Cylinder with Lock Series CNS

40 90 63 43 14 18.5 215 35 35 to 1200 + 0.100 0 0.1 0.3 (mm) Bore size (mm) GR J K KA L M MA MM N P Q R RR S T U V VA H Z ZZ 125 140 160 30 M14 x 1.5 15 31 65 19 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 29 303 87.5 35 20 23 110 478 507 30 M14 x 1.5 15 31 75 19 M12 x 1.75 M30 x 1.5 35 1/2 93.5 25 32 343 95 40 20 28 110 528 560 35 M16 x 1.5 17 36 80 22 M12 x 1.75 M36 x 1.5 39 3/4 104 25 36 396

CNS

2 3/8 144 144 20 40 90 63 43 14 215 35 35 Up to 1200 Bore size (mm) N GR J K KA L M MA MM P Q R RR S T U V VA H Z ZZ 125 140 160 87.5 85.5 30 M14 x 1.5 15 31 65 19 M12 x 1.75 M30 x 1.5 35 1/2 25 29 303 35 20 23 110 478 507 95 93.5 30 M14 x 1.5 15 31 75 19 M12 x 1.75 M30 x 1.5 35 1/2 25 32 343 40 20 28 110 528 560 109 104 35 M16 x 1.5 17 36 80 22 M12 x 1.75 M36 x 1.5 39 3/4 25 36 396 45 25

Rotary Table/

61 60 28 40 22 6 65 67 65 32 48 19.5 30 6 76 13.5 67 65 32 48 22 6 68 77 75 35 54 21.5 34 7 87 15.5 77 75 35 54 24 7 77 Dimensions other than above are identical to the high precision type.

SYJ3000/5000/7000

-L-01 3 4 5 M plug connector (M): SYJ5 40-M-01 3 4 5 DIN terminal (D): SYJ5 40-D-01 3 4 5 M8 connector (WO): SYJ5 40-WO-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 Max. 10 75.4 50.1 [57.1] 64.1 34.7 49 M8 x 1 54.6 37.1 61.2 [68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 65.8 103.4 [107.8] 59.3 123 [127.4] 45.5 45.5 45.5 45.5 18.1 43.3 17 17 17 17 17 17 17

3

75 23.5 43 25.5 45 40 65 47.5 72.5 20 Extended M With arm CK CLK Retracted 25 20H7 (Arm side I.D

Vacuum

sggT 3 Lr 33 51 75 96 117 138 159 180 La ,15 6 al 1(F 12S r50 171 IQ 44 suction filter and silencer valve retease vatve vacuum switch (solid-state or diaphragm) Pnessune to-21iFllg (-030 mmllD. nozzle diameters for efficient aoolication. floul Incnemed by 40%. ) nozzle suction flow is 40% higher than nal designs. &Lig[tweignt. 15.5mm) width; 0.881bs. (4009f) weight.

Vacuum

sggT 3 Lr 33 51 75 96 117 138 159 180 La ,15 6 al 1(F 12S r50 171 IQ 44 suction filter and silencer valve retease vatve vacuum switch (solid-state or diaphragm) Pnessune to-21iFllg (-030 mmllD. nozzle diameters for efficient aoolication. floul Incnemed by 40%. ) nozzle suction flow is 40% higher than nal designs. &Lig[tweignt. 15.5mm) width; 0.881bs. (4009f) weight.

VZ100/300/500

SY Type 40/41 (Bottom ported) How to Order Applicable solenoid valve VZ514VZ514MVZ524VZ524MApplicable blanking plate assembly DXT201-15-4A VV3Z5 40 05 2 01 SYJ R port R port P/R port thread type Manifold VK Stations 40 41 Type 40 Type 41 P port 02 2 stations Nil Rc VZ 01 1/8 A port side Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Compact

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 Slide i Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Compact End Lock Cylinder Series CBQ2

size (mm) FD FT FV FX FZ A B A B FV M 82.5 65.5 75 58 5.5 8 48 56 65 32 92 75 81.5 64.5 5.5 8 54 62 72 40 4FD FX FZ FT L B + Stroke A + Stroke 93.5 75.5 83.5 65.5 6.6 9 67 76 89 50 95 77 89 71 9 9 80 92 108 63 Rod end male threads Bore size (mm) L L1 M 32 17 38.5 34 40 17 38.5 40 50 18 43.5 50 63 Rod end nut L1 18 43.5 60 Rear flange type/CBQ2G, CDBQ2G (mm) Rear flange type With rear lock

LX Series Compact Electric Actuators

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 i Slide Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

VQ7-6/7-8

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 40 Series VQ7-6/7-8 Specific Product Precautions 1 Be sure to read before handling. Refer to pages 37 through 40 for safety instructions and common precautions.

CNG

P K KA MM NA PG PH PL S FD FT FX FY FZ XA XB J l 0.25 ZZ 182 H e f h ZZ 202 35 30 16 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 220 198 40 30 17 62 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 5.5 7 60 30 75 3 12 M5 x 0.8 223 201 40 35 17 62 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 6.6 7 60 30 75 3 12 M5 x 0.8 247 (256) 227 (236) 50 35 17 70 6 14 M14 x 1.5 44

1.63

mm, V = 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 25 25 25 20 25 20 20 20 1 1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) (19) L = 50 mm, V = 400 mm/s (20) L = 100 mm, V = 400 mm/s 100 100 63 63 50 50, 63 50, 63 50 10 10 40 40 Load mass m (kg) Load mass m (kg) 40 40 32 32 32 32 25 25 25 25 20 20 20

CG5-S

10 M10 x 1.25 24 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 35.5 1/8 to 300 40 10 M14 x 1.5 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 44 1/8 to 500 50 14 M18 x 1.5 40 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 55 1/4 to 600 63 14 M18 x 1.5 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20