High Vacuum Angle Valve, XL Series

For further details on solenoid valves, refer to the P/A solenoid valve catalog "SYJ 300, 500, 700" (E143-B). Note 3) Solenoid valves are shipped facing downward (flange side), but can be rotated to face upward.

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 63, Stroke(mm): 300, Max.

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 63, Stroke(mm): 300, Max.

V

175 Air Consumption S Type 26 (660) V A C U U M P R E S S U R E 95 130 175 SCFM (ln/min) L Type 16 (400) V A C U U M P O R T S 660mm Hg L 400mm Hg 1 Torr = 0.0197PSI I N L E T P O R T 10 10mm Tube 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF 10 10mm Tube 12 12mm Tube 02 Rc1/4 03 Rc3/8 T02 1/4NPTF T03 3/8NPTF Courtesy of Steven Engineering, Inc. !

3 Port Solenoid Valve

Replacement Parts Plug connector assembly (for plug lead) Sub-plate Lead wire length S07014A Port size S070S M3 M3 M5 M3 female thread M5 female thread 150 mm 300 mm 600 mm 1000 mm Nil 3 6 10 Gasket Mounting screw Valve model S070A S070B S070M Gasket No. S070A-80A-1 S070B-80A-1 S070M-80A-1 Valve model S070B S070C Mounting screw No.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Pressure: 0.5MPa Pressure: 0.5MPa speed Effective area Load ratio: 50% Load ratio: 50% (mm/s) mm2 Cylinder stroke: 60mm Cylinder stroke: 300mm (Cv) 6 10 16 20 25 32 40 150 300 VQD1151U M5 X 0.8 (Large flow 1.5 450 capacity) (0.08) 600 Characteristic values mentioned in the catalog are typical values and are not to be guaranteed. 750 1.13-1 Series VQD1000 Precautions Be sure to read before

CJ2X/CUX/CQSX/CQ2X/CM2X

20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.

CJ2X/CUX/CQSX/CQ2X/CM2X

20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.

CQS

Rubber bumper is standard equipment for long stroke type. 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Action 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 D Double acting 25 For "Manufacture of Intermediate Strokes", refer to page 7-4-5. Applicable Auto Switch/Refer to page 7-9-1 for further information on auto switches.

Precision Regulator

350 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) IR1020-01 IR1020-01 IR1020-01 Back pressure: 1.0 MPa Supply pressure: 1.0 MPa 1.0 0.8 0.204 0.9 0.7 Set pressure (MPa) Set pressure (MPa) 0.8 0.202 0.6 0.7 Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.198 0.3 0.2 0.2 0.1 0.196 0.1 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0 100 200 1.0

IR1000/2000/3000

pressure P1 (MPa) IR IR2010-02 IR2010-02 IR2010-02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa 0.7 VEX 0.204 0.4 0.6 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) AMR 0.202 0.5 Set point 0.3 ITV 0.4 0.200 0.2 0.3 IC 0.198 0.2 0.1 VBA 0.1 0.196 VE 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 100 200 300 400 500 600 700 800 900 1.0 Flow rate ( /min (ANR))

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

equipped with bracket. 1 Series VKF300 Standard specifications Type of actuation Fluid Ambient and fluid temperature Response time (at 0.5MPa {5.1kgf/cm}) Note 1) Direct operated type 2 position single solenoid Air Maximum 50C 10ms or less (standard), 15ms or less (low power comsumption type) Non-locking push type Not required (if lubricated, use class 1 turbine oil ISO VG32) Unrestricted 300

Digital Flow Switch

For analog voltage output of 0 to 10 V Can be changed Can be changed 10 5 At a time of shipment At a time of shipment Analog output [V] Analog output [V] 1 0 3150 300 0 3150 300 30 3000 30 3000 Maximum value of the display range Maximum value of 10% of the rated flow range 100% of the rated flow range 10% of the rated flow range 100% of the rated flow range the display range Flow [L/min]

VKF300

equipped with bracket. 1 Series VKF300 Standard specifications Type of actuation Fluid Ambient and fluid temperature Response time (at 0.5MPa {5.1kgf/cm}) Note 1) Direct operated type 2 position single solenoid Air Maximum 50C 10ms or less (standard), 15ms or less (low power comsumption type) Non-locking push type Not required (if lubricated, use class 1 turbine oil ISO VG32) Unrestricted 300

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 12-CY3B15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available

MLU

5 to 300 5 to 300 5 to 300 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 KA H2 K MM MM1 NA NB NC ND NE NG NH NH1 NI NJ NS NY P S ZZ ZZ1 NF Model 10 12 14 18 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M6 x 1 depth 12 49 57.5 60 72 5.5 5.5 6 7 14 14 15 18 MLUB25 MLUB32 MLUB40 MLUB50 14 15.5 16 21.5 7.5 depth 4.5 9 depth

Thermo-con/Rack Mount Type

Noise level Power consumption Air-cooled HECR004/006*1 49 dB 200 W HECR002 55 dB HECR004/006*1 400 W HECR008/010*2 Air-cooled Water-cooled HECR008*2 54 dB HECR008/010*2 300 W 200 W HECR012*2 48 dB Water-cooled HECR008/012 *1 200 W load *2 500 W load *1 200 W load *2 500 W load Simple operation Fluid fill port Fluid can be supplied without removing the product from the rack.