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SCFM Flow Length of Run Feet Compressor HP 25 50 75 100 150 200 300 500 100 6 1/2 1/2 1/2 1/2 1/2 1/2 1/2 3/4 3/4 1 18 1/2 1/2 1/2 3/4 3/4 3/4 3/4 1 1 3 30 3/4 3/4 3/4 3/4 1 1 1 1-1/4 1-1/4 5 45 3/4 3/4 1 1 1 1 1-1/4 1-1/4 1-1/4 7-1/2 60 3/4 1 1 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 10 90 1 1 1-1/4 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 2 15 120 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 1-1/2 2 2 20 150 1-1/4 1-1

51

+ 50 80 5 30 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-B5 D-B64 D-G5 D-K59 (n 2) 2 70 + 50 (n 2) 25 + 50 5 70 25 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 75 + 50 (n 2) 30 + 50 D-B59W 10 75 30 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) Note 3) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

CL

CL CL1 Rod Side Flange Style Bore size (mm) MLGC B BZ FT FD FX FZ FY Rod side flange style: CLG1FN Head side flange style: CLG1GN 25 30 30 36 65 75 75 82 38 45 45 52 52 60 60 66 5.5 5.5 6.6 6.6 57.5 6 7 7 8 20 25 32 40 CNG 69 69 76 MNB For long stroke, refer to page 9-2-32.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Refrigerated Air dryer Series IDU/IDF

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A Groove Cover For 200 VAC: SY100 30 2A Pin Cover For other voltages of AC: SY100 30 3A Groove DC polar indication Lever Pin Without lead wire: SY100 30 A Lead wire length -+ Socket (with connector and 2 of sockets only) Lead wire Connector Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000

CE

Cylinder stroke (mm) Bore Size (mm) 100 75 50 25 12 0.41 0.37 0.33 0.29 20 0.80 0.74 0.68 0.62 Rod End Nut Dimensions Material: Steel 30 d D C H B (mm) Applicable bore size (mm) 12 20 d H B C D M5 x 0.8 3 8 9.2 7.8 M8 x 1.25 5 13 15.0 12.5 Electrical Wiring Output type The output signal of the high precision scale cylinder is A/B phase difference output (open collector output) as shown in

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

or less Closed center VQZ2000 Rubber seal 8.1 (0.45) VQZ2321 25 or less 33 or less 88 Metal seal 8.1 (0.45) VQZ2420 23 or less 30 or less Exhaust center 3 position Rubber seal 10.8 (0.6) VQZ2421 25 or less 33 or less Metal seal 6.3 (0.35) VQZ2520 23 or less 30 or less Pressure center Rubber seal 8.1 (0.45) VQZ2521 25 or less 33 or less Metal seal 12.6 (0.7) VQZ3120 17 or less 22 or less

Stability of suction position,

M22 x 1.5 Width across flats 30 D-D D-D M22 x 1.5 Rc1/8 52.5 61.5 A B Rc1/8 22 D D 26 22 32 D D 26 78.6 32 11 61 11 84.5 53.61) 22 75 44.11) 18 4 4 30 (Rotating angle) 30 (Rotating angle) 85 80 57 106 100 71.5 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-YF80BMJB10 126.5 186.5 497 492 532 ZP3E-YF80BMJB30 151.5 211.5 529 524 564 ZP3E-YF80BMJB50 171.5 231.5 553 548

XLAQ/XLDQ

Caution Bonnet assembly Bonnet Assembly: Component Part No.: q Model Flange (Valve) size Temperature specifications Indicator 16 25 40 50 XLAQ16-30-1 XLAQ25-30-1 XLAQ40-30-1 XLAQ50-30-1 General use XLAQ16A-30-1 XLAQ25A-30-1 XLAQ40A-30-1 XLAQ50A-30-1 XLAQ XLAQ16-30-1H XLAQ25-30-1H XLAQ40-30-1H XLAQ50-30-1H High temperature XLAQ16A-30-1H XLAQ25A-30-1H XLAQ40A-30-1H XLAQ50A-30-1H General

LG1H

of gravity (mm) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 L2 (mm) 400 Mer Rolling Yawing m 200 L2 Mer 0 10 20 30 Transfer load m (kg) m 4000 a = 1000 L3 (mm) L3 a = 3000 a = 2000 2000 m Mey a 0 10 20 30 Transfer load m (kg) Refer to page 183 for deflection data. 148 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

Slider Type/Ball Bushing Bearing

nut insertion Square nut insertion TW NL (mm) PA 65 66 Model A 125 132.5 CY1HT25 CY1HT32 EB 79 90 H 63 75 HA 46 52.5 HB 46 57.5 HC 61.5 72.5 HG 19.5 25 HP 58.5 69.5 HT 35 43 J M6 x 1.0 M8 x 1.25 LL 56 63.5 LW 119 130 M M6 x 1.0 M8 x 1.25 MM 10 12 N 20.5 23 NL 18 22.5 NT 9 12 EA 28.5 30 Model PB 108 115 CY1HT25 CY1HT32 PS 51 61 S 209 219 TW 110 124 W 136 150 XA 11.3 9.7 XB 9.5 2 Z 250 265

Air Fittings & Tubing

Burst pressure Min. bending radius (mm) 100 15 20 30 60 75 75 60 48 36 24 25 13 20 to +60C (Water: 0 to 40 C) (No freezing) Operating temp. Nylon 12 Material Precautions How to Order Be sure to read before handling.

SL5200

in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa V3 L 1 H 2 4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale

Short Stroke Electric Actuator Series LX

) 20 20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1

JA/JAH/JB/JS

86.5 30 30 32 36 36 36 41 41 41 46 46 50 55 60 65 75 5.5 7 8 10 13 13 17 17 17 19 19 19 22 24 24 27 12 12 13 14 14 14 16 16 16 18 18 20 21 23 25 29 2.4 3.2 4 5 5 5 6 6 6 7 7 7 8 10 10 11 6.4 8.1 9.2 11.5 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 5.3 6.8 7.8 9.8 12.5 12.5 16.5 16.5 16.5 18 18 18 21 23 23 26 CE2 ML2B C J G5-S CV MVGQ CC RB Floating Joint Replacement Parts Dust

JA/JAH/JB/JS

86.5 30 30 32 36 36 36 41 41 41 46 46 50 55 60 65 75 12 12 13 14 14 14 16 16 16 18 18 20 21 23 25 29 5.5 7 8 10 13 13 17 17 17 19 19 19 22 24 24 27 2.4 3.2 4 5 5 5 6 6 6 7 7 7 8 10 10 11 6.4 8.1 9.2 11.5 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 5.3 6.8 7.8 9.8 12.5 12.5 16.5 16.5 16.5 18 18 18 21 23 23 26 CE2 ML2B C J G5-S CV MVGQ CC RB Floating Joint Replacement Parts Dust

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

MU

1.4 0 Stroke length tolerance 378 121 159 197 235 30 46 83 IN 25 12 15 Cushion Rubber bumper 650 218 283 348 413 42 88 153 IN 32 14 24 Thread tolerance JIS Class 2 1056 366 472 578 683 56 155 261 IN 40 16 30 Equivalent tube I.D.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

80 40 45 50 55 60 65 70 75 80 85 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3