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(including 4 M10 bolts) Note 10) Weight (dry state) kg Approx. 130 Note 1) Use a 15% ethylene glycol aqueous solution if operating in a place where the ambient temperature and/or circulating fluid temperature is 10C or less. Note 2) Use fluid in condition below as the circulating fluid.

Station 2 35.5 28.5 Station 20 224.5 217.5 3 46 39 4 56.5 49.5 5 67 60 6 77.5 70.5 7 88 81 8 98.5 91.5 9 109 102 10 119.5 112.5 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 Station L1 L2 304 4/5 Port Solenoid Valve 10-SYJ3000 Type 32 Manifold: Side Ported/10-SS5YJ3-32Stations -M5, C4 N3 [ ]: AC (Lead wire length) 91.7

(Table clearance is included.) 130 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Rod Type LEY Series Model Selection LEY SeriessPage 238 Selection Procedure Positioning Control Selection Procedure Step 1 Check the work loadspeed. (Vertical transfer) Step 2 Check the cycle time.

flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 Circulating fluid flow [L/min] Fig. 9-23 Pump capacity(HRL100-A/W-40 CH1) 9.5.2 HRL200-A/W-40 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130

XL-25 XL-40 XL-50 XL-63 AC90240V Ass'y XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 Ass'y 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 Ass'y XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 Ass'y 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400/130 XL-80 XL-100 XL-160 AC90240V Ass'y XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 Ass'y

/ AC200V 800/40 1600/80 1600/80 2400/130 XLD-80 XLD-100 XLD-160 AC90240V XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10

0.01 c.p.m. 120 60 21 37 63 111 177 280 502 1 N 23 42 71 123 195 306 537 mm 4 4 6 8 8 12 16 g 58 96 134 265 345 515 952 1) 1625 L=20mm 3263 L=30mm 0.5MPa MHS3 16D MHS320D MHS325D MHS332D MHS340D MHS350D MHS363D MHS380D MHS3100D MHS3125D MHS3mm 16 20 25 32 40 50 63 80 100 125 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 14 25 42 74 118 187 335 500 750 1270 (1) N 16 28 47 82 130

resin bearings are used for all shafts. 1 Gripping point distance: 40 mm Model/Stroke Closing width [mm] (L1) Opening width [mm] (L2) Opening/Closing stroke [mm] (L2-L1) Max. operating frequency [c.p.m] Weight [g] Model Bore size [mm] MHL2-10DZ 60 20 56 76 280 MHL2-10D1Z 40 40 78 118 355 10 MHL2-10D2Z 60 96 156 430 MHL2-16DZ 60 30 68 98 525 MHL2-16D1Z 40 60 110 170 725 16 MHL2-16D2Z 80 130

Model MHK MHS Gripping force (1) Bore size (mm) JIS Symbol Double acting Opening/ Closing stroke (Both sides) (mm) Gripping force per finger Effective value (N) Weight (2) (g) Action Model MHC External Internal MHT 28 60 130 250 460 28 60 130 255 465 28 60 130 255 460 6 10 16 20 25 6 10 16 20 25 6 10 16 20 25 6.1 17 40 66 104 3.3 9.8 30 42 65 1.9 6.3 24 28 45 4 4 6 10 14 4 4 6 10 14 4 4 6

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

153 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R1/4 49.2 55.8 50.8 25.9 49.8 44.8 18.8 120 143 21 32.6 59 10 122 146 22 34.4 60.8 20.9 12 137 160 17 36.5 62.9 6 140 163 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R3/8 49.2 57.4 52.4 25.9 51 46 20 130 153 21 32.6 59 10 133 156 22 34.4 60.8 20.9 12 219 237 21 32.6 62.8 18.5 10 86.3 30 29.7 25 R3/8 65.5 67.6 60.1 27.7 61.2 53.7 20.6 221 239 22 34.4

B C D E F G H 148 206 246 Model MHL2-40D MHL2-40D1 MHL2-40D2 80 138 178 188 246 286 288 406 486 116 174 214 348 466 546 72 130 170 12-4-13

