ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

air-filter-e

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

Air Preparation Equipment

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

15

moment (6 to 15) [Graph 11] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 Moment M1, M3 [Nm] Moment M1, M3 [Nm] CY1S15-Z CY1S32-Z CY1S25-Z CY1S10-Z CY1S20-Z CY1S6-Z 1 10 0.5 5 200 300 100 400 100 400 300 200 Piston speed [mm/s] Piston speed [mm/s] M2 M2 [Graph 12] Allowable moment (6 to 15) [Graph 13] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 CY1S15-Z CY1S32-Z Moment M2 [Nm

Profile Design ISO/VDMA Air Cylinder Series CP95

Piston speed [mm/s] Maximum air consumption Q [Nl/min.] 100 125 2 300 400 500 300 400 500 80 150 200 150 200 63 50 100 100 32 40 30 40 50 30 40 50 25 20 20 20 15 15 16 10 10 8 2000 10 5 4 1500 3 1000 2 6 500 400 300 1 1 200 0.5 100 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Working pressure [MPa] 1.8-26 Series CP95 Average air consumption of compressed air cylinders and piping Thermal loss is not represented

CJ2X/CUX/CQSX/CQ2X/CM2X

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air

CJ2X/CUX/CQSX/CQ2X/CM2X

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 0 10 20 30 40 Work load [kg] Work load [kg] LEJS40B LEJS63B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 25% 10 10 Duty ratio: 50% 5000 5000 Duty

48

Cylinder stroke [mm] Bore size Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 Port thread type Nil M thread 12 to 32 Rc 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 40 to 100 TN NPT TF G 25, 50, 100, 150, 200 Refer to page 4 for intermediate strokes.

MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

100

90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

speed 100 Mbps*2 10/100 Mbps*2 (Automatic negotiation) 100 Mbps*2 125/250/500 kbps 230.4 kbps (COM3) Configuration file*3 ESI file EDS file GSDML file EDS file IODD file I/O occupation area Input 20 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input 14 bytes Output 22 bytes Terminating resistor Not included

LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

Possible to transfer a workpiece at low-speed.

mm apart from the center of rotation, where the load is applied. 100 Load Arm A Displacement MSQXB10A MSQXB20A 300 400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

For positive pressure For vacuum pressure For compound pressure For positive pressure (1 MPa) For positive pressure (2 MPa) ZSE20B(-L) ZSE20BF(-L) ISE20B ZSE20C ZSE20CF ISE20C ISE20C IO-Link compatible/ L type 2 MPa 1 MPa 1 MPa 1 MPa IO-Link compatible/ L type 100 kPa 100 kPa 100 kPa IO-Link compatible/ L type 0 0 0 0 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa 101 kPa 100 kPa 100 kPa 100 kPa

High Power Cylinder Series RHC

HS 8.5 SMC SMC SMC SMC 16 16 A 29 Auto switch B A 26 Auto switch B (36) D-B5/B6/B59W type 20 to 40 D-G5NTL type 20 to 40 50 to 100 50 to 100 Approx. HS Approx. HS 12 12 SMC SMC 24.5 24.5 A 33 B A 33 Auto switch B D-C73C/C80C type 20 to 40 D-H7C type 20 to 40 50 to 63 50 to 63 Approx. HS Approx.

MY2

speed mm/s Piston speed mm/s 5 Model Selection Series MY2 Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2HT40 MY2HT40 MY2HT40 40 40 40 30 30 30 MY2HT25 20 20 20 MY2HT25 MY2HT25 MY2HT16 10 10 10 MY2HT16 MY2HT16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000

SY

20 20 stations D R Includes the number of blanking plate assemblies.