5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

C6: One-touch fitting for 6 D side VQD Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D 1 set (F kit 9 station manifold base) SQ1130-5-C6 4 sets (2 position single) SQ1230-5-C6 4 sets (2 position double [latching]) SSQ1000-10A-3 1 set (Blanking plate) The asterisk denotes the symbol for assembly.

SZ3000

G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V The above is

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

, C8, C10, 02 (7.5) (5.5) 26 C8: One-touch fittings for 8 C6: One-touch fittings for 6 (4) 44.5 Mounting holes Grommet (G) C10: One-touch fittings for 10 02: Rc(PT)1/4 U side DIN rail clamp screw n Manual override 5 A A A A 2 4 B 4 4 4 4 (L4) (L3) 2 L2 L1 3 B 2 2 P=19 B 2 1 SMC B 21 Stations 6 D side 9 9 10.5 10.5 58 37 95 (Single) (C6, C8) 17.5 10.5 (C10) 116.5 (Double) 130 (3 Position

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

SUP/EXH block assembly (U side mounting) 10-SZ3160-5LOZ-C6 (-Q) 2 sets (Single solenoid part no.) Single solenoid (24 VDC) 10-SZ3160-5LOZ-C6(-Q) (2 sets) 10-SZ3260-5LOZ-C6 (-Q) 3 sets (Double solenoid part no.) The asterisk denotes the symbol for assembly. Prefix it to the part no. of the solenoid valve, etc. Stations are counted from the D side as the 1st one.

VFR

, C8 (A, B port) VZS D side VFS C6, C8 Light/Surge voltage suppressor (At FZ) VS4 Plug assembly: VVFS2000-30AOption: Refer to page 3-5-8.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

fitting ass'y for 6 C8: One-touch fitting ass'y for 8 DIN rail clamp screw 23 P=22 L1 L2 L3 (C6, C8) (C6, C8) 9.5 9.5 (C6, C8) (C6, C8) Mounting hole for 2-M4 9.5 9.5 4.5 Mounting hole for 2-M6 IN IN IN IN 5.5 80 6.5 (40) 69.5 58 80 37.5 39.5 Residual pressure release manual override U side D side Stations (5) 10.5 1 2 3 n 22 7 (59.5) 58 20.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting

42

CU Note 2) Exhaust cleaner: U side exhaust K Note 3) Special wiring specifications (Except double wiring, 13 stations or more) N Note 4) Name plate SD Note 2) Direct exhaust with silencer box: D side exhaust SU Note 2) Direct exhaust with silencer box: U side exhaust W IP65 enclosure Stations Cylinder port 03 3 stations 0 U side mounting D D side mounting 18 18 stations C6 6 One-touch fitting

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

VZS

VV5ZS3 02 06 51F 1 D Thread type VK Series VZS3000 Manifold Standard Nil NPT Rc N T F VZ Plug-in type Stacking type manifold base with D-sub connector NPTF G Option Port size VF Rc 1 8 02 Rc 1 4 01 U side Connector mounting direction VFR Connector mounting position Symbol Applicable stations Embedded type One-touch fitting Applicable tubing O.D.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Non-locking push style Push-turn-locking slotted style Push-turn-locking knob style D E SY3000-37-61A 1.2-63 Series SYJ7000 Common SUP/Common EXH 20 Type (5 Port/Body ported) How to Order SS5YJ7--20-05 A, B port Stations Applicable solenoid valve 2 stations 02 01 C6 C8 01 C6 C8 SYJ7l20-lP port Rc(PT)1/8 : : 15 stations 15 SYJ7l23-lR port Rc(PT)1/8 Note) For more than 6 stations, supply air

SYJ300/500/700

It is already built-in to the rectifier circuit. 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VG How to Order Manifold Assembly (Example) VP D side U side 1 3 4 5 stations 2 VQ VQZ VQZ212-5M-C6 4 set VV3QZ22-05C VVQZ200-10A-2 VQZ212-5M-C6 1 set (C kit 5 stations manifold base) 1 set (Blank plate assembly) 4 sets (N.C. style) VZ VS Prefix "" mark to valves etc. to be assembled on the manifold.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

light 37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

They can be ordered in lots of 10 pieces. d D Series SY3000 SY5000 SY7000 Part No.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

It is already built-in to the rectifier circuit. 2 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 Electrical entry 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] D With connector DIN terminal DO Without connector DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

Enclosure: W (IP67), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: +COM, Stations: 8 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting)

SI Unit: 0 (w/o SI Unit), Stations: 8 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: 0 (w/o SI Unit), Stations: 8 Stations, PE Port Location: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: Q (DeviceNet Omron CompoBus/D), Stations: 8 Stations, PE Port Location: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)