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS Gripping force (1) Bore size (mm) JIS Symbol Double acting Opening/ Closing stroke (Both sides) (mm) Gripping force per finger Effective value (N) Weight (2) (g) Action Model MHC External Internal MHT 28 60 130 250 460 28 60 130 255 465 28 60 130

Fingers synchronized by a rack and pinion mechanism Model/Stroke Max operating frequency (c.p.m) Opening/closing stroke (L2L1)(mm) Weight (g) Width at closing (mm) (L1) Width at opening (mm) (L2) Bore size (mm) Model Built-in dust proofing mechanism 60 20 40 60 30 60 80 40 80 100 50 100 120 70 120 160 100 160 200 56 78 96 68 110 130 82 142 162 100 182 200 150 198 242 188 246 286 76 118 156

4 60 6.3 10 MHZJ2-10S Normally open 6 130 24 16 MHZJ2-16S 10 255 28 20 MHZJ2-20S 14 465 45 25 MHZJ2-25S 4 12 60 10 MHZJ2-10C Normally closed Single acting type, normally closed 6 31 130 16 MHZJ2-16C 10 56 255 20 MHZJ2-20C 14 83 460 25 MHZJ2-25C Note 1) Values for pressure of 0.5MPa, gripping point L= 20mm, at center of stroke.

Station n L1 L2 Station 2 35.5 28.5 Station 20 224.5 217.5 3 46 39 4 56.5 49.5 5 67 60 6 77.5 70.5 7 88 81 8 98.5 91.5 9 109 102 10 119.5 112.5 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 1-5-19 20 Series SYJ3000 Type 31 Manifold: Side Ported/SS5YJ3-31Stations -M3 [ ]: AC Grommet (G) Single solenoid coil is on same side

Applicable solenoid or air operated valve VV71-FPG Series VQ7-6 R1 R2 R1 R2 R1 R2 One solenoid energized (One pilot pressurized) 130 P Leakage (cm3/min (ANR)) 130 P Both solenoids unenergized (Both pilots unpressurized) B A 0 Interface regulator ARB250-00P A B Spacer Interface regulators can be placed on top of the manifold block to reduce the pressure of each of the valves. 4 2 4 2 4 2 1

1 2 2 ( 3 1 ) { 1 1 6 ) 2.79 ( 7 1 ) 4.03 1204) 2.56 (65) 3.15 130) 8 3 9 [2r3) E 1 5 7 (40) 4.57 ( 1 1 6 ) 362 (s2) 1 1 8 130) 205 t52) 0.55 ( 1 4 ) 3.94 (100) r.50 (38) (62) 1.34 (35) o.67 (17) M22x1 5 1.57 1 2 2 (31) (126) 2.43 o2) 8.46 1215) 2.56 (65) 0.55 14.0) 3.19 l 8 r ) ea2 1224) 'Min. Slroke = 079 (20mrt) w h Boot Mr limelers i.

port) (same on reverse side) 7 3 8.5 30 8 Model S ZZ Z SS CXS10-10-XB19 10 82 65 CXS10-15-XB19 15 87 70 30 (20) (Z) 2-M4 x 0.7 Thread depth 7 CXS10-20-XB19 20 92 75 CXS10-25-XB19 25 97 80 6 CXS10-30-XB19 30 102 85 CXS10-35-XB19 35 107 90 40 CXS10-40-XB19 40 112 95 CXS10-45-XB19 45 117 100 CXS10-50-XB19 50 122 105 CXS10-60-XB19 60 132 50 115 CXS10-70-XB19 70 142 125 CXS10-75-XB19 75 147 130

100W) Encoder Incremental system 15mm, 10mm Lead Ball screw Horizontal specification Slide screw Rolled, Ground Feed screw 15mm, 20mm Lead Rolled 20mm, 20mm Lead Guide High rigidity direct acting guide 3 Series LG1H LG1H20: Without Coupling / Dimensions 110 4-M6 x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130