Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L3 L4 2.10-15 VQZ100/200/300 Body Ported VQZ300 VV3QZ32C Station C10: One-touch fittings for 10 C8: One-touch fittings for 8 C6: One-touch fittings for 6 n-C6, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P=19 1 21 6 Stations D side 1.8 (C6, C8) 17.5 3.5 20.5

AMR3000 to 6000

11 S 8 7 10 15 R 78 97 98 115 P 50 35 45 46.5 AL 1 4, 3 8 1 4, 3 8 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 103 121 131 161 10 10 70 70 264 302 370 436 100 120 130 160 180 210 246 290 AMR3000 AMR4000 AMR5000 AMR6000 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 3 4, 1 3 4, 1 Adapter assembly installation procedure Accessory

Table of Contents

Series CUK Free Mount Cylinder: Long Stroke Type Non-rotating Rod, Double Acting, Single Rod 6, 10, 16, 20, 25, 32 . 7 8 9 9 10 11 12 13 14 19 21 21 22 23 23 24 25 25 26 28 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 29 29 30 31 32 34 34 35 36 38 42 42 43 43 44

Speed Controller with

Note) The applicable cylinder bore sizes (mm) for AS1002F-02 are 2.5, 4, 6.

AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

E-P HYREG ® Series VY1 1

0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

VXD21/22/23

LVA LVH Connection 1 4 3 8 1 2 3 4 02 03 04 06 10 LVD Thread type Nil T F N Refer to the table (2) given below for availability. Rc NPTF G NPT Thread LVQ Refer to page 17-3-16 for ordering coil only. 1 LQ 32 40 50 For 32A For 40A For 50A Flange LVN Refer to the table (1) given below for availability.

Speed Controller with One-touch Fittings

AS3002F-11, AS4002F-11, AS4002F-13 are made of electroless nickel plated brass. Note 2) For the material and surface treatment of the lock nut option-J (round type), only the AS1002F-02, AS3002F, and AS40002F types use brass and electroless nickel plated. L-bracket DIN rail mounting bracket q w e q Caution Be sure to read this before handling the products.

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

F

1/4, 3/8 61 68 26 5.5 56 45.5 5.25 25 13.2 20.6 (N)AS3000-02, 03 Courtesy of Steven Engineering, Inc. !

Soft Start-up Valve AV2000/3000/4000/5000 1

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 VY1 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125

HRX-OM-W002

21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22

Thermo-chiller

No anchor bolt is included. *10 Weight when the circulating fluid is not included. *11 The capacity is 60 Hz even in the 50 Hz area when option C is selected. *12 The capacity is 60 Hz even in the 50 Hz area when option P is selected. *13 The weight will increase by 4 kg when option C and P is selected. 11 A Thermo-chiller Compact Dual/Basic Type for Lasers HRLE Series Scheduled to acquire

HRX-OM-X084

(This product will stop.) 7 (11) [WRN] lamp Lights up when a warning occurs. (This product will continue operation.) (12) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

: 48.4 N02: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or

Series VQ Base Mounted Metal Seal/Rubber Seal

Ambient and fluid temperature Note) Effective area (Cv factor) Max. operating fraquency Note) As per JISB8375-1981 (Supply pressure: 0.5 MPa) Dimensions Single Manifold Dimensions Equation L1=11n+20 n: Station (Max. 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 31 50 60.5 86 112.5 123 108 125 135.5 119 137.5 148 141 162.5 173 97 125 135.5 130 150 160.5 152 175 185.5 53 75 85.5 64

Series H, DL, L, LL Self-align Fittings

Thread Rc(PT) L1 L2 M 1 4 1 4 3 8 1 4 1 4 1 4 4 DHF04-02 27 DHF06-02 17 17 10 4 15 30.3 30.8 16 16.5 28 6 11 16 12 DHF06-03 31 19 32.8 18.5 8 DHF08-02 29.8 30 16 20 14 17 15.5 10 12 DHF10-02 30.8 37 DHF12-02 30.8 17 17 40 17 19 34 51 17 17 16.5 16.5 104 Series H, DL, L, LL Self-align Fittings Branch tee: DT Thread R(PT) Part No. Effective orifice (mm2) Applicable tube O.D.

90

Flow Rate Characteristics Relief Characteristics IR2020-02-A Supply pressure: 0.7 MPa IR2020-02-A Back pressure: 0.7 MPa ARJ 0.7 0.7 0.6 0.6 AR425 to 935 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 ARX 0.4 0.4 AMR 0.3 0.3 0.2 0.2 ARM 0.1 0.1 ARP 0 0 500 1000 1500 2000 0 0 150 300 450 600 IR-A IR-A Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] IR IRV Pressure Characteristics VEX Supply

VM

roller VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Cross roller plunger Toggle lever VM220-02-08 VM230-02-08 VM-30AR Red VM220-02-30R VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM-32AR Red VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AB Black VM220