3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

Support Guide/11-LEFG Series

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 10.1 5.1 2.6 0.6 0.1 20 5.1 10.1 2.6 0.6 0.1 30 6.7 3.4 1.7 0.4 0.1 30 3.4 6.7 1.7 0.4

AC Servo Motor Driver (Pulse input type/Positioning type)

PA07 1 12 6 3 12 6 3 20 10 5 16 8 4 Feel length multiplication (STM) (Multiplier) PE02 0 0 (<1000 stroke)/0001 (>1000 stroke) Home position return type PE03 0010 3 (Stopper type) Home position return direction PE03 0010 1 (Motor side) Home position return Speed (rpm) PE04 500 150 300 600 150 300 600 90 180 360 112 225 450 Home position return/JOG operation Accelerationeration/De celeration

Vacuum System Peripherals:

Series ZM 13-14-20 4.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less

PF2A/PF2W

PF2A751/551 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510

MVGQ

Built-in magnet for auto-switches CE1 CE2 Maximum Driving Speed of Cylinders ML2B 1000 1000 900 900 C J G5-S Load factor: 10% Load factor: 50% 800 800 Cylinder speed (mm/s) Cylinder speed (mm/s) 700 700 600 600 CV 500 500 400 400 MVGQ 300 300 200 200 CC 100 100 0 0 12 16 20 25 32 40 50 63 80 100 RB SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) J Series Variations DDetailed specifications

Adsorption Plate

less 250 x 250 18 625 or less 282 Body size under 100 to 150 350 or less 300 x 300 20 900 or less 339 20 to 350 under 150 to 200 400 or less 23 Over 900 under 200 to 250 450 or less Order a thickness equal to or greater than that shown on the table.

Uniaxial Electric Actuator Series LJ1

LJ1S 10 5 300 50 Slide screw Lead 20mm LJ1S1011 LJ1S 20 Slider guide LJ1S 10 300 100 0.1 Slide screw Lead 20mm LJ1S 30 20 500 200 Slide screw Lead 20mm LJ1S2021 Caution 1) Vertical type is equipped with brake.

Compact Electric Actuator Series LG1

12.0 11.1 10.2 9.4 8.5 7.6 6.7 5.8 Aluminum alloy frame 15.9 Slide screw Stainless steel frame 21.6 20.1 18.8 17.4 16.0 14.6 13.2 11.9 10.5 9.1 24.9 C Operating temperature range 5 to 40 (with no condensation) 300 10 mm Lead Horizontal specification Ball screw Maximum work load 100W N 300 20 mm Lead 150 Slide screw 20 mm Lead 500 10 mm Lead Ball screw Horizontal specification Maximum

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Operating Fluid and Ambient Temperature Tightness of Valve (Leakage Rate) PTFE Seal material Leakage rate (With air pressure) 300 cm3/min or less Operating fluid temperature (C) Solenoid valve option (symbol) S, Q 183 Ambient temperature (C) Power source 20 to 60 AC 11 12 Direct Operated 2 Port Solenoid Valve Series VX21/22/23 For Steam/Single Unit How to Order (Single Unit) VX 2 0 21 01

MXS

(Unit: mm) A 2 2.5 4 5 5.5 10 B Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 3 3.11-5 Air Slide Table Series MXS How to Order MXS 12 50 F9N S Air slide table Number of auto switches Bore size (Stroke mm) 2 1 n 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100

CXS

to 10 st Graph (10) V = Up to 400 mm/s; Up to 10 st 3 2 V = Up to 100 mm/s V = Up to 300 mm/s CXSM CXSL 0.1 1 Weight m (kg) MX 0.05 0.5 MTS Weight m (kg) 32 MY 25 CXSM6 CXSL6 0.1 0 0.01 20 CY 20 40 60 80 100 0.05 Overhang l (mm) 15 MG Graph (8) Up to 30 st CX 10 0 0.01 V = Up to 100 mm/s V = Up to 300 mm/s 20 40 60 80 100 D0.05 Overhang l (mm) Weight m (kg) -X Graph (11) V = Over 400 mm/s

CXS

0.5 0 0.01 20 40 60 80 100 32 Weight m (kg) Overhang l (mm) 25 Graph (9) Up to 50 st 0.1 20 0.05 V = Up to 100 mm/s V = Up to 300 mm/s 0.05 0.04 15 10 0.03 0 0.01 Weight m (kg) 20 40 60 80 100 Overhang l (mm) 0.02 Graph (12) V = Up to 400 mm/s; Up to 30 st 2 CXSM CXSL 1 CXSL6 CXSM6 0 0.01 20 40 60 80 100 Weight m (kg) Overhang l (mm) 32 25 0.1 20 0.05 15 10 0 0.01 20 40 60 80 100 Overhang

MXS Series Air Slide Table

0.035 0.10 0.04 0.030 0.08 MXS12-100 MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 Table deflection mm Table deflection mm Table deflection mm 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20

Transfer

500 1000 1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) 30 40 20 20 5 4 3 10 10 5 4 3 ML2B40 ML2B40 2 5 4 3 Moment (Nm) Moment (Nm) Moment (Nm) 2 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B40 2

HRL

C] Circulating fluid temperature [C] HRL300-Am-20 (CH1)1 HRL100/200/300-Am-20 (CH2) 3.0 35 Ambient temperature 32C 30 2.5 Cooling capacity [kW] Cooling capacity [kW] Ambient temperature 45C or less 25 2.0 (Max. 1.5 kW)2 20 1.5 15 Ambient temperature 45C Rated 1.0 kW 1.0 10 0.5 5 0 0.0 20 30 40 15 20 25 Circulating fluid temperature [C] Circulating fluid temperature [C] Pump Capacity HRL200

Sine Cylinder Series REC

(mm) (mm) A H MM NDH10 NX1 U1 R2 Y Z A1 E1 L1 MM NDH10 R1 NX U1 A Applicable bore size (mm) 20 25, 32 40 Bore (mm) 20 25, 32 40 Part no.