To reassemble, push button firmly into spring clip. 2 Series NVM MECHANICAL VALVES HOWTO ORDER DIMENSIONS NVM 100 HOW TO ORDER NVM 120 N01 065 -rr vatve series T = 2-way;2porls = 3-way;2ports 120 130 I lRoller Material (06 & 07 Only) | -: Nylon(Standard) I S : Steel I lActuator 00 = Valve Body Only 05 = Plunger 06 : Roller plunger Inline 07 = Roller Plunger, Set 90" 08 : Toggle 30 = Push
To reassemble, push button firmly into spring clip. 2 Series NVM MECHANICAL VALVES HOWTO ORDER DIMENSIONS NVM 100 HOW TO ORDER NVM 120 N01 065 -rr vatve series T = 2-way;2porls = 3-way;2ports 120 130 I lRoller Material (06 & 07 Only) | -: Nylon(Standard) I S : Steel I lActuator 00 = Valve Body Only 05 = Plunger 06 : Roller plunger Inline 07 = Roller Plunger, Set 90" 08 : Toggle 30 = Push
120 50 100 12 2 9 80 up to 1000 45.5 153 63 126 16 4 12 100 up to 1000 54 178 75 150 16 4 14 120 FX FE FT MB FZ C95 Rear flange(G)/Locking at head end (Hl) Hl/ Rl Wl (mm) CA1 Cushion valve Stroke range Bore size (mm) ZZ ZZ FZ FY FX FT FD B Port 4-FD CS1 32 40 50 63 80 100 up to 500 157 149 79 32 64 10 7 50 up to 500 171 158 90 36 72 10 9 55 up to 600 188 176 110 45 90 12 9 70 FY B up to
distance: AN200 to 500 1 m, AN600 to 700 2 m, AN800 to 900 3 m Tension bolt Sound absorbing material (PE sintered body) Sound absorbing material (PE sintered body) Cover Case Without silencer With silencer Body 130 Hexagonal flats 120 Port size Hexagonal flats 110 100 Port size 90 80 Note 1) About the display of products material POM: Polyacetal PE: Polyethylene SPCC: Carbon steel S20C:
Push button Cover for push button 3410701-R 3410703 (White only) Color Red 3410701-B Black 3410701-G Green 2348 2/3 Port Mechanical Valve New New RoHS Lightweight 60 g 90 g (Conventional model: 95 g) VM100 Side ported (Conventional model: 111 g) VM200 Bottom ported Side ported, basic type Mounting interchangeable with the conventional model Available in vacuum applications (VM100) 100
Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension
90 90 115 115 115 145 145 6 6 6 6 6 6 8 8 72 72 72 86 86 86 106 106 110 110 110 130 130 130 170 170 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120 120 140 140 140 170 170 30 310 380 450 520
27 17 15 Rc 1/8 RB1006 50 M6 x 1.0 90 120 105 M10 x 1.0 40 16.5 25.5 117 130 10 10.5 29 20 28 Rc 1/8 RB1411 60 M6 x 1.0 0.5 100 130 105 1.0 M14 x 1.5 50 16.5 25.5 127 130 10 12.5 49 40 22 DRc 1/8 70 M8 x 1.25 0.5 120 160 121 1.0 M20 x 1.5 60 18.5 28.5 157 149 12 13.5 52 42 33 RB2015 Rc 1/4 90 M8 x 1.25 1.0 140 190 159 1.0 M20 x 1.5 84 20.5 35.5 187 194 12 12.5 51 36 35 -X PA dimensions
The guideline is 80% or less. 0 to 100 % 12 Effective load ratio The continuous effective load current is displayed. The effective value is displayed relative to the rated current of 100%. 0 to 300 % 13 Peak load ratio The maximum torque is displayed.
motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder
Set the parameter No.PC30 (direct specification selection) to " 2". -90- Device No.
Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore
Thus, it can be used in a Class 100 clean room.
Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls . $lid8 $crul{ Tyfr LXFHSSfI EE r4iil & *l t30omm) Thread I Deep [ ] shows lhe location at which origin poinl switch operales.
terminal X 92 94 97 DIN connector V 59 60 63 C R 47 (54) 54 (64) 61 (71) T 40 (47) 46 (56) 54 (64) Y 74 (81) 81 (91) 88 (98) U 47 48 51 W 84 (91) 90 (100) 98 (108) Q 23 25.5 28 VVX21l VVX22l VVX23l The figures in parentheses are a closed style at energizing ( ): Individual pressure 20.5 (17.5) 26.5 (22.5) 26.5 (22.5) 56 (67) 64 (81) 72 (87) 38 49 49 11 13 13 25 30 30 32 40 40 36 46 46 12
Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls .
60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate (l/min (ANR)) 14-
Symbol 1 Rotating the Mounting Hole 90 X401 This is a product with a 90 rotated vale guide mounting hole. ARJ X401 Standard model no. AR425 to 935 Rotating the mounting hole 90 ARX Dimensions AMR Other dimensions are the same as the standard type.
/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.
Lead 20: LEKFS40EA Lead 30: LEKFS40EH 20 10 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 5 Model Selection LEKFS Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) For Battery-less Absolute (Step Motor 24 VDC), Motor Parallel Type * The following graphs show the values when the moving force is 100%.