CM2

SCM220A, #11, #3 SCM220A, #11, #3, #19 CM2L25SCM225A, #11 SCM225A, #11, #3 SCM225A, #11, #3, #19 CM2L32SCM232A, #11 SCM232A, #11, #3 SCM232A, #11, #3, #19 CM2L40SCM240A, #11 SCM240A, #11, #3 SCM240A, #11, #3, #19 1.4-40 Series CM2 Front Flange (F) CM2F Bore size Stroke S T (mm) Bore N NA NN P E B2 C2 D H2 I A F K AL FD Z B FT MM B1 FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8

AC

Q R Model Port size A B C D M P N B B E F G H J K L 1/8, 1/4 1/4, 3/8 124.5 153 153 188 3.3 4.3 0.8 0.8 80 80 80 105 140 181 181 238 38 38 38 41 40 48 53 70 147.5 56.8 60.8 60.8 65.5 30 41 41 50 50 64 64 84 24 35 35 40 5.5 7 7 9 8.5 11 11 13 5 7 7 7 22 34.2 34.2 42.2 50 70.5 70.5 88 23 26 26 33 AC2001 AC2501 AC3001 AC4001 194 194 229 1/4, 3/8 1/4, 3/8, 1/2 Option marks in the dimension diagram

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

28 FL Z H H2 H1 S P I F C2 A ZZ 66 60 60 60 75 75 75 11 8 8 8 13.5 10.5 10.5 10.5 7 5.5 5.5 5 40 32 25 20 24 22 22 18 154 122 120 116 22 17 17 13 41 32 32 26 50 45 45 41 6 6 5 8 8 8 1/8 88 64 62 62 45 41 41 37 42.5 34.5 30 24 47.3 37 37 30 M26 x 1.5 M26 x 1.5 M20 x 1.5 21 19.5 19.5 15.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 26-0.033

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

Table of Contents

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

42

Valve + Double check spacer with residual pressure exhaust (VVQ4000-25A1 5 ) q AXT632-17-11 (M3 x 87) 3 w AXT632-41-1 (M3 x 54) 2 Not necessary when mounting the sub-plate.

Table of Contents

11 HP 11 14.5 20 25 HR 30 36 41 51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Air Slide Table

Metal stopper with bumper Rubber stopper Shock absorber L1 L1 L1 10 5.5 33.5 8 9 6 20 5.5 39.5 11 12 9 30 14 39.5 11 13 10 40 17 39.5 11 13 10 50 22 39.5 11 13 10 75 41 39.5 11 13 10 100 47 39.5 11 13 10 125 72 39.5 11 13 10 Stroke K MZ Low thrust with high rigidity type MXQB Single side-ported type MXQC Height interchangeable type MXQ Auto Switch Mounting Made to Order Model Selection Common

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

134 11 77 99 116 53.5 73.5 53.5 43.5 M12 x 1.75 18 80 100 22 11 154 11 94 117 136 53.5 85 63 43.5 M12 x 1.75 22 100 For details about the rod end nut and accessory brackets, refer to page 7-6-20.

Air Fittings & Tubing

KQ2U23-M5 38 34.5 2.2 2.2 9 M5 X 0.8 10 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 1 8 KQ2U23-01S KQ2U23-02S 11 14 1 4 39.5 KQ2U04-M5 M5 X 0.8 M6 X 1.0 4 2.2 2.2 Kl KQ2U04-M6 40 36 10 11 10.4 16 4 10.4 1 8 42 38 KQ2U04-01S 4.2 4.2 11 Ml 1 4 KQ2U04-02S 46 40 20 14 42.5 KQ2U06-M5 M5 X 0.8 M6 X 1.0 2.2 2.2 12 KQ2U06-M6 43 39 13 Hl 1 8 12.8 45.5 41.5 KQ2U06-01S 12.8 11 17 6 1 4 49 43 17

CQ2

11 20 77 116 134 53.5 80 73.5 53.5 43.5 M12 X 1.75 18 100 117 11 11 22 94 136 154 53.5 100 85 63 43.5 M12 X 1.75 22 Refer to p.2.3-18 for rod end nut and optional brackets.

ZP

A B D A B D Model Model ZP3-T13B;3-B5 ZP3-T13B;6-B5 ZP3-T13B;10-B5 ZP3-T10B;3-B5 ZP3-T10B;6-B5 ZP3-T10B;10-B5 8.5 9.7 11.7 8.6 9.8 11.8 8.6 9.7 11.7 8.7 9.8 11.8 15 18 22 34.5 41 51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

ZP

A B D A B D Model Model ZP3-T13B;3-B5 ZP3-T13B;6-B5 ZP3-T13B;10-B5 ZP3-T10B;3-B5 ZP3-T10B;6-B5 ZP3-T10B;10-B5 8.5 9.7 11.7 8.6 9.8 11.8 8.6 9.7 11.7 8.7 9.8 11.8 15 18 22 34.5 41 51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Table of Contents

13 20 26 22 31 41 50 59.5 79 6 7.5 9.5 11.5 14 11 14 19 24 30 0.15 0.29 0.56 1.04 2.6 11 13.5 16 20 22 22 27 32 41 46 0.75 1 1.25 2 2.5 1300 3100 5000 7900 15300 6000 11000 18000 28000 54000 8-25-25 25 Series MGZ/MGZR Proper Auto Switch Mounting Position (Detection at stroke end) D-M9N/M9P/M9B D-F9NW/F9PW/F9BW A 28 28 26 D-A9, A9V D-F9BAL Bore size (mm) A 27 27 25 A 24 24 22 B 7 7 8 B 6

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

24 65 233 M20 x 1.5 30 27 22.4 9 19 60 228 0.15 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 258 M24 x 1.5 35 32 28 11 24 70 248 0.030 0.076 0.2 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 297 M30 x 1.5 45 42 35.5 13 30 80 282 0.030 0.076 0.036 0.090 0.18 0.23 0.3 100 100 80 65 M48 x 1.5 75 72 56 16 50 115 327 M39 x 1.5 60 57 45 15 41 100 312 11 Series CH2E/CH2F/CH2G/CH2H JIS Standard Hydraulic

VQ5000

260 3 199 219 2 158 178 1 117 137 11 527 547 n: Stations (11 stations max.)