.2 60 Wiring Brown (1) DC (+) Main circuit Black (4) OUT 50 60 34 55 White (2) NC/Analog output Blue (3) DC () 4-4.5 2-Port size 6 50 40 Use this sensor by connecting to SMC remote type display unit Series PF2W3.

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.

JIS Standard Hydraulic Cylinder

Refer to page 378 for minimum stroke with auto switch. 32 is for B-series rod size only. CH2 H B B 50 100 CH D2 H B B 50 100 M9BW With Auto Switch With auto switch (built-in magnet) Port and cushion valve positions Refer to page 359.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

option i Cable type Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 50 50 to to 1200 1200 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) o Actuator cable length [m] !

42

: VQ430 -l 3-position exhaust center: VQ440 -l 3-position pressure center: VQ450 -l 3-position double check: VQ460 -l 0 1 0 1 0 1 0 1 0 1 179 106 90 73 50 2 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light Indicator light 165 179 106 90 2 59 73 50 2 4 48 38 24.6 11(12.5) 2(B) port 11(12.5) 4(A) port B A 14 12 1 5 3 4 2 45 30 38 24.6 A B Manual override 2 x 5.6 Mounting hole 48 B A 14