Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

5 !

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

3

Operating Range (mm) Auto switch model Bore size 12 16 20 25 32 40 50 63 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V 6.5 5 5 5 5.5 5 4 3 11 9.5 9.5 9 9 10 7.5 6 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W D-F79F/F7BA D-F7BAV/F7NT 7.5 6.5 6.5 6 6 6 Since this is a guideline including hysteresis, not meant to be guaranteed (assuming approximately 30% dispersion).

Compact Cylinder with Air Cushion Series RQ

30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 9 8 9.5 13.5 10 3 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Auto Switch Mounting Bracket Part Nos.

NCA1

2.5 0.3 3/8 3/8 1.26 1.06 0.62 .75 0.62 1 5 3/4 1.71 3 5/8 2.4 4 5/8 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 3 0 3/8 3/8 1.30 1.06 0.62 .75 0.62 1 5 7/8 1.75 3 3/4 2.48 4 3/4 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 1 1/4 3/4 5/8 7/8 3/8-24 3.75 0 1/2 5/8 1.57 1.18 1.05 1.25 0.87 1 3/8 7 1/2 2.34 4 1/4 2.72 5 5/8 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1/2 1 1/4 3/4 5/8 7

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

bases with 5 stations.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

5 CJ1 CJP CJ2 CM2 C85 !

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

Title not found

4-3/8 4-1/2 4-3/4 4-3/4 4-7/8 5 150 5-3/8 5-3/8 5-3/8 5-1/2 5-1/2 5-1/2 5-3/4 6 CAUTION: Horizontal or angle mounted cylinders (anything other than vertical) creates a bend stress on the rod when extended, just from the weight of the rod and cylinder itself.

Title not found

4-3/8 4-1/2 4-3/4 4-3/4 4-7/8 5 150 5-3/8 5-3/8 5-3/8 5-1/2 5-1/2 5-1/2 5-3/4 6 CAUTION: Horizontal or angle mounted cylinders (anything other than vertical) creates a bend stress on the rod when extended, just from the weight of the rod and cylinder itself.

MU

D-A79W 13 13 14 14 14 2 1 5 5 10 5 15 10 15 15 D-F7/J79 D-F7V/J79C D-F7W/F7lWV D-J79W/F7NTL D-F7BAL/F7BAVL D-F79F 20 Mountable only for equivalent bore sizes 40, 50, 63. 6.5 7 6.5 6.5 6.5 D-P5DWL 5 5 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

MU

D-A79W 13 13 14 14 14 2 1 5 5 10 5 15 10 15 15 D-F7/J79 D-F7V/J79C D-F7W/F7lWV D-J79W/F7NTL D-F7BAL/F7BAVL D-F79F 20 Mountable only for equivalent bore sizes 40, 50, 63. 6.5 7 6.5 6.5 6.5 D-P5DWL 5 5 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Indicator light 3.5 to 7 : AC 82.5 75 01 02 M plug connecter (M): VQZ2l5(R)-lMl56.5 Cover dia 1.5 Cross section 0.23mm2 (Lead wire) 58(63) 300 77(78) 89 Indicator light : AC 2.10-29 VQZ100/200/300 Base Mounted VQZ300 Valve single unit Grommet (G): VQZ3l5(R)-lGl02 03 37 5 2-4.5Mounting holes 23.5 5 R5 Cover dia 1.6 Cross section 0.34mm2 Manual override 2 A 45 18 3 R 1 P 47 76 300 (Lead wire

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Note 2) Through-hole in case of 5 mm stroke. Note 3) Through-hole in case of 5 to 15 mm stroke.

CNG

Load in direction of rod extension Load in direction of rod retraction m 0.3MPa Graph 5 F 0.4MPa Graph 6 m 0.5MPa Graph 7 F 19 Model Selection Series CNG Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 200 200 100 100 40 30 40 50 30 40 50 32 40 25 Load weight: m (kg) Load weight: m (kg) 20 20 20 32 10 10 25 20 5 4 3 5 4 3 2 2 1 1 100 500 400 300 200 100 0.5 500 400 300 200

Turntable Cylinder Series MGT

Series MGT Turntable Cylinder Operating Conditions Allowable eccentric load 300 200 l 200 P = 0.5MPa MGTL63 P = 0.5MPa 100 MGTM63 m 100 Larger than 100st 50 Load weight m(kg) Load weight m(kg) 40 50st or smaller 75, 100st 30 Larger than 50st 20 50 40 25, 50st 10 30 5 4 3 2 20 10 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) Eccentric distance

Guide Table Series MGF ø40, ø63, ø100 1

5 5 D-Y7BAL Since this is a guideline including hysteresis, not meant to be guaranteed.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12