ZR

Nil F G Rc Example) Attached to the first and third stations ZR1-RV1-1 ZR1-RV1-3 ZR1-R1-A3 T NPTF Example) Attached to the first and third stations ZR1-R1-1 ZR1-R1-3 Example) ZZR106-R .1 pc. (Manifold base only) ZR120S1-K15MZ-EC ... 5 pcs. (Unit) ZR1-BM1 . 1 pc. (Blank plate) ZR1-R1-3 . 1 pc.

o

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

NVZseies

(M5)) (ln ca8e of % NPTF) M Vpe plug connector(M) L typ plug connector(L) 133S (340) ',3.A3 (3&) lo-32Nom. (Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O.

FSQ seies

\ote 1l D 'en\Ens o rodFs {{5oLr e1.L',o swl I rNole2r he iorres s.ow -E dnB_sro' s o'a-to shlch' D A7 dt D A3 rNol I N-moir, noarentfessildrcali4eome'r'o_ro oA)Dq AaoF F/9 rnd./9 Senbs RSDQ Auto Switch Specifications Applicable auto switch model Grommel (Vertical cable Grommet (Hotizontal cable access) Conneclor Grommet (two colors) Grommet Reed switch Connector Grommet {two colors/horizontal

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

o

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A3

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: w/o Lead Wire, Bracket: A3 (Bracket C), Operation Manual: K (Operation Manual, Calibration Certificate

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A3

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A3 (Bracket C)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C01 (Rc1/8), Piping Direction: L (Bottom Ported), Lead Wire: w/o Lead Wire, Bracket: A3 (Bracket C)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C01 (Rc1/8), Piping Direction: L (Bottom Ported), Lead Wire: w/o Lead Wire, Bracket: A3 (Bracket C)

Model: 520 (2.0 to 16.0 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), I/O Specifications: A3 (IN1: 0-10 VDC, IN2: External Control Input, OUT1: 0-10 VDC), Lead Wire: N (None), Bracket: N (None), Operation Manual: Y (None)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A3

Size: 3/8, Cleaning Grade: B Grade: Ultrasonic Cleaning, Pressure Setting: 0.05 to 0.7MPa, Relief Function: Non-relieving, Thread: NPT, Port Size: Rc 1/2, Direction of Gauge Port: -

Size: 3/8, Cleaning Grade: B Grade: Ultrasonic Cleaning, Pressure Setting: 0.05 to 0.7MPa, Relief Function: Non-relieving, Thread: NPT, Port Size: Rc 3/8, Direction of Gauge Port: -

Size: 3/8, Cleaning Grade: B Grade: Ultrasonic Cleaning, Pressure Setting: 0.05 to 0.7MPa, Relief Function: Non-relieving, Thread: NPT, Port Size: Rc1/4, Direction of Gauge Port: -

Size: 4 (3/8), Cleaning Grade: 1 (B Grade: Ultrasonic Cleaning), Pressure Setting: 1 (0.05 to 0.7MPa), Relief Function: 0 (Non-relieving), Thread: N (NPT), Port Size: 04 (Rc 1/2)

Size: 4 (3/8), Cleaning Grade: 1 (B Grade: Ultrasonic Cleaning), Pressure Setting: 1 (0.05 to 0.7MPa), Relief Function: 0 (Non-relieving), Thread: N (NPT), Port Size: 03 (Rc 3/8)

Size: 4 (3/8), Cleaning Grade: 1 (B Grade: Ultrasonic Cleaning), Pressure Setting: 1 (0.05 to 0.7MPa), Relief Function: 0 (Non-relieving), Thread: N (NPT), Port Size: 02 (Rc1/4)